• Journal of the Korean Society for Precision Engineering
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• v.19 no.12
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• pp.120-126
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• 2002

The needs of ultra-precisely machined parts are increasing more and more. But the experimental data required to ultra precision machining of nonferrous metal is insufficient. The behavior of cutting in micro cutting area is different from that of traditional cutting because of the size effect. Copper is widely used as optical parts such as LASER reflector's mirror and multimedia instrument. In experimental, after oxygen-free copper is machined by ultra precision machine with natural mono crystal diamond tool (NCD) and synthetic poly crystal diamond tool (PCD), we compared chip formation and tool's wear according to used tool. Also, we researched optimized cutting condition with the results measured according to cutting condition such as spindle speed, feed rate and depth of cut. As a result, the optimal working condition that makes good surface roughness is obtained. The surface roughness is good when spindle speed is above 80 m/min, and feed rate is small and depth of cut is above 0.5 ${\mu}{\textrm}{m}$. In cutting of klystron anode and cavity 3.2 nmRa of surface roughness is obtained.

• Transactions of the Korean Society of Mechanical Engineers
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• v.14 no.6
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• pp.1495-1508
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• 1990

There are requirement of surface roughness in mechanical elements that has minute surface of several nm degree. When high precision surface roughness measurement is made with stylus type surface roughness measuring apparatus, measuring accuracy depend on the tip radius of diamond stylus. Therefore, ultra precision machining was accomplished using ion sputter machining in order to machining the stylus tip radius less than 0.5.mu.m, which is impossible through lapping machining. In this study, optimal machining condition for the ion sputter machining was obtained through the experiment under the various varing machinbing quantity and condition of diamond stylus. And as the result of applying this optimal condition, the good result was obtained that machining probability of stylus tip radius less than o.5.mu.m is 93%.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.10a
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• pp.83-88
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• 2003

In this study, experiments were conducted with an ultra-precision machine, developed In domestic, to find the characteristics and the most suitable cutting conditions of ultra-precision machining. To maximize the performance of the machine, the machine was installed in a room that is protected from vibration and is maintained constant temperature and constant humidity. Selected work pieces are an aluminum-alloyed material, which has excellent corrosion resistance and has low deformation. The used tool is synthetic poly crystal diamond which has excellent abrasion resistance and has low affinity. Four types of tool nose radius were used such as 0, 0.1, 0.2 and 0.4mm. Machining is performed with cutting speed of 500, 800 and 1000m/min., feed rate of 0.005, 0.008, 0.010mm/rev. and cutting depth of 0.0005, 0.0025 and 0.005mm respectively which can generally be used in the field as a cutting condition. As a method of evaluation surface roughness was measured for each cutting condition and reciprocal characteristics are computed for each tool nose radius, cutting speed, feed rate and cutting depth. As a result the most suitable cutting condition and characteristics of ultra-precision machining were identified which can usefully be applied in the industrial field.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.4 no.3
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• pp.32-38
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• 2005

Electrical discharge machining is the method of using thermal energy by electrical discharge. Generally, if the material of workpiece has conductivity even though very hard materials and complicated shape which are difficult to cut such as quenching steel, cemented carbide, diamond and conductive ceramics, the EDM process is favorable one of possible machining processes. But, the process is necessarily required of finish cut and heat treatment because of slow cutting speed, no mirror surface, brittleness and crack due to the residual stress for manufactured goods. In this experimental thesis, the super EDM drilling was developed for high precision semiconductor die steel and for minimization of leadframe width. It was possible to development of EDM drilling machine for high precision semiconductor die with the electrode guide and its modelling and stress analysis. The development of electrode with the copper pipe type was conducted to drill the hole from the diameter of 0.1mm to 3.0mm with the error of from 0.02mm to 0.12mm. From the SEM and EDX analysis, the entrance of the EDM drill was found the resolidification of not only the component of tungsten but also the component of copper.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.10 no.5
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• pp.31-38
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• 2001

This paper deals with the micro turning property of setting angle using diamond tool. The bed of the system has used the granite which has the thermal and vibrational characteristics superior to the cast iron bed for the common machine tool. To minimize the inner and outer vibration of the fuming system, an air pad system was manufactured and tested. The aero-static spindle system which has the excellent rotation accuracy was designed and manufactured. As a result of the micro-cutting test on aluminum alloy, tool setting angel have effected on surface roughness. From the results, the micro-cutting conditions hope to provide the useful actual data using in industrial fields.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.2
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• pp.1-9
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• 2006

As consumers in optics, electronics, aerospace and electronics industry grow, the demand for ultra-precision aspheric surface lens increases higher. To enhance the precision and productivity of ultra precision aspheric surface micro lens, the development of ultra-precision grinding system and process for the aspheric surface micro lens are described. In the work reported in this paper, an ultra-precision grinding system for manufacturing the aspheric surface micro lens was developed by considering the factors affecting the ground surface roughness and profile accuracy. This paper deals with mirror grinding of an aspheric surface micro lens by resin bonded diamond wheel and spherical lens of BK7. The optimization of grinding conditions on ground surface roughness and profiles accuracy is investigated using the design of experiments.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.10
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• pp.195-201
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• 2002

