• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.120.2-120.2
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• 2013

반도체 소자의 소형화로 신개념 화학증착공정 구현을 위한 장비와 화학증착소재의 개발이 활발이 연구되고 있다. 특히 증착소재의 물리적 화학적 특성을 파악하고 가장 적합한 소재를 선택하기 위한 연구도 변행되고 있다. 많은 연구자들이 소재 평가를 위해 가스크로마토그래피, 질량분석기, 적외선 분광기 등을 이용한 화학증착소재의 특성을 파악하기 위해 노력하고 있다. 하지만 실제 화학기상증착(Chemical Vapor Deposition)법과 원자층증착(Atomic Layer Deposition)법 공정에서 웨이퍼 표면에서의 화학증착소재의 흡착거동에 대한 연구는 거의 전무한 실정이다. 따라서 본 연구에서는 개선된 Attenuated Total Reflectance(ATR)분광계를 이용하여 표면에 흡착된 소재의 흡착거동에 대해 분석을 수행하였다. 평가에 사용된 화학증착소재는 C-Zr (Tris (dimethylamino) cyclopentadienyl zirconium)이며, Fourier Transform Infrared Spectroscopy (FT- IR)시스템 내에 설치된 ATR 분광계 표면에 흡착된 C-Zr 증착소재를 다양한 공정조건(온도 및 반응가스, 플라즈마 파워 등)에서의 거동 변화를 연구하였다.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.44 no.12
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• pp.1054-1061
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• 2016

Development of an accurate infrared signature (IR) measurement system is expected to contribute in the development of low observable technology and the spectroscopic analysis of electromagnetic radiation. Application of a spectroradiometer (SR) allows for the measurement of detailed infrared signature from the exhaust plume due to its own heat source. Establishment of a measurement system using a micro-turbo engine is intended to simulate the modelling of the aircraft plume. The engine was installed on a test stand to measure the engine performance. The IR signature was measured by placing the SR perpendicular to the axis line of the exhaust plume. Reference data from the blackbody were also measured to calibrate the raw data, and the infrared signature of the background was also measured for comparison with that of the plume. The calibrated spectral radiance was obtained through the data reduction process and the results were analyzed in specific bands. The experiments revealed that the measurement system established here showed sufficient performance for further comprehensive analysis.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.8 no.1
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• pp.138-144
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• 1998

$\alpha$-$Fe_2O_3$ fine powders with the sizes smaller than 0.5 $\mu \textrm{m}$ were prepared by the solvolysis and condensation reaction using iron(III) nitrate and ethanol as starting materials. The variation of pH and the change of FT-IR absorption peak were observed to study the reaction mechanism of iron(III) nitrate solution. In addition, the decomposition mechanism of the precipitated gel was investigated by differential scanning calorimeter, X-ray diffractometer and FT-IR spectrometer. Scanning electron microscope and BET method were performed to analyze the effects of Iron (III) nitrate concentration and reaction temperature on the particle size of $\alpha$-$Fe_2O_3$ powders.

• Analytical Science and Technology
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• v.12 no.5
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• pp.375-381
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• 1999

Near infrared spectrophotometry(NIR) was developed as a non-invasive determination of blood alcohol. The first pure alcohol/water samples were prepared with ethanol concentration from 0.01 to 0.1%(w/w). Analysis of the second-derivative data was accomplished with multilinear regression(MLR). The standard error of calibration(SEC) of ethanol in ethanol/water solutions was approximately 0.0039%. The calibration models were established from the blood alcohol spectra by MLR and PLSR analysis. The best calibration was built with the second-derivative spectra of 2266 and 2326 nm by MLR. Second-derivative spectra in the spectral ranges of 1100~1340, 1500~1796 and 2064~2300 nm with four PLSR factors provided the standard error of prediction(SEP) of 0.030%(w/w). These results indicate that NIR may be applied for a fast non-invasive determination of alcohol in the blood.

