• Title/Summary/Keyword: 조밀도

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Transmittance controlled photomasks by use of backside phase patterns (후면 위상 패턴을 이용한 투과율 조절 포토마스크)

  • Park, Jong-Rak;Park, Jin-Hong
    • Korean Journal of Optics and Photonics
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    • v.15 no.1
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    • pp.79-85
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    • 2004
  • We report on a transmittance controlled photomask with phase patterns on the back quartz surface. Theoretical analysis for changes in illumination pupil shape with respect to the variation of size and density of backside phase patterns and experimental results for improvement of critical dimension uniformity on a wafer by using the transmittance controlled photomask are presented. As phase patterns for controlling transmittance of the photomask we used etched contact-hole type patterns with 180" rotative phase with respect to the unetched region. It is shown that pattern size on the backside of the photomask must be made as small as possible in order to keep the illumination pupil shape as close as possible to the original pupil shape and to achieve as large an illumination intensity drop as possible at a same pattern density. The distribution of illumination intensity drop suitable for correcting critical dimension error was realized by controlling pattern density of the contact-hole type phase patterns. We applied this transmittance controlled photomask to a critical layer of DRAM (Dynamic Random Access Memory) having a 140nm design rule and could achieve improvement of the critical dimension uniformity value from 24.0 nm to 10.7 nm in 3$\sigma$.TEX>.

Texture Analysis Algorithm and its Application to Leather Automatic Classification Inspection System (텍스처 분석 알고리즘과 피혁 자동 선별 시스템에의 응용)

  • 김명재;이명수;권장우;김광섭;길경석
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2001.10a
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    • pp.363-366
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    • 2001
  • The present process of grading leather quality by the rare eyes is not reliable. Because inconsistency of grading due to eyes strain for long time can cause incorrect result of grading. Therefore it is necessary to automate the process of grading quality of leather based on objective standard for it. In this paper, leather automatic classification system consists of the process obtaining the information of leather and the process grading the quality of leather from the information. Leather is graded by its information such as texture density, types and distribution of defects. This paper proposes the algorithm which sorts out leather information like texture density and defects from the gray-level images obtained by digital camera. The density information is sorted out by the distribution value of Fourier spectrum which comes out after original image is converted to the image in frequency domain. And the defect information is obtained by the statistics of pixels which is relevant to Window using searching Window after sort out boundary lines from preprocessed images. The information for entire leather is used as standard of grading leather quality, and the proposed algorithm is practically applied to machine vision system.

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A Study on Compact Section Requirements for Plate Girder Web Panels with Longitudinal Stiffeners (수평보강재가 설치된 플레이트거더 복부판의 조밀기준에 관한 연구)

  • Lee, Myung Soo;Lee, Doo Sung;Lee, Sung Chul
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.30 no.6A
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    • pp.503-512
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    • 2010
  • In AASHTO LRFD (2007), a compact section is defined as a section in which no premature failure caused by local buckling of web and flange plate or later buckling occurs before the section reaches the plastic moment, Mp. The current AASHTO LRFD (2007) provides the compact section requirement by limiting the web slenderness only for webs without longitudinal stiffeners. The role of longitudinal stiffener is to increase the web buckling strength caused flexure. Although a web does not satisfy the compactness requirement without longitudinal stiffeners, the web buckling can be prevented by use of valid longitudinal stiffeners. Therefore, the web may be able to reach the plastic moment. However, the reason why a longitudinal stiffener may not be used to satisfy compactness requirement is not cleary explained in AASHTO LRFD (2007). In this study, the buckling and ultimate strength behaviors of stiffened webs subjected to bending are investigated through the linear buckling and nonlinear finite element analysis. It is found that steel plate girders having webs that do not satisfy the compactness requirement are able to reach the plastic moment if the longitudinal stiffeners have sufficient rigidities and are properly located. From a nonlinear regression analysis of the results, a new compactness requirement is suggested for webs stiffened with one longitudinal stiffener.

