• Title/Summary/Keyword: 채널도핑분포

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Relation between Conduction Path and Breakdown Voltages of Double Gate MOSFET (DGMOSFET의 전도중심과 항복전압의 관계)

  • Jung, Hakkee
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.17 no.4
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    • pp.917-921
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    • 2013
  • This paper have analyzed the change of breakdown voltage for conduction path of double gate(DG) MOSFET. The low breakdown voltage among the short channel effects of DGMOSFET have become obstacles of device operation. The analytical solution of Poisson's equation have been used to analyze the breakdown voltage, and Gaussian function been used as carrier distribution to analyze closely for experimental results. The change of breakdown voltages for conduction path have been analyzed for device parameters such as channel length, channel thickness, gate oxide thickness and doping concentration. Since this potential model has been verified in the previous papers, we have used this model to analyze the breakdown voltage. Resultly, we know the breakdown voltage is greatly influenced on the change of conduction path for device parameters of DGMOSFET.

Threshold Voltage Modeling of an n-type Short Channel MOSFET Using the Effective Channel Length (유효 채널길이를 고려한 n형 단채널 MOSFET의 문턱전압 모형화)

  • Kim, Neung-Yeun;Park, Bong-Im;Suh, Chung-Ha
    • Journal of the Korean Institute of Telematics and Electronics T
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    • v.36T no.2
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    • pp.8-13
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    • 1999
  • In this paper, an analytical threshold voltage model is proposed by replacing the conventional GCA(Gradual Channel Approximation) with the assumption that a normal depletion layer width in the intrinsic region will vary quasi-linearly according to the channel direction. Derived threshold voltage expression is written as a function of the effective channel length, drain voltage, substrate bias voltage, substrate doping concentration, and the oxide thickness. Calculated results show almost similar trends with BSIM3v3's results in a satisfactory accuracy.

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Analysis of the Drain Current in Nonuniformly Doped Channel(NUDC) MOSFET's due to Pocket Ion Implantation (포켓 이온주입으로 비균질 채널도핑을 갖는 MOSFET소자의 드레인 전류 해석)

  • Koo, Hoe-Woo;Park, Joo-Seog;Lee, Kie-Young
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.36D no.9
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    • pp.21-30
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    • 1999
  • Halo pocket implantation in MOSFETs, which is known to be an efficient method to provent the punchthrough and threshold voltage roll-off phenomena, decreases the drain current of MOSFET devices. Although the decrease of the drain current in halo structure MOSFET is usually explained in terms of the increase of the threshold voltage, more decrease in the drain current than is predicted by the increased threshold voltage has experimentally been observed. In this work, the effect of halo doping profile on the drain current degradation is investigated in terms of the field distribution along the channel. Effective mobility model of the halo MOSFETs due to pocket implantation is presented and the degradation of the mobility is shown to be effective in the further decrease of the drain current. Present model is shown to be in good agreement with experimental results.

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Analysis of Threshold Voltage for Symmetric and Asymmetric Oxide Structure of Double Gate MOSFET (이중게이트 MOSFET의 대칭 및 비대칭 산화막 구조에 대한 문턱전압 분석)

  • Jung, Hakkee
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.18 no.12
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    • pp.2939-2945
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    • 2014
  • This paper has analyzed the change of threshold voltage for oxide structure of symmetric and asymmetric double gate(DG) MOSFET. The asymmetric DGMOSFET can be fabricated with different top and bottom gate oxide thickness, while the symmetric DGMOSFET has the same top and bottom gate oxide thickness. Therefore optimum threshold voltage is considered for top and bottom gate oxide thickness of asymmetric DGMOSFET, compared with the threshold voltage of symmetric DGMOSFET. To obtain the threshold voltage, the analytical potential distribution is derived from Possion's equation, and Gaussian distribution function is used as doping profile. We investigate for bottom gate voltage, channel length and thickness, and doping concentration how top and bottom gate oxide thickness influences on threshold voltage using this threshold voltage model. As a result, threshold voltage is greatly changed for oxide thickness, and we know the changing trend greatly differs with bottom gate voltage, channel length and thickness, and doping concentration.

Analysis of Threshold Voltage for Double Gate MOSFET of Symmetric and Asymmetric Oxide Structure (대칭 및 비대칭 산화막 구조의 이중게이트 MOSFET에 대한 문턱전압 분석)

  • Jung, Hakkee;Kwon, Ohshin;Jeong, Dongsoo
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2014.05a
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    • pp.755-758
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    • 2014
  • This paper has analyzed the change of threshold voltage for oxide structure of symmetric and asymmetric double gate(DG) MOSFET. The asymmetric DGMOSFET can be fabricated with different top and bottom gate oxide thickness, while the symmetric DGMOSFET has the same top and bottom gate oxide thickness. Therefore optimum threshold voltage is considered for top and bottom gate oxide thickness of asymmetric DGMOSFET, compared with the threshold voltage of symmetric DGMOSFET. To obtain the threshold voltage, the analytical potential distribution is derived from Possion's equation, and Gaussian distribution function is used as doping profile. We investigate for bottom gate voltage, channel length and thickness, and doping concentration how top and bottom gate oxide thickness influences on threshold voltage using this threshold voltage model. As a result, threshold voltage is greatly changed for oxide thickness, and we know the changing trend very differs with bottom gate voltage, channel length and thickness, and doping concentration.

