• Title/Summary/Keyword: 집적 광학

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Integrated Photonic RF Phase Shifter Using an Electrooptic Polymer Modulator (전기광학폴리머 변조기틀 이용한 집적광학적 RF 위상변환기)

  • 이상신
    • Korean Journal of Optics and Photonics
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    • v.15 no.3
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    • pp.274-277
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    • 2004
  • An integrated photonic radio frequency (RF) phase shifter has been proposed and fabricated using a nested dual Mach-Zehnder modulator configuration in a new electro-optic polymer. The fabricated device shows a continuous voltage control of the RF signal phase. A near-linear phase shift exceeding 108$^{\circ}$was obtained for a 16-GHz microwave signal by tuning the do control voltage over a 7.8- $V_{pp}$ range.e.

Optical Systems in Lithography Tool (리소그래피와 광학계)

  • 곽창수;정해빈
    • Proceedings of the Optical Society of Korea Conference
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    • 2001.02a
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    • pp.76-77
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    • 2001
  • 리소그래피 공정은 반도체 공정에 있어서 그 선폭과 집적도를 결정짓는 핵심 공정이다 이러한 리소그래피 공정 중 만들고자 하는 패턴을 사진전사에 의해서 형성해주는 도구인 노광장비는 광학계, 스테이지계, 제어계로 구성되는 데, 여기에서는 이 중에서 광학계를 중심으로 노광장비를 설명한다. 노광장비의 기본적인 형태는 그 사용되는 광학계에 파라서 결정되는데, 크게 나누어서 밀착 노광 방식과 투영 노광 방식이 있다. (중략)

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Analysis of a Nonlinear Integrated-Mirror Etalon by the Characteristic Matrix Method (특성행렬을 이용한 비선형 집적거울 Etalon의 해석)

  • 김덕봉
    • Korean Journal of Optics and Photonics
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    • v.4 no.3
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    • pp.317-322
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    • 1993
  • In this paper we propose a method to analyze the nonlinear behavior of an integrated-mirror etalon by the characteristic matrix method. If the dependence of the refractive index and the absorption coefficient upon the light intensity are known, we can couple this with an equation by which we can evaluate the light intensity distribution inside an etalon for the given values of the refractive index and the absorption coefficient. By solving these coupled equations by the iteration method, we evaluate the transmission characteristics of a nonlinear integrated-mirror etalon. By the characteristic matrix method, we have demonstrated the static and dynamic bistable behavior of a nonlinear integrated-mirror etalon.

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