• Title/Summary/Keyword: 전기 전도프로브

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스퍼터링 방법에 의하여 형성된 Al-도핑된 ZnO 박막의 전기적 특성과 광학적 특성

  • O, Do-Hyeon;Jo, Un-Jo;Kim, Tae-Hwan;Yu, Geon-Ho
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.186-186
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    • 2010
  • 액정디스플레이, 유기발광소자 및 태양전지에서 전도성 투명전극으로 indium-tin-oxide (ITO)가 일반적으로 많이 사용되고 있지만 인듐의 희소성과 유독성으로 인하여 ITO를 대체할 수 있는 물질에 대한 많은 연구가 현재 진행되고 있다. ITO 전극을 대체할 수 있는 물질 중에서 Al 도핑된 ZnO (AZO) 박막은 높은 전도성과 광학적 투과성 때문에 다양한 광전소자의 전극과 윈도우 물질로 많은 응용 가능성을 보여주고 있다. 본 연구에서는 여러 가지 스퍼터링 증착 조건에서 증착된 AZO 박막의 전기적특성과 광학적 특성을 조사하였다. 기준시료의 AZO 박막 증착 조건은 ZnO-2 wt.% $Al_2O_3$세라믹 타겟을 사용하였고 $250^{\circ}C$의 기판 온도에서 100 W 전력으로 5 mTorr의 진공 분위기에서 증착되었다. 최적의 AZO 박막 조건을 얻기 위해 증착 온도와 증착 챔버의 압력을 변화하면서 AZO 박막의 전기적 특성 변화와 광학적 특성 변화를 조사하였다. 4-포인트 프로브 측정과 홀 효과측정으로 각기 다른 조건에서 증착한 AZO 박막의 비저항과 전하농도 값을 비교 분석하였고 UV 스펙트로미터 측정을 통해서 AZO 박막의 투과율을 조사하였다. 스퍼터링 방법으로 증착된 AZO 박막은 높은 전도성과 광학적 투과성을 가지기 때문에 액정디스플레이, 유기발광소자 및 태양전지의 투명전극으로 사용할 수 있음을 알 수 있었다.

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Application of Time Domain Reflectometry to Estimate Curing Process of Cementitious Grout (시계열반사계를 이용한 시멘트계열 지반보강재의 양생과정 평가)

  • Jun, Minu;Cho, Hyunmuk;Lee, Eun Sang;Hong, Won-Taek
    • Journal of the Korean Geotechnical Society
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    • v.40 no.3
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    • pp.85-91
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    • 2024
  • To realize stable use of ground treated with cementitious materials, the curing process must be evaluated. In this study, a time domain reflectometry (TDR) measurement system was employed to evaluate the curing process of cementitious grout based on the electromagnetic property. A coated probe was manufactured to prevent electrical connection between the electrodes by the electrically conductive cementitious grout, and a calibration process was performed to estimate the actual relative permittivity using the coated probe. To assess the curing process of cementitious grout using the TDR measurement system, cementitious grout with added retarder was prepared with a water-to-cement ratio of 45%. A preliminary measurement was conducted immediately after pouring the cementitious grout into the mold to test the applicability of the coated probe, and TDR signals and relative permittivity were measured at 3~288 hours of curing time. The experimental results demonstrate that the relative permittivity of the cementitious grout immediately after pouring was greater than 100, decreased rapidly over time, and converged to approximately 13.8 at 144 hours, which is considered the fully cured time. This findings of this study demonstrate that the TDR measurement system with a coated probe is applicable to electrically conductive materials. In addition, the TDR measurement system can be used effectively to monitor the curing process of cementitious grout based on electromagnetic properties.

A Study on the Vertical upward Bubble Flow using Image Processing Technique (영상기법을 이용한 수직상향 기포유동에 관한 연구)

  • 서동표;오율권
    • Journal of Advanced Marine Engineering and Technology
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    • v.27 no.5
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    • pp.617-623
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    • 2003
  • In the present study, the characteristics of upward bubble flow were experimentally investigated in a liquid bath. The velocity of upward bubble flow was calculated for two different experimental conditions:1) bubble flow without kinetic energy 2) bubble flow with kinetic energy. Bubble flow without kinetic energy starts to undergo the effect of buoyancy l0cm away from the nozzle. Whereas. kinetic energy is dominant before 30 cm away from the nozzle in bubble flow but after this point kinetic energy and inertial force are applied on bubble flow at the same time In addition, as the flow rate increases the maximum velocity point moves to the nozzle. The velocity Profiles near free surface is extremely irregular due to surface flow. Gas volume fraction is high near the nozzle due to gas concentration. but decreases with the increasement of axial position. Gas volume fraction does not vary after the axial position, z=60 in spite of the increasement of flow.

