• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.24 no.12
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• pp.977-984
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• 2014

Nanomaterial have grown from scientific interest to commercial products and the nanomaterial market has grown 19.1 % each year. As the nanomaterial market size increases, it is expected that nanomaterial production will increase and its contamination of outdoor environmental system will also increase in the form of industrial waste. Since most of nanomaterials are known as biologically non-degradable materials, nanomaterials will accumulate in the environment, and this will increase the potential threats to human health along the food chain. Recent studies have investigated the toxicity effect of nanomaterials due to their size, chemical composition and shape. For the development of nanomaterial while taking human health into consideration, a nanomaterial detecting sensor is required. In this paper, we have observed the trend of nanomaterial detecting sensor of mechanical, electrochemical, optical and kelvin probe force microscopy sensors and we believe that this trend will shed the light on the development of real-life nanomaterial detecting sensors.

• KIPE Magazine
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• v.14 no.1
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• pp.26-33
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• 2009

광대역 반도체중에서도 SiC(Silicon Carbide)는 우수한 전기적, 기계적, 열적, 화학적, 광학적 그리고 생체 적합성 등으로 인하여 지난 반세기 동안 급속히 발전하고 있는 SiM/NEMS(Micro/Nano Electro Mechanical System)를 대처할 수 있는 차세대 M/NEMS로써 고온, 고압, 고진동, 고습도 등의 극한 환경에서도 사용 가능한 자동차, 선박, 우주항공, 산업 프랜트용 마이크로 센서 및 액츄에이터, 초고주파수 정보통신용 부품 그리고 바이오 센서 등의 분야에 크게 주목을 받고 있다. 본 논문에서는 현재 SiC M/NEMS의 연구개발 현황에 대해서 소개하고자 한다.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1536-1537
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• 2007

본 논문은 당뇨병의 지표 물질인 glucose의 농도를 극미량의 시료를 사용하여 정량할 수 있는 방법을 개발하기 위해 organic/inorganic 네트웍에 의해 안정화된 나노입자 효소를 이용하여 초소형 효소 전극을 개발하였다. 전극은 실리콘 웨이퍼상에 반도체 공정을 이용하여 마이크로 크기의 금 박막 전극을 제작하였다, Organic/Inorganic 물질과 함께 합성된 glucose oxidase 나노입자는 20nm 크기로 투과형 전자현미경 (Transmission Electron Microscope:TEM)으로 관찰하고, 푸리에변환 적외선분광법(Fourier transform infrared spectrophotometer : FTIR) 을 이용하여 분석하였고, 전극 특성을 알아보기 위해 Potentiostat/Galvanostat을 사용하여 전기 화학 실험을 하였다. 제작된 전극은 시간대 전류법으로 glucose의 농도에 따른 감도를 측정하였다. 실험결과에 따라 전극의 표면에서 발생하는 전류는 glucose의 농도에 비례함을 알 수 있었다. 또한 순환 전압전류법을 통하여 감도를 측정하였다.

• Journal of the Korean Electrochemical Society
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• v.11 no.2
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• pp.105-108
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• 2008

In the recent years, increasing interests are being focused on the rational functionalization of the CNTs by some creative methods. However, the considerable toxicity of CNT is still a controversialissue and limits its biological application. To improve the biocompatibility of CNT, in this work we prepared CNT-$TiO_2$ nanocomposites with CNT and organic titanium precursors. Our observations demonstratethat the modified interface could accelerate the heterogeneous electron transfer rates and thusenhance the relevant detection sensitivity, suggesting its potential application as the new strategy for the development of the biocompatible and multi-signal responsive biosensors for the early diagnosis of cancers.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.242-242
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• 2010

SiO2박막을 이온 감지막으로 이용한 pH농도센서를 제작하였다. 현재 많은 연구중인 pH센서, pH-ISFET(pH-Ion Sensitive Field Effect Transistor)는 용액과 기준전극간의 전기화학적 변위차를 이용하여 pH를 센싱한다. pH-ISFET는 기존 CMOS공정을 그대로 이용할 수 있고, 이온감지막의 변화만으로 다양한 센서를 제작할 수 있어 최근 많은 연구가 진행 중이다. 하지만 FET를 제작하기 위한 공정의 복잡성과 용액의 전위를 정해주고 FET에 바이어스를 인가해줄 기준전극이 반드시 필요하다는 제한성이 있다. 따라서 본 연구에서는 SOI 기판을 이용하여 간단한 구조의 pH센서를 제작하였다. 센서는 (100)결정면을 가지는 p-타입 SOI(Silicon On Insulator)기판을 사용하였으며 포토리소그래피 공정을 이용하여 back-gated MOSFET구조로 제작하였다. 이온감지막으로 사용할 SiO2박막은 RF 스퍼터링을 이용하여 $100{\AA}$ 증착하였다. 바이어스는 기존 pH-ISFET와는 다르게 기준전극 대신 기판을 backgate로 사용하여 FET에 바이어스를 인가해 주었다. pH 용액 주입을 위해 PDMS재질의 챔버를 제작하고 실리콘글루를 이용하여 센서에 부착하였다. pH12부터 pH4까지 단계적으로 누적시키며 챔버에 주입하였고, pH에 따른 드레인전류의 변화를 관찰하였다. pH용액을 챔버에 주입시, pH농도에 따라 제작된 센서의 문턱전압이 오른쪽으로 이동하는 결과를 관찰할 수 있었다. 결과적으로, 구조가 간단한 pseudo MOSFET을 이용하여 pH센서의 적용가능성을 확인하였으며 SiO2박막 역시 본 pH센서의 이온감지막의 역할과 센서의 안정성을 향상시킬 수 있다는 점을 확인하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.05b
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• pp.102-105
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• 2005

