• Journal of the Korean Society for Precision Engineering
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• v.22 no.6 s.171
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• pp.30-39
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• 2005

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2015.10a
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• pp.910-912
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• 2015

In this paper, we designed the novel capacitive sensor and system for measuring the position of the piston in hydraulic cylinder. The magnetic or LVDT sensors have been widely used to measure the position of the piston because of its high accuracy, but these types of sensor are very expensive and have difficulty in use because of its complexity. To overcome these disadvantages, we studied the optimized non-contact capacitive sensor and designed detecting system for accurate measuring the location of piston in hydraulic cylinder. The proposed capacitive sensor and detecting system have the possibility of practical use for hydraulic cylinder through experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.487-490
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• 1995

This paper discisses the effects geometric errors on the measurement of error motions of rotor with the cylindrical capacitive displacement sensor. Analytic model of the measuring process with this sensor is derived and this model shows that the effect of geometric errors of sensor is larger than that of rator on the measurement of error motions of rotor. The computer simulation shows effect of periodic errors in this sensor on the measuring orbit.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.35 no.11
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• pp.1147-1156
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• 2011

A contact-type area-varying capacitive displacement sensor, or CLECDiS, can measure displacements over millimeter ranges with nanometer resolution. However, a small changes in the contact condition due to the surface profile or friction, which are inherent characteristics of contact-type sensors, lead to significant distortion of the output signal. Therefore, ensuring reliable contact conditions during CLECDiS measurements is the most important area to be improved in their actual use. Herein, in order to design an instrument for ensuring reliable contact conditions, the contact condition is analyzed by characterizing the signal distortion, observing the pressure distribution between the contacting surfaces, and measuring the motional errors of the sensor using a laser Doppler vibrometer (LDV). The manufactured instrument enables a CLECDiS to be used in an ultraprecise positioning system with improved reliability.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.11a
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• pp.291-295
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• 1996

This paper discusses several design factors of a capacitance displacement sensor with a numerical method and several experiments and describes guide lines of the design of this type sensor. We introduce the charge density method for the analysis of this type sensor, which has feasible accuracy and efficiency. The analysis of this type sensor with the charge density method agrees with displacement sensitivity experiments of a circular plate capacitance sensor with the sensor amp based In the charge transfer principle.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.11
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• pp.110-117
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• 1997

This paper discusses numerically and experimenally several design parameters for the plate- type capacitive displacement sensor. The influenences of shape of this sensor on the sensitivity are numerically analyzed with the charge density method. Using many test sensor plates of different shape for verifing the validity of this method can not guarantee the repetibility of experiments. Therefore we made specially the test sensor plate so that experiments of effects of shape of this sensor on sensitivity can be done with only that plate. Results from these experiments agree well with those from numerical analysis.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.387-393
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• 2004

General purpose of cylindrical capacitive displacement sensor(CCS) is measuring run-out motion and deflection of rotor. If CCS has narrow sensing range, its sensitivity coefficients must be calibrated precisely. And x, y component of CCS output can be coupled. In this research, CCS calibration procedure is automated with automatic calibration program and PC-controlled stage. And, coupled-terms of CCS signals were removed and the errors between measured position and mapped CCS signal were reduced obviously by sensitivity matrix that linearly.

• Proceedings of the KSME Conference
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• 2000.11a
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• pp.548-553
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• 2000

A new design of cylindrical capacitive sensor(CCS) for the displacement measurement of precision active magnetic bearing(AMB) spindle is presented in this paper. This research is motivated by the problem that existing 4-segment CCS is still sensitive to the $3^{rd}$ harmonic component of the geometric errors of a rotor. The procedure of designing new CCS starts from the modeling and error analysis of CCS. The angular size of CCS is set up as a design parameter, and new 8-segment CCS is introduced to possess an arbitrary angular size. The optimum geometry of CCS to minimize the effect of geometric errors is determined through minimum norm approach. Experimental results with test rotors have confirmed the improvement in geometric error suppression.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.1103-1104
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• 2011

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.655-662
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• 2007

This paper presents a disk-type capacitive sensor for simultaneous measurement of five-dimensional motions of a target. The sensor can be manufactured with a printed circuit board (PCB) such that the sensor can be integrated with its electronics in a single PCB board, whereby the manufacturing costs is considerably reduced. The sensor is optimally designed through an error analysis of possible mechanical errors. Furthermore, the sensor can correct the horizontal motion measurement errors due to the sensor installation tilting error. A proto-type PCB sensor, electronics and a test rig were built, and the effectiveness of the developed sensor was proved through experiments.