• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.454-457
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• 1995

In optical disc system, tracking actuator is consisted of coarse actuator and fine tracking actuator. This, two-stage actuator, requires many devices and two servos for large stroke and precisional displacement. These complicate configuration increases moving mass. So dynamic characteristics become bad, that is, sensitivity of high frequency gain decrease. In this paper, frequency performance is willing to be better as so one dimensional tracking actuator is designed. In order to investigate the performance of the proposed tracking actuator, the Bode diagram is plotted with Dynamic analyzer and friction characteristic is explained. Finally, tracking error performance is ins investigated into 0.1 .mu.m resolution with MATLAB simulation.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.10
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• pp.1110-1118
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• 2012

In this study, for reducing the residual vibration in high speed motion control stage, an improved 5th order polynomial motion profile was developed. When a stage is moving, the current through the motor coils has the same profile of input motion profile of acceleration, therefore the characteristics of the acceleration input profile directly affect on the performance of the amplifier that includes the current control loop. Commonly low cost amplifier and motor has a narrow current control bandwidth, therefore the proposed algorithm was designed based on this practical constraint. Simulation and experimental results showed that the proposed algorithm clearly has low residual vibration characteristics than conventional 5th order polynomial motion profile on the same drive condition.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.51-60
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• 2005

This paper describes a robust control scheme for high-speed and long stroke scanning motion of high precision linear motor system consisting of linear motor, air bearing guide and position measurement system using heterodyne interferometer. Nowadays, semiconductor process and inspection of wafer or LCD need high speed and long travel length for their high throughput and extremely small velocity fluctuations or tracking errors. In order to satisfy these conditions, linear motor system are widely used because they have large thrust force and do not need motion conversion mechanisms such as ball screw, rack & pinion or capstan with which the system are burdened. However linear motors have a problem called force ripple. Force ripple deteriorates the tracking performances and makes periodic position errors. So, force ripple must be compensated. To maximize the tracking performance of linear motor system, we propose the control scheme which is composed of a robust control method, Time Delay Controller (TDC) and a feedforward control method, Zero Phase Error Tracking Control (ZPETC) for accurate tracking a given trajectory and an adaptive force ripple compensation (AFC) algorithm fur estimating and compensating force ripple. The adaptive ripple compensation is continuously refined on the basis of tracking error. Computer simulation results based on modeled parameters verify the effectiveness of the proposed control scheme for high-speed, long stroke and high precision scanning motion and show that the proposed control scheme can achieve a sup error tracking performance in comparison to conventional TDC control.