• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 추계학술대회 논문집
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• pp.291-295
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• 1996

This paper discusses several design factors of a capacitance displacement sensor with a numerical method and several experiments and describes guide lines of the design of this type sensor. We introduce the charge density method for the analysis of this type sensor, which has feasible accuracy and efficiency. The analysis of this type sensor with the charge density method agrees with displacement sensitivity experiments of a circular plate capacitance sensor with the sensor amp based In the charge transfer principle.

• 한국정밀공학회지
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• 제14권11호
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• pp.110-117
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• 1997

This paper discusses numerically and experimenally several design parameters for the plate- type capacitive displacement sensor. The influenences of shape of this sensor on the sensitivity are numerically analyzed with the charge density method. Using many test sensor plates of different shape for verifing the validity of this method can not guarantee the repetibility of experiments. Therefore we made specially the test sensor plate so that experiments of effects of shape of this sensor on sensitivity can be done with only that plate. Results from these experiments agree well with those from numerical analysis.