• 대한기계학회논문집
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• 제14권6호
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• pp.1495-1508
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• 1990

본 연구에서는 전류밀도와 가공시간을 변화시켰을 때의 가공량, 가공상태를 검토해 보았으며, 촉침홀더의 가공각도를 달리하거나 재부착문제를 해결하기 위한 마 스크의 사용여부에 따른 촉침의 가공상태를 알아보기 위해 초기선단반경 2$\mu\textrm{m}$, 선단각 90˚의 다이아몬드 촉침을 이온스파터 가공기를 사용하고, 가공조건을 변화시켜서 초 정밀 가공품의 표면거칠기 측정에 적합한 0.5$\mu\textrm{m}$ 이하의 미세한 선단반경을 갖는 촉침 을 가공하기 위한 가공조건에 대한 실험을 하였다.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 춘계학술대회논문집 - 한국공작기계학회
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• pp.613-617
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• 2000

This paper descries the effect of the stylus tip size on the measuring error in surface topography measurement. To analyze the distortional effect of an actual surface geometry originating from the finite stylus size, the surface is modeled as a sinusoid and the stylus tip as a circle. the measuring error is defined as the ratio of the standard deviation of a tracing profile and an original profile. It is shown that this measuring error depends on the amplitude and wavelength of an original profile. In this paper, the spectrum analysis is applied to investigate the distortional effect due to the mechanical filtering of the stylus in the frequency domain. and, the cumulative power spectrum is applied to determinate the minimum wavelength limits to be measured with the various stylus tip radius from these results, a new method to select proper stylus tip radius is proposed.

• 한국정밀공학회지
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• 제7권3호
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• pp.37-47
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• 1990

In accordance with the high precision of mechanical elements, it has been required to high precision in surface roughness measurement and, therefore, stylus tip radius is manufa- ctured less than 2 .mu. m through ion sputter machining. In this experiment, by suing ion sputter machined stylus pf fine tip, radius and lapping machined stylus, surface roughness of standard specimens, silicon wafer were measured and then Rmax, Ra, RMS value were investi- gatedaccording to the variation of tip radius of stylus. As a result, measuring error due to the variation of stylus tip radius in surface roughness measurement was decreased by using ion sputter machined stylus and also the measuring accuracy was improved. And the measuring variation of Ra, RMS calculated from correlation coefficient lager than 0.9 on the wave of short period and amplitude using ion sputter machined stylus of fine tip radius.

• 한국정밀공학회지
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• 제8권3호
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• pp.105-113
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• 1991

The practicability of Ion-Sputter machining renders it possible to make diamond stylus for surface roughness measurement with micro stylus tip radius less than 2${\mu}mR$, and to measure surface roughness of fine-machined surface. In this study, we researched the wear or Ion-Sputtered stylus with 0.1${\mu}mR$ and 0.5${\mu}mR$ for micro-figure measurement and polished stylus with 0.5${\mu}mR$ according to measurement distance. As a result, we know that the case of Ion-Sputtered stylus is worn down easilier the case of polished stylus. And we know that in the evaluation of stylus wear, it is more useful method that examine the wear by measuring the variation of stylus tip radius than by evaluating the variation of Ra values.

• 한국정밀공학회지
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• 제3권1호
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• pp.69-76
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• 1986

The measuring Method by stylus, which measures surface roughness, has been widely used since G. Schmaltz developed the first equipment of that type. Withe the resent development of the measuring method by stylus, surface foughness testing instruments of the very high magnification ratio, hundreds of thousands, are manu- factured. However, as the techniques of the high precision roughness measurement are being required, the response problems due to the tip shapes and the plastic deformations of measured surface of mild material are to be serious factors. In this study, diamond stylus of tip radius $0.5\mu\textrm{m}$, $2\mu\textrm{m}$, $5\mu\textrm{m}$ and $10\mu\textrm{m}$ were used under the measuring force of 0.01gf, 0.02gf, 0.07gf, 0.4gf and 1.6gf, and from the experimental data, maximum measured value devrements between $2\mu\textrm{mR}$ stylus and $5\mu\textrm{mR}$ stylus, $2\mu\textrm{mR}$ stylus and $10\mu\textrm{mR}$ stylus are 22% and 31%, respectively when the measured value of $2\mu\textrm{mR}$ stylus goes to $0.01\mu\textrm{m Ra}$, $\lambda$ c2.5mm. And it is shown that plastic deformations on the plastic deformations on the measured surface are proportional to W/R(W;measured force, R;stylus tip radius).