Comparison of Segmentation Weight Parameters for Object-oriented Classification (객체기반 영상분류를 위한 영상분할 가중치 비교)

  • Lee, Jung-Bin;Heo, Joon;Sohn, Hong-Gyoo;Yun, Kong-Hyun
    • 한국공간정보시스템학회:학술대회논문집
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    • 2007.06a
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    • pp.289-292
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    • 2007
  • 객체기반 영상분류를 위한 영상분할에 있어서 중요한 요소로는 분할축척(Scale), 분광 정보(Color), 공간 정보(Shape) 등이 있으며 공간 정보에 해당하는 공간 변수는 평활도(Smoothness)와 조밀도(Compactness)가 있다. 이들 가중치의 선택이 최종적으로 객체기반 영상분류의 결과를 좌우하게 된다. 본 연구는 객체기반 영상분류의 준비 과정이라 할 수 있는 영상분할에 있어서 다양한 가중치를 적용을 통하여 영상을 분할하였다. 영상분할을 위해 적용한 가중치는 10, 20, 30의 분할축척(Scale)과 분광 정보(Color)와 공간 정보(Shape)간의 가중치 조합, 공간 변수인 평활도(Smoothness)와 조밀도(Compactness)간의 가중치 조합을 사용하였다. 각 가중치 조합을 통하여 분할된 영상의 분석은 Moran's I 와 객체 내부 분산(Intrasegment Variance)을 이용하여 분석하였다. 각 객체간의 상관관계 분석을 위하여 Moran's I를 계산하였으며 분류된 지역의 동질성을 분석하기 위하여 객체 면적을 고려한 객체 내부 분산(Intrasegment Variance)값을 계산하였다. Moran's I 가 낮은 값을 가질수록 객체 간의 공간상관관계가 낮아지므로 이웃 객체간의 이질성은 높아지며 객체 내부 분산(Intrasegment Variance)이 낮은 값을 가질수록 지역간의 동질성은 높아지게 된다. Moran's I 와 객체 내부 분산(Intrasegment Variance)의 조합을 통하여 객체기반 영상분류 시 가장 높은 분류 정확도가 예상되는 밴드별 영상분할 가중치를 얻을 수 있다.

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Three-Dimensional Reconselction using the Dense Correspondences from Sequence Images (연속된 영상으로부터 조밀한 대응점을 이용한 3차원 재구성)

  • Seo Yung-Ho;Kim Sang-Hoon;Choi Jong-Soo
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.30 no.8C
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    • pp.775-782
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    • 2005
  • In case of 3D reconstruction from dense data in uncalibrated sequence images, we encounter with the problem for searching many correspondences and the computational costs. In this paper, we propose a key frame selection method from uncalibrated images and the effective 3D reconstruction method using the key frames. Namely, it can be performed on smaller number of views in the image sequence. We extract correspondences from selected key frames in image sequences. From the extracted correspondences, camera calibration process will be done. We use the edge image to fed dense correspondences between selected key frames. The method we propose to find dense correspondences can be used for recovering the 3D structure of the scene more efficiently.

A Study on Flexural Ductility of Longitudinally Stiffened Plate Girders (수평보강재가 설치된 플레이트 거더의 휨 연성에 관한 연구)

  • Yoon, Dong Yong;Kim, Kyung Sik
    • Journal of Korean Society of Steel Construction
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    • v.19 no.6
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    • pp.643-653
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    • 2007
  • The ultimate bending strength and flexural ductility performance of longitudinally stiffened plate girders fabricated with mild steel were investigated utilizing nonlinear incremental finite element analysis. AASHTO LRFD (2002) design specifications were reviewed for possible application of longitudinally stiffened plate girders as compact sections. In order to investigate compact section requirements for plate girders with longitudinal stiffeners in webs, a number of full-scale plate girders were modeled and analyzed up to the collapse under pure bending condition. It was found that the slenderness of sub panel of the webs, the stiffness of longitudinal stiffeners, and the slenderness of compression flanges are key parameters governing the flexural ductility of the plate girders. It was also found from finite element analysis that longitudinally stiffened plate girder sections can satisfy compact section requirements both in full plastic moment capacity and flexural ductility requirement. New design equations have been proposed for longitudinally stiffened plate girders to be treated as compact sections.

