• Korean Journal of Materials Research
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• v.8 no.7
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• pp.621-627
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• 1998

The formation of Co-silicide between Co/Zr bilayer on the amorphous and crystalline Si substrates has been investigated. The films of Zr(50$\AA$) and Co(l50$\AA$) were deposited with e-beam evaporation system and were heattreated with the rapid thermal annealing system at the temperatures between 50$0^{\circ}C$ and 80$0^{\circ}C$ with 10$0^{\circ}C$ increments for 30 seconds. The phase identification of Co-silicide was carried out by XRD and the chemical analysis was examined by AES and RBS. The interface morphologies of Co/Zr bilayer films were investigated by cross sectional TEM and HRTEM. $CoSi_2$ was formed epitaxially on the crystalline Si substrate above $700^{\circ}C$ while polycrystalline $CoSi_2$ was grown on the amorphous Si substrate. The formation temperature of Co-silicide on the amorphous Si substrate was about 100 C lower than that on the crystalline Si. The COzSi phase was not identified on the both Si substrates. The formation temperature of first phase of Co-silicide on ColZr bilayer was higher than that on Co mono layer. CoSizlayer formed on the amorphous Si substrate exhibits better uniformity compared to the CoSiz formed on the crystalline substrate. The sheet resistance of CoSiz layer on crystalline Si was lower than that on the amorphous Si at high temperatures.tures.

• Journal of Bio-Environment Control
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• v.30 no.4
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• pp.271-277
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• 2021

In this study, experiments of local heating on crown and supplying warm nutrient for energy saving and improving growth of 'Seolhyang' strawberry were conducted. The temperature of inside and crown in greenhouses which were control (space heating 8℃) and test (space heating 5℃+crown heating) was measured. In the control greenhouse, the average of temperature and humidity in December was 7.1℃, 87.2%, respectively. In the test greenhouse, the average of temperature and humidity in December was 5.7℃, 88.7%. The temperature of crown and inside the bed were 7.9℃, 10.8℃ in control, 9.3℃, 12.7℃ in test. During the test period, the total 16,847×10³ kcal of energy was consumed in control greenhouse including space heating. In test greenhouse including space heating, crown heating and warm water supplying, total 9,475.7×10³ kcal of energy was consumed. So, energy consumption in test was 43.8% less than in the control. The total yields of strawberry during test period were 412.7g/plant for test greenhouse and 393.3g/plant for control greenhouse respectively.