• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.91-91
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• 2010

본 논문은 펄스 직류전원 (Pulse DC) 플라즈마 소스와 반응성 가스인 $CF_4$와 불활성 가스인 Ar를 혼합하여 산업에서 널리 사용되는 유기고분자인 Polymethylmethacrylate (PMMA), Polyethylene terephthalate (PET), 그리고 Polycarbonate (PC) 샘플을 건식 식각한 결과에 대한 것이다. 각각의 샘플은 감광제 도포 후에 자외선을 조사하는 포토레지스트 방법으로 마스크를 만들었다. 펄스 직류전원 플라즈마 시스템을 사용하면 다양한 변수를 줄 수 있다는 장점이 있다. 공정 변수는 Pulse DC Voltage는 300 - 500 V, Pulse DC reverse time $0.5{\sim}2.0\;{\mu}s$, Pulse DC Frequency 100~250 kHz 이었다. 변수 각각의 값이 높아질수록 고분자의 식각률이 높아졌다. 특히, PMMA의 식각률이 가장 높았으며 PET, PC 순이었다. 샘플 중 PC의 식각률이 가장 낮은 이유는 고분자 결합 중에 이중결합의 벤젠 고리 모양을 포함하고 있어 분자 결합력이 비교적 높기 때문으로 사료된다. 기계적 펌프만을 사용한 공정 전 압력은 30 mTorr이었다. 쓰로틀 밸브를 완전 개방한 상태에서 식각 공정 중 진공 압력은 $CF_4$ 가스유량이 늘어날수록 증가하였다. 식각률 역시 $CF_4$ 가스유량(총 가스 유량은 10 sccm)이 많을수록 증가함을 보여주었다 (PMMA: 10 sccm $CF_4$에서 330 nm/min, 3.5 sccm $CF_4$/6.5 sccm Ar에서 260 nm/min., PET: 10 sccm $CF_4$에서 260 nm/min, 3.5 sccm $CF_4$/6.5 sccm Ar에서 210 nm., PC: 10 sccm $CF_4$에서 230 nm, 3.5 sccm $CF_4c$/6.5 sccm Ar에서 160 nm). 이는 펄스 직류전원 플라즈마 식각에서 $CF_4$와 Ar의 가스 혼합비를 조절함으로서 고분자 소재의 식각률을 적절히 변화시킬 수 있다는 것을 의미한다. 표면 거칠기는 실험 후 표면단차 측정기와 전자 현미경 등을 이용하여 식각한 샘플의 표면을 측정하여 알 수 있었다. 실험전 기준 샘플 표면 거칠기는 PMMA는 1.53nm, PET는 3.1nm, PC는 1.54nm 이었다. 식각된 샘플들의 표면 거칠기는 PMMA는 3.59~10.59 nm, PET은 5.13~11.32 nm, PC는 1.52~3.14 nm 범위였다. 광학 발광 분석기 (Optical emission spectroscopy)를 이용하여 식각 공정 중 플라즈마 발광특성을 분석한 결과, 탄소 원자 픽 (424.662 nm)과 아르곤 원자 픽 (751.465 nm, 763.510 nm)의 픽의 존재를 확인하였다. 이 때 탄소 픽은 $CF_4$ 가스에서 발생하였을 것으로 추측한다. 본 발표를 통해 펄스 직류전원 $CF_4$/Ar의 고분자 식각 결과에 대해 보고할 것이다.

• Fire Science and Engineering
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• v.30 no.1
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• pp.104-110
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• 2016

Positive displacement pumps with high pressure and water capacity are used large fires in various high-rise buildings. This study provides information for a performance approval standard of fire pumps for fire trucks based on centrifugal pump standards enacted in 2012. An experiment was conducted with a positive displacement pump for three levels of performance from the approval standard (V-1, 2, and 3). The efficiency of the pump was included in the reference, which requires the approval of 65% performance, the same as a centrifugal pump. The water pressure is between 1.5 and 2.5 MPa, and the required flow rate was established as at least $0.31m^3/min$ and up to $3.0m^3/min$. A relief valve was added to adjust the shut-off pressure due to the structural characteristics of the positive displacement pump. A strainer was also installed to prevent damage to the inside of the pump due to foreign matter. However, the strainer includes a difference from the positive displacement pump to operate without a vacuum pump and the centrifugal pump. This is due to the additional approval standard portion of the positive displacement pump, which is expected to be selected for more variety of fire-fighting equipment and proactive responses to fire suppression in a high-rise buildings and large fires. In conclusion, this approval standard was enacted in January 2016.