가스센서는 응용 분야와 기능 및 종류가 다양하고 최첨단 분야로서 학문적으로는 물리, 화학, 전기, 전자 및 기계 등의 배경을 필요로 하며 산업적으로는 공업 전 분야와 농림, 축산, 사무기기에서 뿐만 아니라 공해 방진용(자동차 연소제어 및 배출가스 제어, 대기오염 감시등), 민생용(조리, 환기, 공조 등), 교통 보안용(음주운전측정 및 음주운전 방지장치 등), 방재용(가스 누설 탐지기, 불완전 연소 방지, 산소 결핍, 화재 등), 의료용(호기, 마취가스의 분석 등) 매우 광범위하며 점점 더 확대되어 가고 있다. 본 연구에서는 검출 가스 종류에 따라 졸-겔법으로 감응막을 최적 설계하고, 최적으로 설계된 감응막을 디핑법으로 코팅처리한 후 최적으로 열처리하여 센서를 제작하였다. 또한, 자체 제작한 가스검출 시스템에 제작된 센서를 장착하여 센서의 가스 검출 특성을 측정하고, 측정 데이터를 이용하여 휴대용 가스 검출 시스템을 설계 제작하였다.

• KSBB Journal
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• v.11 no.4
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• pp.489-496
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• 1996

Metal dispersed carbon paste electrodes were fabricated, and their electrochemical properties were investigated. Among various metal dispersed carbons, platinum-dispersed carbon paste electrode showed most efficient electrocatalytic characteristics. The overpotential for the oxidation of NADH was significantly lowered in the platinum-dispersed carbon paste electrode, and catalytic current was also enhanced. Based on these electrocatalytic observations, L-lactate biosensor using L-lactate dehydrogenase was constructed to evaluate its performance in terms of sensitivity and stability.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.4
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• pp.575-581
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• 2012

The electrochemical oxygen demand (ECOD) is an additional sum parameter, which has not yet found the attention it deserves. It is defined as the oxygen equivalent of the charge consumed during an electrochemical oxidation of the solution. Only one company has yet developed an instrument to determine the ECOD. This instrument uses $PbO_2$-electrodes for the oxidation and has been successfully implemented in an automatic on-line monitor. A general problem of the ECOD determination is the high overpotential of electrochemical oxidations of most organic compounds at conventional electrodes. Here we present a new approach for the ECOD determination, which is based on the use of a solid composite electrodes with highly efficient electro-catalysts for the oxidation of a broad spectrum of different organic compounds. Lead dioxide as an anode material has found commercial application in processes such as the manufacture of sodium per chlorate and chromium regeneration where adsorbed hydroxyl radicals from the electro-oxidation of water are believed to serve as the oxidizing agent. The ECOD sensors based on the Au/$PbO_2$ electrode were operated at an optimized applied potential, +1.6 V vs. Ag/AgCl/sat. KCl, in 0.01 M $Na_2SO_4$ solution, and reduced the effect of interference ($Cl^-$ and $Fe^{2-}$) and an expended lifetime (more than 6 months). The ECOD sensors were installed in on-line auto-analyzers, and used to analyze real samples.

• Journal of the Korean Electrochemical Society
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• v.2 no.1
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• pp.17-22
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• 1999

Since the use of porous silicon for microsensors and microactuators is in the euly stage of study, only several application devices, such as light-emitting diodes and chemical sensors have so far been demonstrated. In this paper we present an overview of the present status of porous silicon sensors and actuators research with special emphasis on the applications of chemical sensors and optical devices. The capacitive type porous silicon humidity sensors had a nonlinear capacitance-humidity characteristic and a good sensitivity at higher humidity above $40\%RH$. The porous silicon $n^+-p-n^+$ device showed a sharp increase in current when exposed to an ethanol vapor. The $p^+-PSi-n^+$ diode fabricated on porous silicon diaphragm exhibited an optical switching characteristic, opening up its utility as an optical sensor or switch. The photoluminescence (PL) spectrum, taken from porous silicon under 365 nm excitation, had a broad emission, peaked at -610 nm. The electroluminescence(EL) from ITO/PSi/In LED had a broader spectrum with a blue shifted peak at around 535nm than that of the PL.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2007.06a
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• pp.397-400
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• 2007

Indoor air-conditioning system(IAS) using wireless sensor network serves to reduce the amount of pollution entering the room from outside and also the pollution that is generated indoor. Small-size and lower power wireless sensor node and sensor interface board was designed for indoor air-conditioning system in buildings of offices and industrial establishments. Many sensor nodes forms Ad-hoc network topology using simple forwarding routing to transmit polluting gas concentration data from different rooms to the indoor air-conditioning system. Sensor node analyzes pollution concentration in the each room and air-conditioning system performs to air-distribution and air-inhalation according to room's pollution by regulating the fan of indoor air-conditioning system. To reduce power consumption electrochemical gas sensor was used in the design. Thus the designed system can optimize state of indoor environment. Graphic user interface displays node sate, gas concentration and temperature of each room.