• Title/Summary/Keyword: 주 연결장치

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PECVD 내에서 수소 펄스를 이용하여 생성되는 실리콘 입자의 변수에 따른 입경 분포 특성 실시간 분석에 관한 연구

  • Kim, Dong-Bin;Choe, Hu-Mi;An, Chi-Seong;Kim, Tae-Seong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.113-113
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    • 2012
  • 플라즈마 내에서 발생하는 입자는 플라즈마 내 전기적 및 화학적 특성으로 인해 응집이 적고 균일한 특성을 가진다. 이에 따라 도포성이 좋으며 낮은 응력을 가지는 박막의 형성이 가능하다. 이러한 특성을 가지는 나노입자는 메모리, 고효율 박막형 태양전지 등에 이용될 수 있다. 특히, PECVD (Plasma enhanced chemical vapor deposition) 공정 중 플라즈마가 켜져있는 동안 수소 가스를 펄스형태로 추가 주입하는 방법은 실리콘 이온 사이의 결합을 통한 표면 성장을 일부 방해하여 이를 통해 최종적으로 생성되는 실리콘 입자의 크기제어를 가능하게 한다. 이러한 과정으로 PECVD내에서 생성된 입자의 입경 분포는 기존의 경우 공정 중 포집을 한 후 전자현미경을 이용하였지만 실시간 측정이 불가능한 한계가 있었고, 레이저를 이용한 실시간 측정은 그 측정범위의 한계로 인해 적용에 어려움이 있었다. 이에 따라 본 연구에서는 저압에서 실시간으로 나노입자 크기분포 측정이 가능한 PBMS (particle beam mass spectrometer)를 이용하여 PECVD 내에서 수소가스 펄스를 이용하여 발생되는 실리콘 입자를 공정 변수별로 측정하여 각 변수에 따른 입자 생성 경향을 분석하였다. 실리콘 나노 입자의 측정은 PBMS 장비의 전단 부분을 PECVD 장치 내부에 연결하여 진행하였다. 수소 가스 펄스를 이용한 실리콘 입자 생성의 주요 변수는 RF pulse, $H_2$ pulse, 가스 유량 (Ar, $SiH_4$, $H_2$), Plasma power, 공정 압력 등이 있다. 이와 같이 주어진 변수들의 제어를 통해 생성된 나노입자의 입경분포를 PBMS에서 실시간으로 측정하고, 동일한 조건에서 포집한 입자를 TEM 분석 결과와 비교하였다. 측정 결과 각각의 변수에 대하여 생성되는 입자의 크기분포 경향을 얻을 수 있었으며, 이는 추후 생성 입자의 응용 분야에 적합한 크기 분포 특성을 가지는 실리콘 입자를 제조하기 위한 조건을 정립하는데 중요한 역할을 할 것을 기대할 수 있다.

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가스 펄스를 이용한 플라즈마 공정 중 생성되는 실리콘 나노입자의 변수에 따른 발생 특성 연구

  • Choe, Hu-Mi;Kim, Dong-Bin;An, Chi-Seong;Kim, Tae-Seong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.391-391
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    • 2011
  • 최근 나노에 대한 연구가 활성화되고 나노입자가 가지는 특성이 부각되면서 이를 소자 제조에 응용하고자 하는 연구가 집중적으로 이루어지고 있다. 박막에 포함된 나노입자는 메모리, 고효율 박막형 태양전지 등에 이용될 수 있는 가능성을 보여주었으며, 나노입자를 바탕으로 소자 제조에 관한 연구가 이루어지면서 플라즈마 내 발생하는 나노입자를 이용하여 패터닝 등에 적용하고자 하는 연구가 국내외에서 활발히 이루어지고 있다. 특히 플라즈마에서 발생하는 나노입자는 플라즈마 내 전기적 및 화학적 특징으로 인해 다른 입자 제조 공정과 달리 응집이 없는 균일한 입자를 제조할 수 있다. 이러한 플라즈마 내 발생 입자를 응용하기 위해서는 공정 조건에 따른 입자의 생성 및 성장 분석이 필요하다. 하지만 이러한 입자 발생 특성에 관한 연구는 기존에 밝혀진 반응 메커니즘으로 인해 수치해석적 연구는 체계적으로 진행되었으나 실험적 연구의 경우 적합한 측정 장비의 부재로 인해 제한이 있었다. 따라서 본 연구에서는 저압에서 실시간으로 나노입자 분포를 측정할 수 있는 PBMS (particle beam mass spectrometer)를 이용하여 나노입자 합성 공정 중 발생하는 입자의 존재를 확인하고 특성을 분석하였다. 실리콘 나노 입자의 측정은 PBMS 장비의 전단 부분을 PECVD (plasma enhanced chemical vapor deposition) 장치 내부에 연결하여 진행하였다. PECVD를 이용한 실리콘 나노입자 형성의 주요 변수는 RF pulse, 가스(Ar, SiH4, H2)의 유량, Plasma power, 공정압력 등이 있다. 본 연구에서는 실리콘 나노입자를 만드는데 필요한 여러 변수들을 제어함으로써 이에 따른 입경분포를 측정하였다. 또한 동일한 조건에서 생성 나노입자를 포집하여 TEM과 SEM을 이용하여 분석하여 그 결과를 비교하였다. 추후 지속적 연구에 의해 변수에 따른 나노입자 생성을 데이터베이스화 하여 요구되는 응용분야에 적합한 특성을 가지는 나노입자를 형성하는 조건을 정립 하는데 중요한 역할을 할 것을 기대할 수 있다.

