• Title/Summary/Keyword: 전기신호측정

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Recent Trend in Measurement Techniques of Emotion Science (감성과학을 위한 측정기법의 최근 연구 동향)

  • Jung, Hyo-Il;Park, Tae-Sun;Lee, Bae-Hwan;Yun, Sung-Hyun;Lee, Woo-Young;Kim, Wang-Bae
    • Science of Emotion and Sensibility
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    • v.13 no.1
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    • pp.235-242
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    • 2010
  • Emotion science is one of the rapidly expanding engineering/scientific disciplines which has a major impact on human society. Such growing interests in emotion science and engineering owe the recent trend that various academic fields are being merged. In this paper we review the recent techniques in the measuring the emotion related elements and applications which include animal model system to investigate the neural network and behaviour, artificial nose/neuronal chip for in-depth understanding of sensing the outer stimuli, metabolic controlling using emotional stimulant such as sounds. In particular, microfabrication techniques made it possible to construct nano/micron scale sensing parts/chips to accommodate the olfactory cells and neuron cells and gave us a new opportunities to investigate the emotion precisely. Recent developments in the measurement techniques will be able to help combine the social sciences and natural sciences, and consequently expand the scope of studies.

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Side-Wall 공정을 이용한 WNx Self-Align Gate MESFET의 제작 및 특성

  • 문재경;김해천;곽명현;임종원;이재진
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.162-162
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    • 1999
  • 초고주파 집적회로의 핵심소자로 각광을 받고 있는 GaAs MESFET(MEtal-emiconductor)은 게이트 형성 공정이 가장 중요하며, WNx 내화금속을 이용한 planar 게이트 구조의 경우 임계전압(Vth:threshold voltage)의 균일도가 우수할 뿐만 아니라 특히 Side-wall을 이용한 self-align 게이트는 소오스 저항을 줄일 수 있어 고성능의 소자 제작을 가능하게 한다.(1) 본 연구의 핵심이 되는 Side-wall을 형성하기 위하여 PECVD법에 의한 SiOx 박막을 증착하고, 건식식각법을 이용하여 SiOx side-wall을 형성하였다. 이 공정을 이용하여 소오스 저항이 낮고 임계전압의 균일도가 우수한 고성능의 self-aligned gate MESFET을 제작하였다. 3inch GaAs 기판상에 이온주입법에 의한 채널 형성, d.c. 스퍼터링법에 의한 WNx 증착, PECVD법에 의한 SiOx 증착, MERIE(Magnetic Enhanced Reactive Ion Etcing)에 의한 Side-wall 형성, LDD(Lightly Doped Drain)와 N+ 이온주입, 그리고 RTA(Rapid Thermal Annealing)를 사용하여 활성화 공정을 수행하였다. 채널은 40keV, 4312/cm2로, LDD는 50keV, 8e12/cm2로 이온주입하였고, 4000A의 SiOx를 증착한 후 2500A의 Side-wall을 형성하였다. 옴익 접촉은 AuGe/Ni/Au 합금을 이용하였고, 소자의 최종 Passivation은 SiNx 박막을 이용하였다. 제작된 소자의 전기적 특성은 hp4145B parameter analyzer를 이용한 전압-전류 측정을 통하여 평가하였다. Side-wall 형성은 0.3$\mu\textrm{m}$ 이상의 패턴크기에서 수직으로 잘 형성되었고, 본 연궁에서는 게이트 길이가 0.5$\mu\textrm{m}$인 MESFET을 제작하였다. d.c. 특성 측정 결과 Vds=2.0V에서 임계전압은 -0.78V, 트랜스컨덕턴스는 354mS/mm, 그리고 포화전류는 171mA/mm로 평가되었다. 특히 본 연구에서 개발된 트랜지스터의 게이트 전압 변화에 따른 균일한 트랜스 컨덕턴스의 특성은 RF 소자로 사용할 때 마이크로 웨이브의 왜곡특성을 없애주기 때문에 균일한 신호의 전달을 가능하게 한다. 0.5$\mu\textrm{m}$$\times$100$\mu\textrm{m}$ 게이트 MESFET을 이용한 S-parameter 측정과 Curve fitting 으로부터 차단주파수 fT는 40GHz 이상으로 평가되었고, 특히 균일한 트랜스컨덕턴스의 경향과 함께 차단주파수 역시 게이트 바이어스, 즉 소오스-드레스인 전류의 변화에 따라 균일한 값을 보였다. 본 연구에서 개발된 Side-wall 공정은 게이트 길이가 0.3$\mu\textrm{m}$까지 작은 경우에도 사용가능하며, WNx self-align gate MEESFET은 낮은 소오스저항, 균일한 임계전압 특성, 그리고 높고 균일한 트랜스 컨덕턴스 특성으로 HHP(Hend-Held Phone) 및 PCS(Personal communication System)와 같은 이동 통신용 단말기의 MMICs(Monolithic Microwave Integrates Circuits)의 제작에 활용될 것으로 기대된다.

