• Title/Summary/Keyword: 청정계수

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시편 청정 공정변수에 따른 TiN 박막의 특성 변화

  • Jeong, Jae-Hun;Yang, Ji-Hun;Park, Hye-Seon;Song, Min-A;Jeong, Jae-In
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.295-295
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    • 2012
  • 본 연구에서는 아크방전을 이용한 질화 티타늄의 합성 과정 중에서, 시편 청정 공정변수를 변화시킴에 따라 계면에서의 미세조직 변화와 코팅층의 물성을 평가하였다. 아크 소스에 장착된 타겟은 $120mm{\Phi}$, 99.5 %의 티타늄 타겟을 사용 하였고, 시편과 타겟 간의 거리는 약 30 cm이며, 시편은 SUS를 사용하였다. 시편을 진공용기에 장착하고 진공배기를 실시한 후 Ar 가스 분위기에서 시편에 전압을 인가한 후 아크를 발생시켜 약 5분간 시편 청정을 실시하였다. 이 시편 청정 과정에서 시편 인가전압을 0~1,000 V로 변화시켰고 시편 정청이 끝나면 시편에 인가된 전압을 차단하고 코팅하였다. 질화 티타늄의 두께는 약 $3{\mu}m$로 동일하게 코팅하였다. 시편 인가전압 변화에 따라 시편청정 공정 시 계면에서 티타늄층이 코팅되거나 모재 내부까지 침투하는 현상을 관찰하였다. 시편청정 공정변수 변화에 따른 질화 티타늄의 코팅을 통해 계면의 미세조직과 성분의 변화를 주사전자현미경, 투과전자현미경 이미지와 에너지 분산분광기 (Energy Dispersive Spectroscopy ; EDS)를 통해 확인하였으며 나노인덴터를 이용해 경도, 탄성계수 등의 물성변화를 측정하였다. 본 연구에서 얻어진 결과를 이용하여 시편 청정 공정 제어를 통한 다양한 물성변화가 가능 할 것으로 예상된다.

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Performance Evaluation of Electronic Scale Mitigation Unit for Plate Heat Exchanger (판형 열교환기에 대한 전자식 스케일 완화 장치의 성능평가)

  • Seo, Hae-Sung;Shin, Sang-Chul;Kim, Kyong-Woo;Moh, Jeong-Hah;Kim, Dong-Hyun
    • Proceedings of the KSME Conference
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    • 2000.04b
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    • pp.13-18
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    • 2000
  • The objective of the Present study is to investigate the performance of electronic scale mitigation unit(ESMU), which reduces the amount of scale in a heat exchanger. A plate heat exchanger with 20 thermal plates is used for the tests. In order to accelerate the rate of fouling in a laboratory test artificial hard water of 2000 ppm(as $CaCO_3$) is recirculated at a flow rate 5L/min throughout the tests. The overall heat trans(or coefficients and fouling factors are examined. Results show that the ESMU technology can significantly reduce the scale deposits.

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Measurement of Mass Transfer Coefficients in a Benzene Adsorption Process (벤젠 흡착공정에서의 물질전달계수에 관한 연구)

  • Kwon, Jun-Ho;Choi, Moon-Kyu;Suh, Sung-Sup
    • Clean Technology
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    • v.14 no.1
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    • pp.47-52
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    • 2008
  • Among various mass transfer models to express adsorption rates for any adsorption processes, the linear driving force (LDF) model is used most. The present investigation aims at finding whether this model may be applied to real adsorption process for separation and removal of benzene. Comparison of numerical simulation results calculated by the LDF model with experimental data allowed us to find the mass transfer coefficients that are most appropriate for a specific adsorption process. Various breakthrough curves were obtained from experiments performed at many different temperatures and pressures, which in turn produced suitable mass transfer coefficients. These dependencies of mass transfer coefficient on temperature and pressure were represented by an Arrhenius type- and a power law type empirical equation, respectively.

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Characteristics of Size Resolved Atmospheric Aerosol in Seoul, 2001 using OPC measurement (광학적 입자계수기를 이용한 2001년 서울 에어로졸의 크기별 물리 특성)

  • 정창훈;전영신;최병철
    • Proceedings of the Korea Air Pollution Research Association Conference
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    • 2002.11a
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    • pp.434-435
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    • 2002
  • 에어로졸 입자의 크기 분포를 측정하는: 방법은 여러 가지가 있다. 이중 광학 입자계수기(Optical Particle Counter)는 직경 0.3-25$\mu\textrm{m}$의 입자의 산란광의 강도를 측정하여 입자의 크기별 개수를 측정하는 기기로 청정지역의 대기 중 부유하는 입자의 측정에 널리 사용되고 있다 (전영신 등, 1999). 본 연구에서는 기상청 기상연구소에서 측정한 광i부 입자계수기(HYAC/ROYCO 5230)의 측정자료를 이용하여 2001년도 1년간 서울의 대기 에어로졸의 특성과 경향을 분석하였다. 측정결과는 대기환경월보(환경부, 2001) (중략)

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Diffusion rate of C. I. Disperse Yellow 54 Dye in PTT and PET Textiles in the Presence of Supercritical Carbon Dioxide (초임계이산화탄소에 의한 PTT와 PET섬유 내에서의 C. I. Disperse Yellow 54염료의 확산속도)

  • Ihm, Bang-Hyun;Choi, Jun-Hyuck;Shim, Jae-Jin
    • Clean Technology
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    • v.13 no.4
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    • pp.244-250
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    • 2007
  • Sorption of C. I. Disperse Yellow 54 dye in poly(trimethylene terephthalate) (PTT) and poly (ethylene terephthalate) (PET) textile fibers were measured at various pressures, temperatures, and times in the presence of supercritical carbon dioxide and thereby the diffusivities of the dye in the fibers were calculated. The diffusivity of dye in the polymeric fibers was very low, only in the order of $10^{-12}\;cm^2/sec$, but increased with increasing temperature at constant pressure and with increasing pressure at constant temperature. The diffusivity in PTT fibers were about 1.5 to 3 times as large as that in PET fibers. As the fiber was very thin, the dye distribution in the fiber was almost uniform everywhere inside the fiber.