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Study on Self-Reflexivity of Changgeuk Seopyenje (창극 <서편제>의 자기반영성 연구)

  • LEE, JINJOO
    • (The) Research of the performance art and culture
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    • no.32
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    • pp.333-370
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    • 2016
  • This study examines self-reflexive scenes of Changgeuk [창극; Korean classical opera] Seopyenje [서편제]. This show deals with Pansori [판소리; a kind of Korean folk play] and its singers. The uniqueness of this show is that although it is a new creative work of Changgeuk, the traditional Pansori music is used intactly. These characteristics are related to some self-reflexive scenes in the show: the narcissistic reference of Pansori makes to seem that this show inherits a artistry of Pansori; a play within a play and a role-play reinforce a reality on the action and characters of outer play; an intertextuality, bringing the narrative and music of Pansori Simcheong-ga [심청가] in this show, it makes audiences spontaneously discover a connection between the cited original text and the hypertext. Namely, the self-reflexivity of Changgeuk Seopyenje doesn't destroy an illusion, but rather it presents a kind of conservative self-reflexivity which uncovers a part of tricks for the illusion in order to create new illusion.

A Study on Reinforcement Method of Reinforced Soil Retaining Wall Through Field Experiment (보강토옹벽의 배부름현상 분석 및 보강 방법에 대한 실험적 연구)

  • Lee, Won-Hong;Mun, Byeong-Jo;Lee, Seuong-Yeol
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.23 no.4
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    • pp.103-112
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    • 2019
  • This study proposes a system to control the bulging phenomenon occurring in the reinforced earth retaining wall and to evaluate the reliability of the system by field experiment. In this study, drainage facilities were not installed in order to induce reinforcement earth retaining wall bulging, and the bulging was induced by rainfall. The induced bulging displacement exceeded the horizontal displacement criterion during the construction of FHWA. The retaining wall block was drilled and grouting was performed by inserting the nail into the drilling hole. The wire mesh is installed on the reinforcing surface and the head of the nail is connected horizontally so that the blocks of the reinforcing earth retaining wall can be supported with each other. In order to protect the reinforcements, the reinforcement surface was closed with shotcrete and a measuring device was installed to detect the progress of the displacement. After the reinforcement, the bulging were not found to progress any more, confirming the reliability of the system.

Case Analysis and Proposal of Visual Installations for the Purpose of Improving the Awareness of Emotional Labor (감정노동 인식개선 목적의 시각설치물 사례 분석 및 제안)

  • Kim, Suk-Rae;Yang, Keun-Young
    • Journal of Digital Convergence
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    • v.18 no.12
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    • pp.497-505
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    • 2020
  • As social interest in emotional labor grows, there are many related studies in progress in recent times. However most of the studies are focused on preventing harmful effects of emotional labor or seeking effective follow-up measures from the service provider's point of view. For this reason, with focusing on the bank teller service which is one of most representative face-to-face emotional labor, this study was progressed to suggest improvement measures by identifying and analyzing the current status of visual installations at the work space for awareness improvement of emotional labor from the customer's point of view. To this end, after a prior study, an field survey of 10 banks in the first financial sector was conducted to draw out problems and finally propose improvement directions with four aspects in link with the problems presented. This study is expected to have meaning in terms of securing diversity in emotional labor related research.

Analyzing Core Tehnology and Technological Convergence in Healthcare Using Topic Modeling and Network Analysis: Focus on Patent Information (토픽모델링과 네트워크분석을 활용한 헬스케어 분야의 핵심기술과 기술융합 분석 연구: 특허정보를 중심으로)

  • Kim, Eun-Jung;Choi, Hee-Jin
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.26 no.5
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    • pp.763-778
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    • 2022
  • In this study we aim to identify the core technologies that play central roles along with the peripheral technologies that contribute to the technology convergence in digital healthcare. A total of 376 korean-patents related to healthcare were gathered from 2011 to 2020, and a topic modeling technique and a network analysis were conducted on the collected data. Six major topics were derived through the topic modeling procedure which are "data collection", "signal measurement", "health management", "data transmission", "diagnostic treatment", and "measurement device". Each of the six topics were analyzed to depict relations among technologies, specify the convergence characteristics, and identify the core-technology through centrality analysis. The study illustrates the present status of digital healthcare technology development and the technological convergence in South Korea and is anticipated to help establish policies to foster healthcare industry.