This paper deals with the precision grinding for aspherical surface of optical parts. A parallel grinding method using the spherical wheel was suggested as a new grinding method. In this method, the wheel axis is positioned at a $\pi$/4 from the Z-axis in the direction of the X-axis. An advantage of this grinding method is that the wheel used in grinding achieves its maximum area, reducing wheel wear and improving the accuracy of the ground mirror surface. In addition, a truing by the CG (curve generating) method was proposed. After truing, the shape of spherical wheel transcribed on the carbon is measured by the Form-Talysurf-120L. The error of the form in the spherical wheel which is the value ${\Delta}x$ and $R{^2}{_y}$ inferred from the measured profile data is compensated by the re-truing. Finally, in the aspherical grinding experiment, the WC of the molding die was examined by the parallel grinding method using the resin bonded diamond wheel with a grain size of ＃3000. A form accuracy of 0.16${\mu}m$ P-V and a surface roughness of 0.0067${\mu}m$ Ra have been resulted.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.132-138
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• 2007

최근 반도체 및 디스플레이 산업 등에서 초정밀 가공, 측정 등이 필요함에 따라, 외란과 내부 진동을 차단하는 방진 시스템에 대한 연구가 활성화 되고 있다. 기존에 소개된 여러 방진 시스템 중에서 가장 많이 연구되는 공기스프링은 압축 공기를 이용하여 큰 하중을 지지할 수 있으면서 상대적으로 낮은 강성으로 낮은 고유진동수를 유지할 수 있다. 본 연구는 기존의 레벨링밸브를 이용한 수동 방진 시스템을 분석하여 이를 개선하고 디스플레이장비용 능동 방진 시스템을 설계하였다. 공기의 비선형 특성에 기인하는 복잡한 비선형 시스템 제어에 PID 제어기 보다 유리한 퍼지 제어기를 설계하였고, 실험과 해석을 비교하였다.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1991.04a
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• pp.75-79
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• 1991

고도로 산업화가 진행됨에 따라 회전기계는 더욱 중요시되고 있으며 이의 성능 향상에 부단한 노력이 경주되고 있다. 특히 우주 시대의 개막과 더불어 우주선 및 인공위성에 사용하기 위해 초소형이며 초고속의 고성능회전모타 를 개발하기에 이르렀다. 한 예로서 미국립항공우주국(NASA)의 스페이스셔 틀에 사용되는 주엔진 터보펌프를 들 수 있는데 이 터보펌프는 접시만한 크 기로써 71000마력을 생성해 낸다. 이러한 가공할 만한 에너지 밀도와 유량을 감당해 내려면 종래의 회전기계보다는 훨씬 더 높은 회전속도를 가져야 한 다. 이러한 회전체는 큰 관성부하와 진 동 및 동안정성의 문제등을 내포하고 있다. 고성능 회전기계의 또다른 예로서 초정밀 가공용 공작기계를 들 수 있 다. 선반 혹은 밀링머신으로 초정밀가공을 행하기 위해서는 회전축의 진동이 극히 작아야 한다. 이와 같이 오늘날 갈수록 초고성능 초정밀도를 추구함에 있어서 회전축의 진동을 현장에서 모니터링하고 이 진동데이터를 분석하여 회전축을 제어하는 것이 강력히 요구되어진다. 따라서 in-situ 측정이 중요성 을 띠게 되었는데 이는 제어기술의 바탕이 되는 자료를 현장에서 제공할 수 있기 때문이다. 회전축 진동측정의 대상이 되는 것들은 모타, 발전기, 엔진 및 터빈등을 대표적으로 들 수가 있다. 여기서 소형회전기계의 축표면과 같 이 비교적 곡면을 이루고 있는 부분의 진동변위 측정에 신중한 고려가 요구 되어 진다. 이는 축의 곡면도에 따라 감도가 변화하기 때문이다. 따라서 평 판에 대한 calibration 챠트를 회전기계축진동 변위환상에 이용하면 곡률에 따라서 오차가 생기게 된다. 본 연구에서는 비접촉 축진동측정시 발생되는 오차에 대하여 검토하고자 한다. from the studies, the origin of ${\alpha}$$_1$peak was attributed to the detrapping process form trap with 2.88[eV] deep of injected space charge from the chathode in the crystaline regions. The origin of ${\alpha}$$_2$ peak was regarded as the detrapping process of ions trapped with 0.9[eV] deep originated from impurity-ion remained in the specimen during production process of the material, in the crystalline regions. The origin of ${\beta}$ peak was concluded to be due to the depolarization process of "C=0"dipole with the activation energy of 0.75[eV] in the amorphous regions. The origin of ${\gamma}$ peak was responsible to the process combined with the depolarization of "CH$_3$", chain segment, with the activation energy of carriers from the shallow trap with 0.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.34-41
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• 2004

The purpose of this paper is to look at the characteristics of surface finishing which is one of the form accuracies and to obtain the fundamental technical data from the process of machining with diamond tool through experiment and theoretical analysis. The experiments were conducted with domestic made ultra-precision machine and MCD.PCD tool, with aluminum alloyed material and brass being used for the work pieces. The goal of the size accuracy was set to 100nm. The most suitable tool nose radius and machining conditions were selected, and the variations of the surface roughness were observed using SEM method while machining the distance of up to 500km. These data were evaluated and they examined the variation of the machined surfaces while cutting up to 500km of machining distance. At the same time, the state for the wear of diamond tool nose was analyzed and carefully examined through the newest measuring device. Additionally, the characteristics of ultra-precision machining technology were studied through visual analysis.