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MEMS Fabrication of Microchannel with Poly-Si Layer for Application to Microchip Electrophoresis (마이크로 칩 전기영동에 응용하기 위한 다결정 실리콘 층이 형성된 마이크로 채널의 MEMS 가공 제작)

  • Kim, Tae-Ha;Kim, Da-Young;Chun, Myung-Suk;Lee, Sang-Soon
    • Korean Chemical Engineering Research
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    • v.44 no.5
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    • pp.513-519
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    • 2006
  • We developed two kinds of the microchip for application to electrophoresis based on both glass and quartz employing the MEMS fabrications. The poly-Si layer deposited onto the bonding interface apart from channel regions can play a role as the optical slit cutting off the stray light in order to concentrate the UV ray, from which it is possible to improve the signal-to-noise (S/N) ratio of the detection on a chip. In the glass chip, the deposited poly-Si layer had an important function of the etch mask and provided the bonding surface properly enabling the anodic bonding. The glass wafer including more impurities than quartz one results in the higher surface roughness of the channel wall, which affects subsequently on the microflow behavior of the sample solutions. In order to solve this problem, we prepared here the mixed etchant consisting HF and $NH_4F$ solutions, by which the surface roughness was reduced. Both the shape and the dimension of each channel were observed, and the electroosmotic flow velocities were measured as 0.5 mm/s for quartz and 0.36 mm/s for glass channel by implementing the microchip electrophoresis. Applying the optical slit with poly-Si layer provides that the S/N ratio of the peak is increased as ca. 2 times for quartz chip and ca. 3 times for glass chip. The maximum UV absorbance is also enhanced with ca. 1.6 and 1.7 times, respectively.

Isolation Technologies for Single-crystalline Silicon MEMS Structures Using Trench Oxide (트렌치 산화막을 이용한 단결정실리콘 MEMS 구조물의 절연기술에 관한 연구)

  • Lee, Sang-Chul;Kim, Im-Jung;Kim, Jong-Pal;Park, Sang-Jun;Yi, Sang-Woo;Cho, Dong-Il
    • Journal of Sensor Science and Technology
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    • v.9 no.4
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    • pp.297-306
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    • 2000
  • To improve the performance of MEMS devices, fabricating single-crystalline silicon HARS (high aspect ratio structure) with thicknesses of up to several tens of micrometers has been an active research topic in recent years. However, achieving electrical isolation, which is required for actuating a structure or sensing an electrical signal, has been one of the main problems in single-crystalline silicon HARS fabrication technologies. In this paper, new isolation technologies using high aspect ratio oxide beams and sidewalls are developed to achieve electrical isolation between electrodes of single-crystalline silicon HARS. The developed isolation technologies use insulating oxide structural supports from either the structural sides or from the bottom. In this case because the trench oxide supports have a depth of several tens of ${\mu}m$, the effects of residual stress must be considered. In this paper, insulating supports are fabricated using PECVD TEOS films, the residual stress of the insulating supports is measured, and the effect of the residual stress on the structure is analyzed. It is shown using microresonators, that the developed isolation technologies can be effectively used for HARS using single-crystalline silicon.