A Study on the Correlation between Electrical Resistivity and Properties of Contaminated Soils (오염지반의 전기비저항치와 토성과의 상관성 연구)

  • 윤길림;이영남
    • Geotechnical Engineering
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    • v.14 no.2
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    • pp.79-92
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    • 1998
  • Parametric studies based on laboratory pilot tests were performed to investigate the relationships between electrical resistivity and properties of contaminated soils. Three kinds of sandy soils sampled and leachate from an industrial waste landfill were mired to model the contaminated soils. Electrical resistivity of soils was measured by using a simulated resistivity cone penetrometer probe. In the experiments. the electrical resistivity was observed by changing the water content, void ratio, unit weight, degree of saturation, and concentration of the leachate. The test results show that the electrical resistivity of soils depends largely on the water content and the electrical property of pore water rather than unit weight and types of soils.

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전해질 내 방전 전극의 기포 막 두께에 따른 플라즈마 전력의 변화

  • Yun, Seong-Yeong;Gwon, Ho-Cheol;Kim, Gon-Ho
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.443-443
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    • 2010
  • 액체 표면을 전극으로 하는 플라즈마 방전은 생물학적 살균, 분해 처리 등에 필요한 UV 및 화학적 활성종의 생성에 유리하여 널리 활용되고 있다. 하지만 그 특성 등에 관한 연구는 액체막의 유동 및 기하학적 구조 상 진단의 제한으로 인하여 아직 미비한 상태이다. 전해질 내 방전은 전극 표면의 기포 막 에 인가되고 그 두께에 따라 변한다. 따라서 본 연구에서는 액상 전해질의 인가 전압 및 점성도를 독립적으로 조절하여 기포 막 크기와 인가 전력간의 관계와 이에 따른 전해질 내 플라즈마의 특성이 음극 글로우 방전임을 밝혔다. 실험에서는 전기 전도도 1.6-3.2 S/m의 NaCl 수용액 전해질에 양극성 전극을 삽입하고 350 kHz의 전압을 인가하여 플라즈마를 발생하였다. 인가된 전압은 230 - 280 V이며 전해질의 점성도는 젤라틴을 첨가하여 1E-4-1.1 kg/m${\times}$sec로 조절하였다. 기포 막의 두께 및 변화는 고속카메라를 통하여 관측하였으며 인가되는 전압 및 전류는 고전압 프로브와 전류 프로브를 통하여 관찰하였다. 기포 막은 전극표면에서 막 비등을 통하여 발생됨을 밝혔다. 인가 전력과 손실 열에너지간의 비율에 따라 기포막은 수축과 확장의 진동을 반복하였으며 전기 유체적 모델을 통하여 기포 막의 동적 거동에 따른 플라즈마에 인가된 전력의 변화를 정량적으로 분석할 수 있었다. 기포 막의 평균적인 두께는 인가 전압과 비례하여 약 $150\;{\mu}m$에서 $200\;{\mu}m$로 증가하였으며 진폭은 점성의 증가 시 약 $50\;{\mu}m$에서 $20\;{\mu}m$로 감소하였다. 순간적인 플라즈마 인가 전력은 평균적인 두께에 따른 평균적인 두께에 대해서는 15 - 20 W의 변화를 보였으나 진폭의 감소 시 17 - 70 W의 보다 큰 폭으로 증가하였다. 이를 통하여 점성도가 큰 조건에서 기포 막의 확장이 억제되어 방전이 유지됨을 알 수 있었다.

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QMS를 이용한 플라즈마 공정 진단

  • Ju, Jeong-Hun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.92-92
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    • 2016
  • 전기방전의 기본적인 특성을 가지고 있는 플라즈마를 이용하여 재료를 가공하는 증착, 식각, 표면처리 공정에 있어서 플라즈마 내의 전자 충돌 반응에 의한 이온, 라디칼의 생성과 재료 표면의 반응을 분석하는 도구로써 분압 측정은 일반적인 화학 조성 분석에 기원한 오랜 역사를 가지고 있다. 1 amu 정도의 분해능을 가지고 있고 크기가 30 cm 정도에 불과한 사중극자 질량 분석기는 적절한 질량 스캔 시간과 넓은 이온 전류 측정 범위를 가지므로 소형 차등 배기 시스템과 조합하면 1 mTorr 영역의 스퍼터링 시스템에서 1 Torr 영역의 PECVD/PEALD 시스템 진단에도 쉽게 적용이 가능하다. Inficon사의 CPM-300과 Pfeiffer사의 Prisma80을 이용한 플라즈마 식각 공정 분석 결과를 보면 동위원소까지 분석이 가능하다. 또한 전자충돌 이온화 에너지를 조절하여 m/q(질량전하비율)가 중첩되는 경우의 해석도 가능하다. 다중 오리피스를 갖는 compact design의 밸브 블록을 이용한 설계에서는 line-of-sight 입사가 불가능하여 이온 전류를 분석할 수 없다는 단점이 있으나 표준 가스를 이용한 정량화 등의 큰 장점들이 있다. 최근 이루어진 연구의 내용으로는 유도 결합 플라즈마 장치에서 전도성 메쉬를 이용한 라디칼 거동 관찰을 위해서 두 대의 CPM-300을 메쉬 전 후에 설치하여 라디칼의 양 변화를 전류 프로브와 같이 사용하여 조사하였다.

