• Journal of the Korean Vacuum Society
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• v.10 no.1
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• pp.112-118
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• 2001

Magnetic field is commonly used in low temperature processing plasmas to enhance the performance of the plasma reactors. E$\times$B magnetron or surface multipole configuration is the most popular. However, the properties of capacitively coupled rf plasma confined by axial static magnetic field have rarely been studied. With these background, the effect of magnetic field on the characteristics of capacitively coupled 13.56 MHz/40 KHz argon plasma was studied, Ion saturation current, electron temperature and plasma potential were measured by Langmuir probe and emissive probe. At low pressure region (~10 mTorr), ion current increases by a factor of 3-4 due to reduction of diffusion loss of charged particles to the wall. Electron temperature slightly increases with magnetic field for 13.56 MHz discharge. However, for 40 KHz discharge, electron temperature decreased from 1.8 eV to 0.8 eV with magnetic field. It was observed that the magnetic field induces large temporal variation of the plasma potential. Particle in cell simulation was performed to examine the behaviors of the space potential. Experimental and simulation results agreed qualitatively.

• The KIPS Transactions:PartD
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• v.13D no.7 s.110
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• pp.985-996
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• 2006

As the internet technologies develop, the geographic information system environment is changing to the web-based service. Since geospatial information of the existing Web-GIS services were developed independently, there is no interoperability to support diverse map formats. In spite of the same geospatial information object it can be used for various proposes that is duplicated in GIS separately. It needs intelligent strategies for optimal replica selection, which is identification of replication geospatial information objects. And for management of replication objects, OMG, GLOBE and GRID computing suggested related frameworks. But these researches are not thorough going enough in case of geospatial information object. This paper presents a model of location service, which is supported for optimal selection among replication and management of replication objects. It is consist of tree main services. The first is binding service which can save names and properties of object defined by users according to service offers and enable clients to search them on the service of offers. The second is location service which can manage location information with contact records. And obtains performance information by the Load Sharing Facility on system independently with contact address. The third is intelligent selection service which can obtain basic/performance information from the binding service/location service and provide both faster access and better performance characteristics by rules as intelligent model based on rough sets. For the validity of location service model, this research presents the processes of location service execution with Graphic User Interface.