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Analysis of Ferromagnetic Resonance Linewidth in Ni Thin Film Fabricated by Electrodeposition Method (전기 도금법으로 제작한 Ni 박막의 강자성 공명 선폭 분석)

  • Kim, Dong Young;Yoon, Seok Soo
    • Journal of the Korean Magnetics Society
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    • v.24 no.2
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    • pp.60-65
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    • 2014
  • We obtained resonance field ($H_{res}$) and linewidth (${\Delta}H_{PP}$) from measured ferromagnetic resonance signal in the functions of polar angle (${\Theta}_H$) in Ni thin film of 240 nm thickness fabricated by electrodeposition method. The angular dependence of $H_{res}$ was well fitted with the calculated ones. We confirmed that the g-factor and effective demagnetization field were 2.18 and 445 emu/cc by the theoretical analysis of the resonance field, respectively. The angular dependence of ${\Delta}H_{PP}$ showed very large values at in-plane direction (${\Theta}_H=90^{\circ}$), which could not explained by the homogenous linewidth due to the Gilbert damping and inhomogeneous linewidth due to the angular variations and magnetization variations by the surface layer. Therefore, we considered the spin wave scattering (two magnon scattering) process in order to analyze the measured inhomogeneous linewidth, which was appeared in thicker film than the critical thickness of 50 nm. The defect medicated spin wave scattering played a key role in the electrodoposited Ni thin film of 240 nm thickness.

Performance Assessment of High-Speed Transponder System for Rail Transport on High-Speed Line (철도교통용 고속 트랜스폰더시스템 고속선 실차 성능평가)

  • Park, Sungsoo;Lee, Jae-Ho;Kim, Seong Jin
    • Journal of the Korean Society for Railway
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    • v.19 no.3
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    • pp.304-313
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    • 2016
  • It is necessary to receive telegrams transmitted by transponder tags installed along the track in order to detect the exact position of a high-speed train. In a high-speed railway environment, telegrams can be corrupted by the electromagnetic interference that comes from onboard electric train power equipment or wayside devices. In this study, we verified the railway environment compatibility of a high-speed transponder system developed as a train position detection system. We installed transponder tags on the Honam high-speed line and measured the number of error-free telegrams received from the transponder tag while the HEMU-430X was running at 268km/h~334km/h. Based on the measurement, we estimated the length of the contact zone formed between the transponder reader and tag. Field test results allow us to estimate how many error-free telegrams can be received when HEMU-430X is at speeds up to 400km/h.

Development of Load Cell Using Fiber Brags Grating Sensors and Differential Method for Structural Health Monitoring (구조 건전성 모니터링을 위한 광섬유 브래그 격자 센서와 차동법을 적용한 로드셀 개발)

  • Kim, Dae-Hyun
    • Journal of the Korean Society for Nondestructive Testing
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    • v.29 no.4
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    • pp.299-307
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    • 2009
  • Emerging fiber optic sensor technologies have shown great potential to overcome the difficulties associated with conventional sensors. Fiber optic sensors are immune to EM noise and electric shock and thus can be used in explosion-prone areas. Several kinds of fiber optic sensors have been developed over the last two decades to take advantage of these merits. There have also been many field applications of fiber optic sensors for structural health monitoring as NDT/HDE. However, very few sensors, particularly a load cell have been successfully commercialized. This Paper Presents a load cell using fiber Bra99 gra1ing (FBG) sensors. The shape of the load cell is a link type, and three FBG sensors are used for measuring strains at three different points. Especially, these strains are processed with a differential method in order to exclude common mode noise such as temperature. Moreover, the sensitivity, the linearity and the resolution of the load cell were successfully verified from the experiment of tension test.

