• Journal of the Korean Society for Precision Engineering
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• v.24 no.9
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• pp.60-67
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• 2007

A signal conditioning circuit for capacitive displacement sensors was developed using a high frequency modulation/demodulation method, and its performance was evaluated. Since capacitive displacement sensors can achieve high resolution and linearity, they have been widely used as precision sensors within the range of several hundred micrometers. However, they inherently have a limitation in low frequency range and some nonlinearity characteristics and so a specially designed signal conditioning circuit is needed to handle these properties. The developed signal processing circuit consists of three parts: linearization, modulation/demodulation, and nonlinearity compensation. Each part was constructed discretely using several IC chips and passive elements. An evaluation system for precision displacement sensors was developed using a laser interferometer, a precision stage, and a PID position controller. The signal processing circuit was tested using the evaluation system in the respect of resolution, repeatability, linearity, and so on. From the experimental results, we know that a highly linear voltage output can be obtained successfully, which is proportional to displacement and the nonlinearity of output is less than 0.02% of full range. However, in the future, further investigation is required to reduce noise level and phase delay due to a low-pass filter. The evaluation system also can be applied effectively to calibration and evaluation of precision sensors and stages.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.276-279
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• 2005

This paper presents a novel cylindrical capacitive sensor (CCS) for both radial and axial motion measurements. Although the new CCS has almost the same geometric configuration as the conventional CCS, the unused axial area of the CCS is utilized to measure the axial motion of the rotor, which can affords more compact design and reduction of the system complexity. First, a theoretical model of the proposed CCS is derived. Based on the derived theoretical model, compensation methods to decouple the radial and axial motion measurements are proposed. In addition, error analysis is performed and a design rule is proposed to guarantee the same accuracy in measuring both radial and axial motions. Finally, a test rig and electronics for the proposed CCS are built and the effectiveness of the proposed CCS is verified with experiments and simulations.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.31-32
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• 2006

A signal conditioning circuit for capacitive sensors was developed using a commercial single chip solution. Since capacitive displacement sensors can achieve high resolution and linearity, they have been widely used as precision sensors within the range of several hundred micrometers. However, they inherently have a limitation in low frequency range and some nonlinearity characteristics and so a specially designed signal conditioning circuit is needed to handle these properties. Up to now, several companies already have succeeded in the development of the capacitive sensors system and they are commercially available in the market. In this research, to construct the signal processing circuits more easily and simply, we used a universal LVDT signal conditioner (AD698). Since the AD698 provides one chip solution for a basic signal processing including modulation and demodulation using various internal components, we can build the processing circuits successfully with minimal additional circuits: a compensation circuits for the drift caused by the bias current of OP amplifiers and a fine adjustment circuit for the elimination of nonlinearity. The signal processing circuits shows nonlinearity less than 0.05% in the comparison with a laser interferometer.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.8
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• pp.886-893
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• 2011

To increase the reliability and positional accuracy of a machine tool, a novel capacitive displacement sensor having a cylindrical shape is presented to measure the axial displacement of a machine tool spindle. Characteristics of the sensor were analyzed by numerical simulation. The sensor was built into a specific machine tool spindle and its performance was experimentally investigated. The accuracy of a thermal error compensation system of a machine tool can be enhanced greatly using proposed sensor.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.89-94
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• 2001

A cylindrical capacitance-type spindle displacement sensor was designed and tested in the hard turning as a way to develop a sensor that can estimate cutting forces without using a tool dynamometer. The displacement sensor was installed between the face of spindle cover and the chucking element, and measured pure radial motion of the spindle. Ceramic inserts and tool steel workpieceof 65 Rc were used during the hard turning tests. The signals from the sensor showed the same pattern of cutting force variations as those from the tool dynamometer. The research results showed that the developed sensor could be utilized as an effective and cheap on-line sensing device to estimate cutting forces.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.13 no.5
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• pp.55-61
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• 2004

Chatter monitoring is also important for realizing an unmanned machining system. while many researches were done on this area, it is still a difficult job to detect very small amplitude amount of chattering. A monitoring system using a capacitive spindle displacement sensor was developed to monitor cutting vibration in turning in this research. The variance of the measured spindle displacement signals using the developed sensor was calculated and utilized to quantify the small vibration in machining. The results were compared with variance obtained using a tool dynamometer. The result showed that the developed system could be utilized in monitoring the subtle changes of cutting vibrations with high sensitivity confidence.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.6
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• pp.140-145
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• 2007

To improve productivity of a metal cutting process, it is required to monitor machining stability in real time. Since cutting environment is harsh against sensing conditions due to vibration, chip, and cutting fluid, etc., it is necessary to develop a robust and reliable sensing system for the practical application. In this work, a chatter monitoring system was developed and its effectiveness was proved. Spindle displacement caused by cutting was selected as a main monitoring parameter. A cylindrical capacitive displacement sensor was adopted. Chatter frequencies were identified through modal analysis. To quantify chatter vibrations, chatter correlation coefficient was introduced. The identification of the monitoring system showed a good agreement with the result of experiment.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.604-608
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• 2004

In this paper, an efficient method is proposed to analyze the radial error of a miniaturized-high speed spindle system. Initially, a device is constructed for measuring the radial error motion using capacitance sensors. The capacitance sensors are placed perpendicular to the axis of the shaft and at 90o to each other. The spindle is rotated at high speed and the profile of the spindle is recorded. An algorithm is developed for analyzing the spindle data and determining the radial error of spindle. The present algorithm uses homogeneous transform matrix (HTM) method and iterative process for determining the radial error. The analysis procedure is performed for different speeds of the spindle. The data obtained from the present system and the results of evaluation are also presented in this paper. It is observed that this method is effective in determining and analyzing the spindle errors for high speed miniaturized spindle.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.133-134
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• 2006

A cylindrical capacitive displacement sensor (CCS) was developed and applied for monitoring end milling processes. Dynamic characteristics of a spindle-assembly were measured using the CCS and a designed magnetic exciter. The technique to extract the spindle displacement component caused only by cutting from the measured signals using the CCS was proposed in the paper. Using CCS signals and FRF (Frequency Response Function) derived from dynamics of the spindle tool system, dynamic cutting forces are estimated quantitatively.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.2
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• pp.17-23
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• 2002

A cylindrical capacitance-type spindle displacement sensor was developed and its effectiveness as a system to monitor cutting forces during hard turning was tested in this research. The sensor was installed between the face of spindle cover and the chucking element and measured pure radial motion of the spindle under the condition with presence of roundness error at measured surface. To prove the effectiveness of the developed system hard aiming tests using ceramic inserts and tool steel as workpiece were conducted. The workpiece was hardened up to 65 Rc. The variations of pure radial motion of the spindle ware measured during the cutting tests. The signals from the sensor showed the same pattern of cutting force variations from the tool dynamometer due to the progress of tool wear. As the flank wear of the ceramic tool increased both static component of cutting forces and the amount of center shift of spindle orbit increased, Results from the research showed that the developed sensor could be utilized as an effective and cheap on-line sensing device to monitor cutting conditions and tool performance in the un-manned machining center.