• Title/Summary/Keyword: 초정밀 스테이지

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Measuring Method of Planar Displacement Referring to The Double Linear Patterns (이중화된 패턴을 참조하는 평면 변위 측정 방법)

  • Park, Sung Jun;Jung, Kwang Suk
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.16 no.7
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    • pp.4405-4410
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    • 2015
  • Two-dimensional displacements are obtained from the sandwiched patterns, which superpose two linearly-periodic patterns orthogonally, respectively. The transparent top pattern is identified by deflection of the laser beam due to a difference of refractivity and the opaque bottom pattern is identified by deviation of the beam intensity due to a difference of reflectance. In the sample setup, the top pattern made up of build-up film is manufactured by UV laser machining and the bottom pattern is manufactured by ultra-precision trench machining and deposition for aluminum plate. The proposed decoding method is verified experimentally using the $10{\mu}m$ equally spaced sample patterns and the devised optical system. The Korea Academia-Industrial cooperation Society.

A Study on the Motion Characteristics of Ultra Precision Optical Element Alignment Stage (초정밀 광소자 정렬 스테이지의 구동 특성에 관한 연구)

  • Jeong Sanghwa;Cha Kyoungrae;Kim Hyunuk;Choi Sukbong;Kim Gwangho;Park Juneho
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2005.05a
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    • pp.81-86
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    • 2005
  • As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement to the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

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A study on the analysis of Weave Pattern by Digital Image (디지털이미지를 이용한 직물패턴분석에 관한 연구)

  • Lim, Ji-Hye;Kim, Sung-Min
    • Proceedings of the Korean Society of Dyers and Finishers Conference
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    • 2011.11a
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    • pp.44-44
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    • 2011
  • 본 연구에서는 직물조직의 분석과정을 자동화할 수 있는 전용 하드웨어 및 소프트웨어를 개발하였다. 직물조직의 분석은 직물 설계 및 품질관리 단계에서 매우 중요한 공정이나 현재까지도 확대경과 분해침에 의존하여 수작업으로 이루어지고 있는 것이 실정이라 자동화가 절실히 요구되는 분야라고 할 수 있다. 최근 컴퓨터 기술의 발달로 섬유산업 분야에서도 자동화 관련 연구가 많이 이루어지고 있으며 직물 분석 과정에 대한 연구도 여러 차례 시도된 바 있다. 여기에는 주로 디지털 영상으로부터 특징을 찾아내고 분석하는 이미지 프로세싱 기법이 쓰였는데 이는 재현성, 정확성, 속도 등에서 육안에 의한 방법과는 비교할 수 없는 장점을 가지고 있다. 그러나 기존의 연구들은 카메라의 한계로 인해 주로 저해상도의 이미지를 가지고 작업을 하거나, 이미지 프로세싱 또는 인공 신경망을 단독으로 적용하는 등의 한계를 가지고 있었다. 본 연구에서는 이러한 문제점을 극복하기 위해 초고해상도 직물 이미지를 획득한 뒤 이로부터 직물의 교차점을 인식하는데 필요한 파라미터를 추출하고 이를 인공 신경망에 학습시켜 직물 설계에 필요한 조직도를 생성하는 시스템을 개발하고자 하였다. 이를 위해 먼저 컴퓨터로 컨트롤이 가능한 직물 분석 전용 초정밀 XY 스테이지의 하드웨어를 설계 제작 하였으며 각종 이미지 분석 및 하드웨어 컨트롤에 필요한 전용 소프트웨어를 개발하였으며 그 결과 각종 직물의 조직을 매우 정확히 인식할 수 있게 되었다. 향후 이미지 획득 과정의 보완, 새로운 파라미터의 정의 및 신경망의 반복 학습을 통해 본 시스템이 보다 보완된다면 직물 분석 작업의 자동화를 통한 제품 개발과 생산에 소요되는 시간을 단축 및 품질 관리 공정의 자동화에 기여할 수 있을 것으로 기대된다.

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The Simulation of Cutting force Estimate Model at Micro-Stage for Ultra Precision Cutting Machine of Nano Part (나노부품 초정밀가공기용 마이크로스테이지의 절삭력 예측모델 시뮬레이션)

  • 김재열;심재기;곽이구;안재신;한재호;노기웅
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2003.04a
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    • pp.173-178
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    • 2003
  • Recently, according to the development of mechatronics industry that was composed of NT, ST, IT, RT and etc, the 1 necessity of nano-parts was increased. Because of the necessity, this research was started for improving work precision of the parts as fixing UPCU( Ultra Precision Cutting Unit)on lathe. So, in this research we executed the modeling of UPCU (Ultra Precision Cutting Unit) by the application of PZT, the relationship between the displacement of tool in UPCU and the cutting force of it has been in take a triangular position in the case of plane cutting. The modeling of system that is containing the fine displacement was performed. Also, we found like to find the optimal cutting condition through the simulation of relationship between the displacement and the cutting force.

