• Journal of the Korean Vacuum Society
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• v.12 no.2
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• pp.144-149
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• 2003

Carbon tips were grown on Si cantilevers by applying an electron beam to them directly with Scanning Electron Microscope. A carbon tip was fabricated by aligning the electron beam directly down the vertical axis of Si cantilever and then irradiating a single spot on the cantilever for a proper time in the dominant atmosphere of residual gases generated by the oil of the diffusion pump. A number of control parameters for SEM, including exposure time, acceleration voltage, emission current, and beam probe current, were allowed to make various aspect ratio feature. The growth of carbon tips was not affected by the surface morphology of substrates. We could acquired the tip whose effective length is 0.5 $\mu\textrm{m}$, bottom diameter is 90 nm and cone half angle $3.5^{\circ}$ The growth technique of the high aspect ratio carbon tips on the tip-free cantilevers is available to reduce the complexities of fabricating sub-micron scale tips on the PZT thin film actuator integrated AFM cantilevers.

• Journal of IKEEE
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• v.11 no.4
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• pp.257-264
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• 2007

The MM22 microtron has used as a cancer therapy machine from Nov. 1986 to Feb. 2006. This machine was moved and installed to a radiation research center to use as an education and research tool from treatment machine because of aging of MM22 microtron. In this paper, for extracting the electron beam from microtron, operation principle of the microtron, system characteristics of each module, and pulse structures were reviewed. The beam extraction and measurement were performed after measuring pulses of each major module and extraction trials in the beam line. After finishing the movement of MM22 microtron, the 30mA target current in the case of 10 MV X-ray beam was extracted and the beam flatness of radiation distribution was acquired within 3% error ratio after 100 MU was irradiated on X-omatV Film at SSD 100 cm and field size $10{\times}10cm^2$. As a result, the microtron movement and new installation was performed with success.

• Journal of the Institute of Electronics and Information Engineers
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• v.53 no.5
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• pp.37-46
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• 2016

In this paper, we propose the beam-steering system using Rotman lens antenna operating at 2.442GHz which is to replace an expensive phase shifter. The overall system consists of the transmission antennas, Rotman lens and switch box. Setting the initial design conditions, it was designed and fabricated satisfying the requirements. From the result tested in the anechoic chamber, it was found that the beam can be steered using Rotman lens in the anechoic chamber. We also visually checked the beam-steering by turning on the LED of the rectenna showing the real-time beam receiving.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.226.1-226.1
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• 2014

이온빔 소스는 반도체 및 디스플레이 공정에 있어, 표면 에칭 및 증착 등 여러 응용 분야에 활발히 이용되고 있다. 본 연구에 사용된 원형 이온빔 소스는 선형 이온빔 소스의 가장자리에서의 특성 분석을 위해 제작되었으며, 높은 직류전압과 자기장 공간에서 플라즈마를 방전시키고 발생된 이온들을 가속시켜 높은 에너지의 이온빔을 발생시킨다. 이온빔 특성 분석을 위해 전위지연 탐침과 패러데이 탐침을 개발하였다. 전위지연 탐침은 격자판에 전압을 인가하여 선택적으로 이온을 수집하고, 이온의 에너지분포함수를 측정한다. 패러데이 탐침은 이온 수집기와 가드링으로 구성되어 수집기 표면에 일정한 플라즈마 쉬스를 형성하여 정확한 이온전류밀도를 측정한다. 본 연구에서는, 아르곤 기체를 이용하여 기체유량(8~12 sccm) 및 방전전압(1~2 kV)에 따라 방전전류 16~54 mA, 소모전력 16~108 mW의 특성을 보였다. 운전압력은 0.4~0.54 mTorr이며, 이온소스로부터 18 cm 거리에서 이온전류밀도와 이온에너지분포를 측정하였다. 또한, 중공음극선을 이용하여 인위적으로 전자를 이온 소스에서 발생된 플라즈마에 공급하고 이온빔 및 플라즈마의 특성 변화를 위 시스템에서 분석하였다.

• Korean journal of applied entomology
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• v.53 no.4
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• pp.391-398
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• 2014

This study investigated inhibitory doses of electron beam and X-ray irradiation by comparing their effects on the development and reproduction of four insect pests (Myzus persicae, Tetranychus urticae, Liriomyza trifolii, and Frankliniella intonsa). When M. persicae nymphs were irradiated with 100 Gy of electron beam and 30 Gy of X-ray beam, offspring production by adults that developed from the treated nymphs was completely inhibited. When M. persicae adults were irradiated with 200 Gy of electron beam and 50 Gy of X-ray beam, emergence of the $F_1$ generation was inhibited. However, these two ionizing radiations did not affect adult longevity. When T. urticae eggs were irradiated with 150 Gy of electron beam and 50 Gy of X-ray beam, egg hatching was completely inhibited. When L. trifolii pupae were irradiated, the emergence rate decreased with increasing doses of X-ray irradiation. After F. intonsa adults were irradiated with 250 Gy of electron beam and 200 Gy of X-ray beam, egg hatching of the $F_1$ generation was completely suppressed.