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Characteristics of Coal Devolatilization and Spontaneous Combustion at Low Temperatures (저온영역에서 석탄의 탈휘발 및 자연발화 특성 연구)

  • Sung Min Yoon;Seok Hyeong Lee;Tae Hwi An;Myung Won Seo;Sang Won Lee;Dae Sung Kim;Tae-Young Mun;Sung Jin Park;Sang Jun Yoon;Ji Hong Moon;Jae Goo Lee;Jong Hoon Joo;Ho Won Ra
    • Clean Technology
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    • v.29 no.4
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    • pp.288-296
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    • 2023
  • Coal is abundantly available compared to other energy sources and is used as a versatile energy resource worldwide. To address the environmental issues stemming from conventional coal utilization, efforts are underway to develop clean coal utilization technologies, with IGCC technology being a notable example. In IGCC plants, coal is subjected to a CMD process where both drying and pulverization are achieved by supplying hot air. However, if the temperature of the supplied hot air is excessively high, it can lead to devolatilization and spontaneous combustion, thereby compromising the stable operation of the CMD process. This study aimed to measure the devolatilization and spontaneous combustion temperatures of different types of bituminous coal, and to explore their correlations with the characteristics of the coals. Six coal types exhibited devolatilization between 350 and 400 ℃, while three coal types showed devolatilization at temperatures exceeding 400 ℃. Spontaneous combustion ℃curred in one coal type below 100 ℃, six coal types between 100 and 150 ℃, and two coal types above 150 ℃. The measured initiation temperatures were compared with the coal characteristics including the oxygen, moisture, Fe2O3, and CaO content, the H/C ratio, and the O/C ratio to establish correlations. Regression analysis was used to calculate the regression coefficients and determination coefficients for each ignition temperature. It was found that 52.44% of the FC/VM data significantly influenced the volatile matter ignition temperature, and 59.10% of the Fe2O3 data significantly affected the spontaneous combustionignition temperature.

Chemical Absorption of Carbon Dioxide into Non-Newtonian Polyacrylamide Solution (Polyacrylamide 비뉴튼액체에서의 이산화탄소의 화학흡수)

  • Hwang, Byung-Jin;Park, Sang-Wook
    • Clean Technology
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    • v.14 no.4
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    • pp.281-286
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    • 2008
  • Absorption rate of carbon dioxide was measured in the aqueous polyacrylamide (PAA) solution containing triethanolamine (TEA) of $0{\sim}2.0\;kg\;mol/m^3$ in a flat-stirred vessel with an impeller of 0.05 m and agitation speed of 50 rpm at $25^{\circ}C$ and 101.3 kPa. The chemical absorption rate of $CO_2$ was estimated by mass transfer mechanism based on the film theory using the physicochemical properties containing the liquid-side mass transfer coefficient of $CO_2$ and the kinetics of reaction between $CO_2$ and TEA to compare with the measured rate. The aqueous PAA solution acted as a reducing agent by viscoelastic property of non-Newtonian liquid based on the same viscosity of the solution.

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The Development of N2O Emission Factor at Municipal Solid Waste Incinerator (도시고형폐기물 소각시설의 N2O 배출계수 개발)

  • Ko, Jae Churl;Choi, Sang Hyun
    • Clean Technology
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    • v.25 no.1
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    • pp.40-45
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    • 2019
  • In this study, nitrous oxide ($N_2O$) emission concentration was measured 3 times continuously for 24 hours from August 27, 2018 to October 22, 2018 and non-dispersive infrared (NDIR) spectrometer was used to calculate $N_2O$ concentration of exhaust gas from municipal solid waste (MSW) incinerator. As a result of $N_2O$ emission characteristics, it is estimated that $N_2O$ emission concentration is due to the difference of furnace temperature, oxygen concentration rather than the chemical component of waste. The measured $N_2O$ emission concentration of MSW incinerator was obtained in the range of 53.6 ~ 59.5 ppm and the total average concentration was measured 55.6 ppm. Therefore, the amount of $N_2O$ emissions calculated from the $N_2O$ concentration was $98.05kg\;day^{-1}$ on average and the amount of $N_2O$ distribution in the range of $90.41{\sim}108.44kg\;day^{-1}$ was obtained. As a result, the $N_2O$ emission factor of the MSW incinerator was estimated to be $1,066.13g_{N_2O}\;ton_{waste^{-1}}$. The estimated $N_2O$ emission factor of the MSW incinerator was 20 times higher than calculated emission factor used in the Tier 2 method. Consequently, it is considered that the method of calculating the amount of $N_2O$ emission in the MSW incineration facilities using waste type and incineration amount needs to be supplemented to ensure accuracy.