The Effects of the Stimulation Intensity and Inter-Electrode Distance on the Parameters of the Measured Sensory Nerve Signal (전기자극의 강도와 측정전극의 간격이 감각신경신호의 파라미터에 미치는 영향 연구)

  • Lim, Kyeong Min;Song, Tongjin
    • Journal of Biomedical Engineering Research
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    • v.35 no.6
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    • pp.234-241
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    • 2014
  • This study was designed to investigate the effects of stimulation intensity and inter-electrode distance on the parameters of the measured sensory nerve signal. 30 healthy subjects participated in this study. Sensory nerve signals were elicited by four different pulse amplitudes, i.e., 3, 6, 9, 12 mA, with the pulse width fixed at $500{\mu}s$. The sensory nerve signals elicited by the four different pulse amplitudes were measured by four different inter-electrode distances (20, 30, 40, and 50 mm). We extracted four parameters (pulse amplitude, pulse width, pulse area, and latency time from stimulation) from the sensory nerve signals. The measured pulse amplitude and pulse width were increased when the measuring inter-electrode distance was increased while the stimulating pulse amplitude was fixed. The measured pulse amplitude was saturated with the stimulating pulse amplitudes of over 6 mA while measuring inter-electrode distance. Under the same condition, measured pulse width was increased, and sensory nerve signal was initiated early. Sensory nerve signals, specially those of pulse amplitude, were distorted by a differential amplification method that commonly measures the human body signal. The experimental results indicate that the differential amplification method is required to be replaced when measuring nerve signals. Our observations suggested that the hyperpolarization of the action potential of the sensory nerve signal for preventing distortion could be used to clarify the correlation between the parameters of the sensory nerve signals and quantification of sensations.

Probability Based Risk Evaluation Techniques for the Small-Sized Sea Floater (소형 해상 부유체의 확률 기반 위기평가기법)

  • Yim, Jeong-Bin
    • Journal of Navigation and Port Research
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    • v.36 no.10
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    • pp.795-801
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    • 2012
  • This paper describes theoretical approach methodology for the Probability based risk Evaluation Techniques (PET) to monitor the risk levels of small-sized sea floater as like a yacht pier. The risk decision-making process by risk criteria with five-step scales is the core concepts of PET. These five-step scales are calculated from cumulative probability distribution of response functions for the sea floater motions using closed-form expressions. In addition, The risk decision-making process of PET with the risk criteria is proposed in this work. To verify the usability of PET, simulation experiments are carried out using mimic signals with the electrical specifications of ADIS16405 sensor that is to be use as measurement tool for the floater motions. As results from experiments, the risk evaluation error by PET shows 0.38 levels in maximum 5.0 levels. These results clearly shown that the proposed PET can be use as the monitoring techniques.

Design and Fabrication of a Si pin Photodetector with Peak Spectral Response in the Red Light for Optical Link (적색 중심 Optical Link용 Si pin Photodetector의 설계 및 제작)

  • 장지근;김윤희;이지현;강현구;이상열
    • Journal of the Microelectronics and Packaging Society
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    • v.8 no.1
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    • pp.1-4
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    • 2001
  • We have fabricated and evaluated a new Si pin photodetector for APF optical link. The fabricated device has the $p^{+}$-guard ring around the metal-semiconductor contact and the web patterned $p^{+}$-shallow diffused region in the light absorbing area. From the measurements of electo-optical characteristics under the bias of -5 V, the junction capacitance of 4 pF and the dark current of 180 pA were obtained. The optical signal current of 1.22 $\mu$A and the responsivity of 0.55 A/W were obtained when the 2.2 $\mu$W optical power with peak wavelength of 670 nm was incident on the device. The fabricated device showed the maximum spectral response in a spectrum of 650-700 nm. It is expected that the fabricated device can be very useful for detecting the optical signal in the application of red light optics.

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