• Title/Summary/Keyword: 정밀스테이지

Search Result 272, Processing Time 0.015 seconds

Evaluation of Machining Characteristics and Performance Analysis of Air-Lubricated Dynamic Bearing (공기동압베어링의 성능 해석 및 가공특성 평가)

  • Baek, Seung-Yub;Kim, Kwang-Lae
    • Journal of the Korea Academia-Industrial cooperation Society
    • /
    • v.12 no.12
    • /
    • pp.5412-5419
    • /
    • 2011
  • The need is growing for high-speed spindle because various equipment are becoming more precise, miniaturization and high speed with the development of industries. Air-lubricated dynamic bearings are widely used in the optical lithographic manufacturing of wafers to realize nearly zero friction for the motion of the stage. Air-lubricated dynamic bearing can be used in high-speed, high-precision spindle system and hard disk drive(HDD) because of its advantages such as low frictional loss, low heat generation, averaging effect leading better running accuracy. In the paper, numerical analysis is undertaken to calculate the performance of air-lubricated dynamic bearing with herringbone groove. The static performances of herringbone groove bearings which can be used to support the thrust load are calculated. Electrochemical micro machining($EC{\mu}M$) which is non-contact ultra precision machining method has been developed to fabricate the air-lubricated dynamic bearing and optimum parameters which are inter electrode gap size, concentration of electrolyte, machining time are simulated using numerical analysis program.

Fabrication of a Mach-Zehnder interferometer for education using a rotating glass plate and a 3D printer (회전 유리판과 3D 프린터를 이용한 교육용 마흐젠더 간섭계 제작)

  • Jang, Seong-Hun;Ju, Young-G
    • Korean Journal of Optics and Photonics
    • /
    • v.28 no.5
    • /
    • pp.213-220
    • /
    • 2017
  • This paper proposes how to fabricate an educational Mach-Zehnder interferometer that is easy to align and inexpensive, using 3D printers and semiconductor lasers. The interferometer consists of a body $165mm{\times}120mm{\times}57mm$ in size, mirror mounts, a laser holder, beam splitters, and so on. The laser path is adjusted by 4 mirror mounts, each comprised of rubber bands, small metal wires, and a screw. The interference fringe is enlarged by the lens at the final stage. The refractive index of a slide glass was measured by counting the number of moving interference fringes while the slide glass, inserted into one of the two interferometer arms, is rotating. The formula for the refractive index as a function of the optical-path difference and rotation angle was obtained, and used to calculate the refractive index of glass from the interferometer experiment. The use of a rotating glass in one arm of the interferometer nullifies the need for a precision stage, which despite its high cost is often required to observe the moving interference fringe in the classroom. Therefore, the 3D-printed Mach-Zehnder interferometer proposed in this paper can be very useful for education, because of its affordability and performance. It enables students to perform both qualitative and quantitative studies using a 3D-printed interferometer, such as measuring the refractive index of a glass sample, and the wavelength of light.