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Motion Error Analysis of an Porous Air Bearing Table (다공질 공기베어링 테이블의 운동오차 해석)

  • Park, Cheon-Hong;Lee, Hu-Sang
    • 연구논문집
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    • s.34
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    • pp.101-112
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    • 2004
  • In order to analyze the motion errors of the aerostatic stage, it is necessary to consider the influence of the moment variation occurredinside the pads. In this paper, a motion error anaysis method utilizing the transfer functions on the reaction force and moment is proposed, and general characteristics of the transfer functions are discussed. Calculated motion errors by the proposed method show good agreement with the ones calculated by Multi Pad Method, which is considered the entire table as an analysis object. Also, by the introduction of the transfer function of motion errors, which represent the relationship between the spatial frequency components of the rail form error and motion errors, motional characteristics of the porous aerostatic stage can be generalized. In detail, the influence of the spatial frequencies is analyzed quantatively, and the patterns of the insensitive frequencies which almost do not affect the linear motion error or angular motion error according to the rail length ratio and the number of the pad are verified. The relationship between the moment variation occurred inside the pads and the motion errors is also verified together.

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Modeling and optimal design of monolithic precision XYZ-stage using flexure mechanism (유연기구를 이용한 초정밀 단일체 3축 스테이지의 모델링 및 최적설계에 관한 연구)

  • Shim, Jong-Yeop;Gweon, Dae-Gab
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.22 no.4
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    • pp.868-878
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    • 1998
  • There are recently increasing needs for precision XYZ-stage in the fields of nanotechnology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). Force measurements are made in the AFM by monitoring the deflection of a flexible element (usually a cantilever) in response to the interaction force between the probe tip and the sample and controlling the force neasyred constant topography can be obtained. The power of the STM is based on the strong distance dependence of the tunneling current in the vacuum chamber and the current is a feedback for the tip to trace the surface topography. Therefore, it is required for XYZ-stage to position samples with nanometer resolution, without any crosscouples and any parasitic motion and with fast response. Nanometer resolution is essential to investigate topography with reasonable shape. No crosscouples and parasitic motion is essential to investigate topography without any shape distortion. Fast response is essential to investigate topography without any undesirable interaction between the probe tip and sample surface ; sample scratch. To satisfy these requirements, this paper presents a novel XYZ-stage concept, it is actuated by PZT and has a monolithic flexible body that is made symmetric as possible to guide the motion of the moving body linearly. PZT actuators have a very fast response and infinite resolution. Due to the monolithic structure, this XYZ-stage has no crosscouples and by symmetry it has no parasitic motion. Analytical modeling of this XYZ-stage and its verification by FEM modeling are performed and optimal design that is to maximize 1st natural frequencies of the stage is also presented and with that design values stage is manufactured.

Development of a 6 degrees-of-freedom micro stage for ultra precision positioning (초정밀작업을 위한 6자유도 마이크로 스테이지의 개발)

  • Kim, Kyung-Chan;Kim, Soo-Hyun;Kwak, Yoon-Keun
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.22 no.2
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    • pp.372-379
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    • 1998
  • A new 6 degrees-of-freedom micro stage, based on parallel mechanisms and actuated by using piezoelectric elements, has been developed for the application of micro positioning such as semiconductor manufacturing devices, high precision optical measurement systems, and high accurate machining. The micro stage structure consists of a base platform and an upper platform(stage). The base platform can effectively generates planar motion with yaw motion, while the stage can do vertical motion with roll and pitch motions with respect to the base platform. This separated structure has an advantage of less interference among actuators. The forward and inverse kinematics of the micro stage are discussed. Also, through linearization of kinematic equations about an operating point on the assumption that the configuration of the micro stage remains essentially constant throughout a workspace is performed. To maximize the workspace of the stage relative to fixed frame, an optimal design procedure of geometric parameter is shown. Hardware description and a prototype are presented. The prototype is about 150mm in height and its base platform is approximately 94mm in diameter. The workspace of the prototype is obtained by computer simulation. Kinematic calibration procedure of the micro stage and its results are presented.

Charaeteristics and Applications of the Established Testosterone Immunoassays (Testosterone 면역측정법의 정립 특성과 응용)

  • Lee, Chang-Joo;Lee, Joon-Yeoung;Yoon, Yong-Dal
    • Development and Reproduction
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    • v.5 no.1
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    • pp.59-71
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    • 2001
  • Since the first radioimmunoassay (RIA) was developed in 1970s, many conventional RIAs and non-isotopic immunoassays (NIA) had been developed in which the degree of precision, accuracy, specificity and practicability have progressively increased. Recently ultrasensitive assay method at femtogram to determine testosterone in serum, saliva and feces is required for the study of sexual dysfunctions in male and female, monitoring the psychological stress and conditions, aging process such as menopause and partial androgen deficiency in aging male, the hormonal changes of small experimental animals etc. This review discussed the recentd evelopments of steroid assay methods, based upon the testosterone assay results of authors far 20 years, and the problems associated the assay set-up, the characterizations and applications of the established procedures, and desifls of assay, reliablity criteria, and the practical aspects of assay set-up and application, based upon the data of the authors. The present study demonstrates the general problems methods to be consider in order to set up the highly sensitive assay methods and to increase the assay quality and the necessity of assay quality control program. To improve the assay quality of each laboratory and to compare the assay results in homeland, the national QC programs should be organized.

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