Dynamic Friction Behavior of Interfaces Between Dense Dry Granular Soils and Construction Material(Concrete) (조밀한 건조조립토와 건설재료(콘크리트) 사이의 동마찰계수)

  • 김대상
    • Journal of the Korean Geotechnical Society
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    • v.17 no.6
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    • pp.207-213
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    • 2001
  • Shaking table tests to investigate the dynamic friction behavior of interfaces between dense dry granular soils and construction material(concrete) were performed and the results are reported. The results show the variation of dynamic interface friction coefficients between dense dry granular soils and construction material was small in the sliding velocity range employed in this study. It was also observed that dynamic interface friction coefficients decreased as mean grain sizes of granular soils increased. These coefficients were compared with the friction coefficients obtained from the peak internal friction angles of the same granular soils by plane strain compression tests.

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보급형 He-Ne 타원해석기의 제작과 $TiO_2$ 박막 유효밀도 변화의 in situ 측정

  • 김상준;방현용;김상열
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.101-101
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    • 1999
  • 실시간으로 변화하는 시료를 측정하고 분석할 수 있도록 비접촉시이며, 광학방식인 단파장 in situ 타원해석기를 제작하였다. He-Ne 레이저를 광원으로 사용하였고 회전편광자형 광량 측정방식을 채택하였다. 기존의 진공챔버 등에 쉽게 장착할 수 있도록 동축 구조를 사용하였으므로 소형이며 단순한 설계가 가능하였다. 전자빔 증착방법으로 성장시킨 조밀도가 82%인 이산화티타늄 박막의 분석에 이 타원해석기를 사용하여 수분탈착에 따르는 이산화티타늄 박막의 유효밀도 변화를 박막의 온도 변화와 시간 변화에 따라 실시간 in, situ방식으로 관측하였다.

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이온빔보조증착에 의한 $TiO_2$ 박막의 광학적, 기계적 특성연구

  • 성진원;문여익;황보창권;조현주
    • Proceedings of the Optical Society of Korea Conference
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    • 1995.06a
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    • pp.84-93
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    • 1995
  • 간섭필터 제작시 고굴절률 박막으로 많이 사용되는 TiO2 박막을 이온빔 보조증착 방법으로 제작하여 광학적, 기계적 특성을 연구하였다. 보조증착용 이온초으로는 End-Hall 형 이온총을 자체제작하여 사용하였다. 증착속도, 이온빔의 전류빌도, 산소 주입량 등을 주요 증착변수로 하여 TiO2 박막의 광학상수와, 기계적 성질에 미치는 영향을 조사하였다. 그 결과 박막의 조밀도와 굴절률이 증가하여, 대기중에 노출시 파장이동이 없는 고품질의 간섭필터 제작에 사용할 수 있음을 알 수 있었다.

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Cr 박막의 이온빔 보조 증착

  • 유광림
    • Korean Journal of Optics and Photonics
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    • v.4 no.4
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    • pp.411-419
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    • 1993
  • 저에너지의 Ar 이온빔으로 Cr 박막을 보조 증착하였으며, 이온빔 보조 증착 박막과 보통 박막의 광학적, 전기적 및 기계적 특성을 비교 분석하였다. 보통 박막에 비해 이온빔 보조증착 Cr 박막의 광학 상수와 반사율은 증가하고 전기비저항은 감소하여 bulk에 가까운 특성을 나타내었으며, 인장 응력은 감소하여 낟알 크기는 큰 차이가 없었다. 성장하는 Cr 박막에 대한 이온빔의 충격과 기판의 이온빔 세척은 박막의 조밀도를 증가시키는 경향으로 박막의 내부 구조에 변화를 주어 Cr 박막의 광학적 및 전기적 특성을 개선시키는 것으로 판단된다.

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