• Journal of the Korean Society for Precision Engineering
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• v.27 no.7
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• pp.94-100
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• 2010

This paper describes the design and evaluation procedure of an ultra-precision rotary table for freeform generating machined tools. Design of the thrust and journal hydrostatic bearings and experimental evaluation of the table were performed. To get the compact size and less lost motion direct drive servomotor with ultra precision encoder. From the considered design, following performance were confirmed by experiment. The total stiffness of the prototype rotary table was 483.6 $N/{\mu}m$ and 97.6 $N/{\mu}m$ for axial and radial direction, respectively. Rotational accuracy of the table was investigated by capacitive sensor and reversal measurement technique, and 0.10 ${\mu}m$ radial direction and 0.05 ${\mu}m$ axial direction of the rotational accuracy were confirmed. The micro resolution of the table was also investigated with displacement of capacitive sensor, and $0.5/10000^{\circ}$ of micro resolution was confirmed. Index accuracy of the table was evaluated by the autocollimator and polygon mirror, and the $\pm0.39$ arcsec accuracy and $\pm0.16$ arcsec repeatability of the table were confirmed. Those are under the general requirements of ultra precision rotary tables for freeform generating machined tools.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.7-8
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• 2008