• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.39-39
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• 2007

원자층 증착(Atomic Layer Deposition: ALD) 방법은 반응물질들을 펄스형태로 챔버에 공급하여 기판표면에 반응물질의 표면 포화반응에 의한 화학적 흡착과 탈착을 이용한 박막증착기술이다. ALD법은 기존의 화학적 기상증착(Chemical Vapor Deposition: CVD)과 달리 자기 제한적 반응(self-limiting reaction) 에 의하여 반응가스가 기판 표면에서만 반응하고 가스와 가스 간에는 반응하지 않는다. 따라서 박막의 조성 정밀제어가 쉽고, 파티클 발생이 없으며, 대면적의 박막 증착시 균일성이 우수하고, 박막 두께의 정밀 조절이 용이한 장점이 있다. 이러한 ALD 방식으로 3차원의 반도체 장치 구조물에 산화막 등을 형성하는 공정에서 중요한 요소 중의 하나는 전구체의 충분한 공급이다. 따라서 증기압이 높은 전구체를 선호하는 경향이 있다. 그러나 증기압이 낮은 전구체를 사용할 경우, 공급량이 부족하여 단차 도포성(step coverage)이 떨어지는 문제가 있다. 원자층 증착 공정에서 전구체를 충분히 공급하기 위해전구체 온도를 증가시키거나 전구체의 공급시간을 늘리는 방법을 사용한다. 그러나 전구체 온도를 상승시키는 경우, 전구체의 변질이나 수명을 단축시키는 문제점을 발생시킬 수 있으며. 전구체를 충분히 공급하기 위하여 전구체의 공급시간을 늘이는 방법을 사용하면, 원하는 박막을 형성하기 위하여 소요되는 공정시간과 전구체 사용량이 증가된다. 본 논문에서는 이러한 문제점을 해결하기 위해 반응기 안에서 전구체 노출 시간을 조절하는 새로운 ALD 공정을 소개한다. 특히 이러한 기술을 적용하면 나노튜브를 성장시키는데 매우 유리하다. 본 연구에서 전구체 노출 시간을 조절하기 위하여 사용된 ALD 장비는 Lucida-D200-PL (NCD Technology사)이며 (TEMA)Zr와 H2O를 사용하여 ZrO2 나노튜브를 폴리카보네이트 위에 성장시켰다. 전구체의 노출 시간은 반응기의 Stop 밸브를 이용하여 조절하였으며, SEM, TEM 등을 이용하여 나노튜브의 균일성과 단차피복성 등의 특성을 관찰하였다. 그 결과 전구체 노출시간을 조절함으로써 높은 종횡비를 갖는 나노튜브를 성장 시킬 수 있음을 확인하였다. 또한 낮은 증기압을 가지는 전구체를 이용하여도 우수한 특성의 나노튜브를 균일하게 성장시킬 수 있었다.

• Journal of Drive and Control
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• v.13 no.2
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• pp.10-18
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• 2016

A front-end loader (FEL) mounted on an agricultural tractor is one of the most commonly used implements to mechanize routine agricultural tasks. When the FEL is used with a loaded bucket, careful operation is required to maintain safety and avoid spillage when the tractor passes a bump because a change in the gravity center of the tractor due to varied loadings can affect the stability of the tractor. Use of a boom suspension system consisting of accumulators and orifice dampers can be instrumental in reducing pitching vibrations while increasing the handling performance of the FEL-mounted tractor. The objective of this research was to reduce bump shocks by adding an orifice and a flow control valve to the original hydraulic circuit composed solely of accumulators. A simulation study was performed using the SimulationX program to investigate the effects of an accumulator and an orifice-throttle damper on bump shocks. Results showed that the peak pressure on a boom cylinder and the vertical acceleration of a bucket were significantly affected by use of both an accumulator and an orifice damper. In a field test conducted with a 75-kW tractor, the peak pressure of the boom cylinder, and the root mean square (RMS) vertical acceleration of the bucket and seat were reduced by on average, 23.0, 42.2, and 44.9% respectively, as compared to those measured with the original accumulator system, showing that an improved design for the accumulator hydraulic circuit can reduce bump shocks. Further studies are needed to design a tractor suspension system that includes the effects of cabin suspension and tires as well as dynamic analysis.

• Journal of Appropriate Technology
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• v.6 no.2
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• pp.136-145
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• 2020

Agriculture is the backbone of the economy of most developing countries. In these countries, agriculture or farming is mostly done manually with little integration of machinery, intelligent systems and data monitoring. Irrigation is an essential process that directly influences crop production. The fluctuating amount of rainfall per year has led to the adoption of irrigation systems in most farms. The absence of smart sensors, monitoring methods and control, has led to low harvests and draining water sources. In this research paper, we introduce a 433 MHz Radio Frequency and 2G based Smart Irrigation Meter System and a water prepayment system for rural areas of Tanzania with no reliable internet coverage. Specifically, Ngurudoto area in Arusha region where it will be used as a case study for data collection. The proposed system is hybrid, comprising of both weather data (evapotranspiration) and soil moisture data. The architecture of the system has on-site weather measurement controllers, soil moisture sensors buried on the ground, water flow sensors, a solenoid valve, and a prepayment system. To achieve high precision in linear and nonlinear regression and to improve classification and prediction, this work cascades a Dynamic Regression Algorithm and Naïve Bayes algorithm.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.15 no.4
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• pp.283-290
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• 2022

In this study, an IoT inspection system that can be linked with a server was developed using a gas timer and ESP-01 Wi-Fi module installed on a gas valve in the home. The server environment of the gas leak IoT inspection system was installed with APM (Apache, PHP, MySQL) to collect gas pressure data by generation so that leakage checks could be performed. In order to control the gas leak IoT inspection system, the app inventory was used to manage the gas leak check value in real time. In addition, user convenience has been enhanced so that membership management, WiFi settings, and leakage check values can be checked through mobile apps. In order to manage subscribers by region, the user list was checked by logging in in in the administrator mode so that the information on whether or not the leak test was conducted and the results could be provided. In addition, when the user presses the gas leak check button, the pressure is automatically checked, and the measured value is stored in the server, and when a gas leak occurs, the leakage check is performed after alarm and repair so that it can be used if normal. In addition, in order to prevent overlapping membership, membership management can be performed based on MAC addresses.