• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11b
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• pp.1376-1383
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• 2001

Modem technology depends on the reliability of extremely high technology equipments. In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria of high sensitive equipment should be represented in the form of 'exactness' and 'accuracy', because this is used as basic data for the design of building structure and structural dynamics of equipment. This paper deals with the properties of time and frequency domain in order to obtain more improved vibration criteria for high sensitive equipment.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.4
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• pp.1532-1538
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• 2011

In this study, we investigate the cracks that formed on the upper floor of the structures due to continuous dynamic loading. We explain the cause of floor slab cracks on the upper floor of the distribution center and discuss preventive measures that can enhance the center's functions and security. In order to explain how a forklift's excessive vibration can cause the cracks, we have measured and analyzed the vibration during a forklift's operation and discovered that the cracks form because the vibration exceeds the vibration criteria. Using a finite element modeling on such results, we have come up with optimal methods to reduce the vibration and confirmed their validity by measuring the vibration after implementing our methods.

• Journal of the Semiconductor & Display Technology
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• v.2 no.2
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• pp.25-30
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• 2003

In the case of a vibration sensitive equipment, it require a vibration free environment to provide its proper function. Especially, lithography and inspection device, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved Giga Class semi conductor wafers. This high technology equipments require very strict environmental vibration criteria in proportion to the accuracy of the manufacturing. In this paper, the dynamic analysis and modal test were performed to evaluate the dynamic properties of the constructing clean room structure. Based on these results, a structural dynamic modification(SDM) were required to satisfiy the vibration allowable limit for pression machine. Therefore, in order to improve the dynamic stiffness of clean room structure, the VSD system which can control the force applied on structure, were adopted and its utility were proved from dynamic test results of the improved structure after a modification work.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.09a
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• pp.49-54
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• 2005

In the case of a sensitive equipment, it require a vibration free environment to provide its proper function. Especially, lithography and inspection device, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved Giga Class semi conductor wafers. The aim of this study is to evaluate the allowable vibration response of a precision inspect ion equipment, which has some trouble in field, by using experimental measurement data and to proposal a proper ant i-vibration method.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.05a
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• pp.869-874
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• 2001

In order that precision equipment using high precision industrial operate normally. vibration criteria of expected area that equipment be set up is micrometer level. that method is a trust design for apply to in field, when there attend to quantifiable method. Hence, semi -empirical method that using on the basis of experimental data about undefined information (properities of vibration source, dynamic properities of structure, etc.,) for prediction of vibration response make the use of dynamic structure design of semiconductor ＆ TFT-LCD in the inside and outside country. Like this, for doing an optimal design of dynamic about structure, it is best important to get trust data that apply to semi-empirical method that is method of prediction vibration level. In this paper, on the basis of experimental data which was offered by a manufacturing company Of precisin equipment that plan to set up in semiconductor factory, we predicted vibration response on expected area that equipment be set up.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.39 no.2
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• pp.134-142
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• 2003

Most of the vibration and noise generating in small boats come from shipboard machinery such as main engine, generator and auxiliary machinery etc. In order to build up the comfortable environment for the crew and to reduce the ambient noise, and provide basic materials for reasoning selection application, the design under allowable vibration & noise conditions and the examination of vibration condition of the new ships, this paper researches the frequency spectrum and order analysis of vibration and noise. The obtained results are summarized as follows : Through comparing the small boat internal noise with the regulation of IMO and DNV, it revealed that the noise level of main engine room accords with the standard, and the noise of other places are beyond the values. In this paper, two boats are analyzed, which are same type, same size and power, but the main engines noise of them is different. In order to search the noise source, the noise of main engine room and relative parts are measured. The third order of measured points is dominant in frequency domain by the order analysis.