• Journal of the Korean Vacuum Society
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• v.19 no.3
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• pp.199-205
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• 2010

The electrical properties and defect states in ZnO substrates were studied during high-energy electron beam irradiations. 1 MeV and 2 MeV electron-beam with dose of $1{\times}10^{16}$ electrons/$cm^2$ were irradiated on Zn-surface of the sample. In the sample irradiated by 1 MeV, the leakage current was increased by electron-beam induced surface defects, while the enhancement of on/off property and the decrease of leakage current appeared in the 2 MeV irradiated sample. From the deep level transient spectroscopy measurements for these samples, it showed that the defect states with the activation energies of $E_c$-0.33 eV and $E_v$+0.8 eV are generated during the high energy electron-beam irradiation. Especially, it considered that the $E_c$-0.33 eV state related with O-vacancy affects to their electrical properties.

• Journal of the Korean Magnetics Society
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• v.24 no.2
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• pp.66-69
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• 2014

The spreading tube of X-ray cathode tube displayed with an electromagnetic finite element method was designed. To analyze a feature design and the concrete coordinate performance of soft X-ray tube modeling, the orbit of electron beam was simulated by OPERA-3D SW program. The fixed conditions were the applied voltage, the temperature, the work function of thermal electron between cathode and anode of tungsten. Through the analysis of distribution of electron beam and the variation of dividing region, the design of soft X-ray spreading tube equipped with two cross filaments was optimized.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.17-18
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• 2005

실리콘 기판 위에 100nm의 선폭을 갖는 선들이 일정한 간격을 가지고 연속적으로 배열되어 있는 구조를 형성시켜 보았다. PMMA가 코팅되어 있는 실리콘 기판위에 전자빔으로 패턴을 하였고, 건식에칭을 통해 구조물을 형성한 후 원자 현미경으로 관찰하였다. 이러한 나노구조물의 구현은 전자빔 패터닝시에 전자빔이 실리콘 기판에 충돌할 때 나타나는 backward scattering과 proximity 효과 등의 영향으로 인해 pitch의 크기가 작아질수록 구현하기가 쉽지 않았다. 화합물반도체 단일 나노선 소자를 제작하여 소자의 전기적 특성을 측정할 때, 나노선 표면에 있는 자연산화막은 금속전극과 나노선 사이의 전기전도특성을 저해하는 요소로 알려져 있다. 이러한 자연산화막을 제거하기 위해 나노선을 건식에칭해 보았고, 원자현미경을 통해 에칭에 따른 나노선의 모양변화를 관찰하였다.

• The Journal of the Korea institute of electronic communication sciences
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• v.16 no.1
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• pp.9-18
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• 2021

The 5G communication system employs the millimeter wave with the extremely high frequency. Since the high frequency signal has the strong straightness, the beamforming technology based on the multiple base stations is required for services covering wide range. The beamformer needs the angle-of-arrival(AOA) information of the signal incident to the antenna, and it is generally estimated through the high resolution AOA estimation algorithm such as Multiple Signal Classification (MUSIC) or Estimation of Signal Parameters via Rotational Invariacne Technique (ESPRIT). Although various antenna array shapes can be employed for the beamformer, a single shape (square, circle, or hexagonal) is typically utilized. In this paper, we introduce a transmitting/receiving beamforming system based on the combined array antenna with square and circular shapes, which is proper to various frequency signals, and evaluate its performance. For evaluating the performance of the proposed beamforming system based on the combined array antenna, we implement the computer simulation employing various scenarios.

• The Journal of the Korea institute of electronic communication sciences
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• v.14 no.6
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• pp.1031-1036
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• 2019

This study describes the technique of the beam pattern measurement of array antenna for VHF band radar using drone and active beam pattern measuring device. There is no anechoic chamber for measuring the beam pattern of a large size antenna in the country. In this study, to test the antenna beam pattern characteristics of the developed VHF band radar, the antenna beam pattern characteristics were tested by Drone mounting an Active Beam Pattern Measuring Device. By comparing the results of the pre-simulation analysis with the measured results for the antenna, we could confirm that the beamwidth and side-lobe characteristics are satisfactory. Through the antenna beam pattern measurement technology using Drone and Active Beam Pattern Measuring Device, the beam pattern measurement technology of array antenna of low frequency band and large antenna for low band radar will be used.