• Journal of the Korean Institute of Gas
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• v.18 no.4
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• pp.13-20
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• 2014

In natural gas distribution system, gas pressure is regulated correspond to requirement using throttle valve which is releasing huge pressure energy as useless form. The waste pressure can be recovered by using turbo machinery devices such as a turbo expander. In this process, excessive temperature drop occurs due to Joule-Thompson effect during the expansion process. Installing natural gas boiler before or after the turbo expander prevents temperature drop. Fuel cell or gas engine hybrid system further improve the efficiency, but 1~2% of total transporting natural gas is used for operating the hybrid system. In this study, a heat pump system is proposed as a preheating device which can be operated without using transporting natural gas. Thermodynamic analysis on evaporating and condensing temperatures and refrigerants is conducted. Results show that R717 is proper refrigerant for the hybrid system with high COP and low turbine work within the defined operating conditions. In domestic usage in Korea, the heat pump system has more economic feasibility owing to natural gas being imported with a high price of LNG form.

• Journal of the Korean Institute of Gas
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• v.22 no.6
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• pp.76-89
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• 2018

The distribution of the combined heat and power system is active as a solution to the instability of energy supply and environmental pollution caused by continuous industrial development. In Korea, the safety standards for combined heat and power system using a gas engine are insufficient therefore the study on this is needed. In this study, the safety performance and structural/material assessment items of domestic and international standards applied to the combined heat and power system were analyzed to carry out a standardization study on safety performance applicable to 20 kW gas engine combined heat and power system. In addition, the safety performance assessment (plan) of the gas engine combined heat and power system was derived by performing risk analysis and risk assessment using HAZOP. Assessment items include engine ignition systems related to safety performance, piping tight performance, watering and temperature rise performance, combustion performance, electrical efficiency, thermal efficiency, overall efficiency and humidity performance. Gas and water pipes, gas control and shut-off valves, durability, heat resistance, and cold resistance of metal or non-metallic materials related to the structure and materials of the gas engine combined heat and power systems.

• The Journal of Engineering Geology
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• v.23 no.3
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• pp.201-216
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• 2013

Ground penetrating radar (GPR) surveys were conducted in a sand tank model in a laboratory and at an alluvial field site to detect the groundwater table and to investigate the influence of saturation on GPR response in the unsaturated zone. In the sand tank model, the groundwater table and saturation in the sand layer were altered by injecting water, which was then drained by a valve inserted into the bottom of the tank. GPR vertical reflection profile (VRP) data were obtained in the sand tank model for rising and lowering of the groundwater table to estimate the groundwater table and saturation. Results of the lab-scale model provide information on the sensitivity of GPR signals to changes in the water content and in the groundwater table. GPR wave velocities in the vadose zone are controlled mainly by variations in water content (increased travel time is interpreted as an increase in saturation). At the field site, VRP data were collected to a depth of 220 m to estimate the groundwater table at an alluvial site near the Nakdong river at Iryong-ri, Haman-gun, South Korea. Results of the field survey indicate that under saturated conditions, the first reflector of the GPR is indicative of the capillary fringe and not the actual groundwater table. To measure the groundwater table more accurately, we performed a GPR survey using the common mid-point (CMP) method in the vicinity of well-3, and sunk a well to check the groundwater table. The resultant CMP data revealed reflective events from the capillary fringe and groundwater table showing hyperbolic patterns. The normal moveout correction was applied to evaluate the velocity of the GPR, which improved the accuracy of saturation and groundwater table information at depth. The GPR results show that the saturation information, including the groundwater table, is useful in assessing the hydrogeologic properties of the vadose zone in the field.

• Journal of the Korean Institute of Landscape Architecture
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• v.40 no.1
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• pp.100-109
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• 2012

Removal rates of $PO_4-P$ and TP in a free water surface wetland system were investigated. The system was established in 2008 on a floodplain in the middle reach of the Gwangju Stream flowing through Gwangju City. Its dimensions were 46 meters in length and 5 meters in width. Two year old Typha angustifloria L. growing in pots were planted on half of the area and Zizania latifolia Turcz on the other half in 2008. Stream water was funneled into the wetlands by gravity flow, and its effluent was discharged back into the stream. The influent volume was controlled by valves and water depth was adjusted by wires. Volume and water quality of inflow and outflow were analyzed from January to December in 2010. Inflow into the system averaged approximately $710m^3/day$ and hydraulic residence time was about 1.5 hours. Average influent and effluent $PO_4-P$ concentration were 0.144 and 0.103mg/L, respectively, and $PO_4-P$ abatement amounted to 28.6%. Influent and effluent TP concentration averaged 0.333 and 0.262mg/L, respectively, and TP retention reached to 20.7%.$PO_4-P$ removal rate(%) during plant growing season(31.448) was significantly high(p<0.001) when compared with that during plant non-growing season(25.829). TP abatement rate(%) during plant growing season(27.230) was also significantly high(p<0.001) when compared with that of the non-growing season(14.856). Major phosphorous removals in the system resulted from adsorption of phosphorous in the litter-soil layers; sedimentation of particulate phosphorous and Ca, Al, Fe bounded phosphates; and absorption of phosphorous by emergent plants. The adsorption and sedimentation occurred throughout the year, however, the absorption took place during plant growing season. This resulted in higher removals of $PO_4-P$ and TP during plant growing season.