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Electrode Fabrication of MWCNT-PDMS Strain Sensors by Wet-etching (습식 식각을 이용한 MWCNT-PMDS 변형율 센서 전극 생성에 관한 연구)

  • Jung, La-Hee;Hwang, Hui-Yun
    • Composites Research
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    • v.34 no.6
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    • pp.387-393
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    • 2021
  • This paper investigated the electrical properties of multiwall carbon nanotube reinforced polydimethylsiloxane (CNT-PDMS) strain sensors with copper electrodes on the wet-etched surface. MWCNT-PDMS strain sensors were fabricated according to the wt% of MWCNT. Surfaces on the electrode area were wet-etched with various etching duration and silver epoxy adhesives were spread on the wet-etched surface. Finally, we attached the copper electrodes to the MWCNT-PMDS strain sensors. We checked the electric conductivities by the two-probe method and sensing characteristics under the cyclic loading. We observed the electric conductivity of MWCNT-PDMS strain sensors increased sharply and the scattering of the measured data decreased when the surface of the electrode area was wet-etched. Initial resistances of MWCNT-PDMS strain sensors were inversely proportion to wt% of MWCNT and the etching duration. However, the resistance changing rates under 30% strain increased as wt% of MWCNT and the etching duration increased. Decreasing rate of the electric resistance change after 100 repetitions was smaller when wt% of MWCNT was larger and the etching duration was short. This was due to the low initial resistance of the MWCNT-PMDS strain sensors by the wet-etching.

A Study on Bubbles Flow in the Gas-injected Cylindrical Bath (기체가 주입된 원통형 용기내에서 기포유동에 관한 연구)

  • Seo Dong-Pyo;Park Keun-Uk;Oh Yool-Kwon
    • Proceedings of the KSME Conference
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    • 2002.08a
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    • pp.393-396
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    • 2002
  • Submerged gas-injected system can be applied to various industrial field such as metallurgical and chemical processes, So this study aims at presenting the relevant relationship between gas phase and liquid phase in a gas-injected bath. In a cylinderical bath, local gas volume fraction and bubble frequency were measured by electroconductivity probe and oscilloscope. The temperature of each phase was measured using thermocouple and data acquisition system. In vertical gas injection system, gas-liquid two phase plume was formed, being symmetry to the axial direction of injection nozzle and in a shape of con. Lacal gas-liquid flow becomes irregular around the injection nozzle due to kinetic energy of gas and the flow variables show radical change at the vicinity of gas(air) injection nozzle As most of the kinetic energy of gas was transferred to liquid in this region, liquid started to circulate. In this reason, this region was defined as 'developing flow region' The Bubble was taking a form of churn flow at the vicinity of nozzle. Sometimes smaller bubbles formed by the collapse of bubbles were observed. The gas injected into liquid bath lost its kinetic energy and then was governed by the effect of buoyancy. In this region the bubbles which lost their kinetic energy move upward with relatively uniform velocity and separate. Near the gas nozzle, gas concentration was the highest. But it started to decrease as the axial distance increased, showing a Gaussian distribution.

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Derivation and verification of electrical resistivity theory for surrounding ground condition prediction of TBM (TBM 주변 지반상태예측을 위한 전기비저항 이론식 유도 및 검증)

  • Hong, Chang-Ho;Lee, Minhyeong;Cho, Gye-Chun
    • Journal of Korean Tunnelling and Underground Space Association
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    • v.22 no.1
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    • pp.135-144
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    • 2020
  • Since the depth of tunneling with tunnel boring machine (TBM) becomes deeper and deeper, the expense for site investigation for coring and geophysical survey increases to obtain the sufficient accuracy. The tunnel ahead prediction methods have been introduced to overcome this limitation in the stage of site investigation. Probe drilling can obtain the core and borehole images from a borehole. However, the space in TBM for the probe drilling equipment is restricted and the core from probe drilling cannot reflect the whole tunnel face. Seismic methods such as tunnel seismic prediction (TSP) can forecast over 100 m ahead from the tunnel face though the signal is usually generated using the explosive which can affect the stability of segments and backfill grout. Electromagnetic methods such as tunnel electrical resistivity prospecting system (TEPS) offer the exact prediction for a conductive zone such as water-bearing zone. However, the number of electrodes installed for exploration is limited in small diameter TBM and finally the reduction of prediction ranges. In this study, the theoretical equations for the electrical resistivity survey whose electrodes are installed in the face and side of TBM to minimize the installed electrodes on face. The experimental tests were conducted to verify the derived equations.