Design and Making of PWM Control-based AC-DC Converter with Full-Bridge Rectifier (전파 정류기를 가지는 PWM 제어 기반의 AC-DC 컨버터 설계 및 제작)

  • Bum-Soo Choi;Sang-Hyeon Kim;Dong-Ki Woo;Min-Ho Lee;Yun-Seok Ko
    • The Journal of the Korea institute of electronic communication sciences
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    • v.18 no.4
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    • pp.617-624
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    • 2023
  • Recently, miniaturization and low power consumption of electronic products and improved efficiency and power factor improvement have become a matter of great interest. In this paper, an AC-DC converter based on PWM control was designed and made. The AC-DC converter is designed with a structure in which one rectifier circuit and one output voltage control circuit are connected in series. The rectifier circuit is a diode-based single phase full-wave current circuit and the output voltage control circuit is a DC-DC conversion circuit based on PWM control. Arduino was used as the main control device for PWM control, and LCD was configured at the output stage so that the control result could be checked. The error between the output voltage displayed on the oscilloscope and LCD and the target output voltage was confirmed through repeated experiments with the test circuit, and the validity of the proposed design methodology was confirmed by showing an error rate of about 5% based on the oscilloscope measurement value.

Design of Low-Complexity FSM based on Viterbi for Optimum Bluetooth GFSK Signal Receiver (최적의 Bluetooth GFSK 신호 수신을 위한 Viterbi 기반 저복잡도 FSM 설계)

  • Kwon, Taek-Won;Lee, Kyu-Man
    • Journal of Digital Convergence
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    • v.20 no.1
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    • pp.185-190
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    • 2022
  • Bluetooth is a common wireless technology that is widely used as a connection medium between various consumer electronic devices. The Bluetooth receiver usually adopts a Viterbi algorithm to improve signal-to-noise ratio performance, but requires complex hardware and calculations for continuous search and estimation for the irrational modulation indexes at the transmission. This paper proposes a non-coherent maximum estimation based 8-State Viterbi FSM to solve these complexity problems. The proposed optimal Viterbi FSM can detect Gaussian frequency-shfit keying symbol without any prior information and estimation for the modulation indexes. The HV1/HV2 packets are used for the estimation of the proposed algorithm and the simulation results have shown performance improvements with about 2dB for 10-3 BER compared to other ideal approaches such as decision direct method.

Analyses of Security Issues and Requirements Under Surroundings of Internet of Things (사물인터넷 환경하에서 보안 이슈 및 요구사항 분석)

  • Jung Tae Kim
    • The Journal of the Convergence on Culture Technology
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    • v.9 no.4
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    • pp.639-647
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    • 2023
  • A variety of communications are developed and advanced by integration of wireless and wire connections with heterogeneous system. Traditional technologies are mainly focus on information technology based on computer techniques in the field of industry, manufacture and automation fields. As new technologies are developed and enhanced with traditional techniques, a lot of new applications are emerged and merged with existing mechanism and skills. The representative applications are IoT(Internet of Things) services and applications. IoT is breakthrough technologies and one of the innovation industries which are called 4 generation industry revolution. Due to limited resources in IoT such as small memory, low power and computing power, IoT devices are vulnerable and disclosed with security problems. In this paper, we reviewed and analyzed security challenges, threats and requirements under IoT service.

Assessment of Lateral Behavior of Steel-concrete Composite Piles Using Full-scale Model Tests (실대형 모형 실험을 이용한 강관합성 말뚝의 수평 거동 특성 평가)

  • Kwon, Hyungmin;Lee, Juhyung;Park, Jaehyu;Chung, Moonkyung
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.29 no.5C
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    • pp.199-206
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    • 2009
  • This paper presents full scale model tests on the various types of model piles carried out to estimate the behavior of laterally loaded steel-concrete composite piles. Subgrade-reaction spring system was developed to simulate the reaction of ground in laboratory condition. In addition, lateral behavior of piles under working load condition was estimated using composite loading system, which is available for independent loading in vertical and horizontal direction. Steel-concrete composite piles showed higher efficiency in lateral resistance rather than drilled shaft made of reinforced concrete. The lateral resistance of composite pile was larger than the summation of steel pile and concrete pile due to the composite effect by steel casing. The effect of shear key or strength of concrete on the behavior of composite pile was examined. The substitution of reinforcing bar by steel casing was also investigated.