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Analysis of Drain Induced Barrier Lowering for Double Gate MOSFET Using Gaussian Distribution (가우스분포를 이용한 이중게이트 MOSFET의 드레인유기장벽감소분석)

  • Jung, Hak-Kee;Han, Ji-Hyung;Jeong, Dong-Soo;Lee, Jong-In;Kwon, Oh-Shin
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2011.10a
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    • pp.878-881
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    • 2011
  • In this paper, drain induced barrier lowering(DIBL) has been analyzed as one of short channel effects occurred in double gate(DG) MOSFET to be next-generation devices. Since Gaussian function been used as carrier distribution for solving Poisson's equation to obtain analytical solution of potential distribution, we expect our results using this model agree with experimental results. DIBL has been investigated according to projected range and standard projected deviation as variables of Gaussian function, and channel thickness and channel doping intensity as device parameter. Since the validity of this analytical potential distribution model derived from Poisson's equation has already been proved in previous papers, DIBL has been analyzed using this model.

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Deviation of Subthreshold Swing for the Ratio of Top and Bottom Oxide Thickness of Asymmetric Double Gate MOSFET (비대칭 이중게이트 MOSFET의 상하단 산화막 두께비에 따른 문턱전압이하 스윙의 변화)

  • Jung, Hakkee;Jeong, Dongsoo
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2015.10a
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    • pp.849-851
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    • 2015
  • 본 연구에서는 비대칭 이중게이트 MOSFET의 상하단 게이트 산화막 두께 비에 대한 문턱전압이하 스윙 및 전도중심의 변화에 대하여 분석하고자한다. 문턱전압이하 스윙은 전도중심에 따라 변화하며 전도중심은 상하단의 산화막 두께에 따라 변화한다. 비대칭 이중게이트 MOSFET는 상단과 하단의 게이트 산화막 두께를 다르게 제작할 수 있어 문턱전압이하 스윙의 저하 등 단채널효과를 감소시키기에 유용한 소자로 알려져 있다. 본 연구에서는 포아송방정식의 해석학적 해를 이용하여 문턱전압이하 스윙을 유도하였으며 상하단의 산화막두께 비가 전도중심 및 문턱전압이하 스윙에 미치는 영향을 분석하였다. 결과적으로 문턱전압이하 스윙 및 전도중심은 상하단 게이트 산화막 두께 비에 따라 큰 변화를 나타냈다. 또한 채널길이 및 채널두께, 상하단게이트 전압 그리고 도핑분포함수의 변화에 따라 문턱전압이하 스윙 및 전도중심은 상호 유기적으로 변화하고 있다는 것을 알 수 있었다.

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Analysis of Threshold Voltage Characteristics for Double Gate MOSFET Based on Scaling Theory (스켈링이론에 따른 DGMOSFET의 문턱전압 특성분석)

  • Jung, Hak-Kee;Han, Ji-Hyung;Jeong, Dong-Soo
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2012.05a
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    • pp.683-685
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    • 2012
  • This paper have presented the analysis of the change for threshold voltage and drain induced barrier lowering among short channel effects occurred in subthreshold region for double gate(DG) MOSFET with two gates to be next-generation devices, based on scaling theory. To obtain the analytical solution of Poisson's equation, Gaussian function been used as carrier distribution to analyze closely for experimental results, and the threshold characteristics have been analyzed for device parameters such as channel thickness and doping concentration and projected range and standard projected deviation of Gaussian function. Since this potential model has been verified in the previous papers, we have used this model to analyze the threshold chatacteristics. As a result to apply scaling theory, we know the threshold voltage and drain induced barrier lowering is changed, and the deviation rate is changed for device parameters for DGMOSFET.

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Potential Distribution Model for FinFET using Three Dimensional Poisson's Equation (3차원 포아송방정식을 이용한 FinFET의 포텐셜분포 모델)

  • Jung, Hak-Kee
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.13 no.4
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    • pp.747-752
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    • 2009
  • Three dimensional(3D) Poisson's equation is used to calculate the potential variation for FinFET in the channel to analyze subthreshold current and short channel effect(SCE). The analytical model has been presented to lessen calculating time and understand the relationship of parameters. The accuracy of this model has been verified by the data from 3D numerical device simulator and variation for dimension parameters has been explained. The model has been developed to obtain channel potential of FinFET according to channel doping and to calculate subthreshold current and threshold voltage.

An analytical model for deriving the 2-D potential in the velocity saturation region of a short channel GaAs MESFET (단 채널 GaAs MESFET의 속도 포화영역에서 2차원 전위 도출을 위한 해석적 모델)

  • Oh, Young-Hae;Jang, Eun-Sung;Yang, Jin-Seok;Choi, Soo-Hong;Kal, Jin-Ha;Han, Won-Jin;Hong, Sun-Suck
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.45 no.11
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    • pp.21-28
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    • 2008
  • In this paper, we suggest an analytical model that can derive the I-V characteristics in the saturation region of a short channel GaAs MESFET. Instead of the pinch-off concept that has been used in the conventional models we can derive the two-dimensional potential in the depletion region in order that the velocity saturation region cannot be pinched-off and the current continuity condition can be satisfied. Obtained expression for the velocity saturation length is expressed in terms of the total channel length, channel doping density, gate voltage, and drain voltage. Compared with the conventional channel length shortening models, the present model seems to be considerably accurate and more reasonable in explaining the Early effect.