• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1995.03a
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• pp.40-62
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• 1995

A micro positioning system using piezoelectric actuators have very wide application region such as ultra-precision machine tool optical device measurement system. In order to keep a high precision displacement resolution it to useful to take a position sensor and feedback of the error. From the practical point of view high-resolution displacement sensor systems are very expensive and it is difficult to make such a sensitive sensor work properly in a poor operational environment of industry. In this study a piezo-electric micro-depth control system which does not require position sensor but piezoelectric voltage feedback has been developed. It is driven by hysteresis-considering reference input voltage calculated in advance and actuator/sensor characteristics of piezoelectric materials. From the result of experiments a fast and stable response of micro-depth control system has been achieved and an efficient technique to control the piezoelectric actuator suggested.