• Analytical Science and Technology
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• v.26 no.2
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• pp.120-124
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• 2013

It was studied to analyze the $CO_2$, CO, $SO_2$ standard gases of combustion gases by the open path FT-IR spectrometer with passive mode for remote analysis of air pollutant and volcano gases without IR lamp. As result, it was confirmed to have good linearity with more than 0.9 as correlation coefficients on the calibration curve of $CO_2$, CO concentration by MLR method. But in the case of $SO_2$, because the correlation coefficients were 0.88, the linearity could be lower. Finally, the concentration of three gases was predicted on in-site fire experiment under the condition of quantitative analysis. It could measure high $CO_2$ concentration as predicted result, but didn't measure the CO and $SO_2$. According to the result, it was possible to measure the combustion gases to long distance by only open path FT-IR spectrometer without infrared lamp.

• Journal of the Mineralogical Society of Korea
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• v.1 no.1
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• pp.20-31
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• 1988

울진 연.아연 광사의 Ca석류석은 결정화학적 성질의 차이에 따라 색, 경도, 비중과 같은 물리적 특성이 달라진다. 가기 다른 색을 보여주는 네가지의 석류석에 대하여 전자현미분석, X-선 회절분석, 뫼스바우어 및 적외선 분광분석등을 실시하여 화학적, 구조적 및 결정화학적 특징을 연구하였으며 광학적 및 물리적 특성도 연구되었다. 화학분석에 의하면 Fe 함량이 0.35에서 1.92%로 증가함에 따라 석류석의 색이 연분홍, 황록색, 적갈색 및 암갈색의 순으로 변한다. 이러한 Al에 대한 Fe의 치환은 단위포의 크기에도 영향을 미쳐 11.91$\AA$에서 12.06$\AA$으로 단위포의 크기가 증가한다. 뫼스바우어 계수에 따르면 Fe치환에 따른 Y-O 거리의 증가로 $\delta$값이 0.372에서 0.389mm/sec로 일정하게 증가한다. 또한 능을 고유하며 이웃하는 X십이면체에 영향을 주어 내부대칭도를 떨어뜨리게 된다. 이러한 현상은 적외선 스펙트럼의 360~300cm-1의 영역에서 그로슐라에는 관찰되지 않는 수개의 흡수선이 안드라다이트에서는 관찰된다. 한편 소량의 Fe2+가 그로슐라에서만 관찰됨을 미루어 석류석의 생성이 용역내으 낮은 산소분압에 영향을 받았을 것으로 추측된다.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.14 no.6
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• pp.272-276
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• 2004

Inorganic materials, including gemstones, also have characteristic vibrational energies in the infrared that can be used for identification. For infrared spectroscopy, absorptions associated with the vibrations of the crystal structure (lattice vibrations) are characteristic of the given combination of atoms constituting the gemstone. Natural turquoise $CuAl_6(PO_4)_4\cdot(OH)_8\cdot 5H_2O$ can be distinguished easily from its common substitutes in the infrared range 2000~450$\textrm{cm}^{-1}$ by features in the mid-infrared. Gilson turquoise, which is a synthetic, exhibits a significantly smoother pattern when compared with natural turquoise, because of a different state of aggregation. Also, because the natural turquoise and gibbsite are so different chemically, their patterns are very different. The technique, which is infrared spectroscopy, is nondestructive and, with Fourier transform instrumentation, extremely rapid.

• Economic and Environmental Geology
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• v.50 no.1
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• pp.15-26
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• 2017

Advanced argillic, argillic, and phyllic zones are the most important alteration patterns to predict the hidden ore body during exploration of hydrothermal deposits. We examined the quantitative relationship between the spectral absorption characteristics and the mineral content of the synthetic mixtures such as alunite-kaolinite and illite-kaolinite using short wavelength infrared (SWIR) spectroscopy. In the alunite-kaolinite mixtures, the spectral absorption characteristics of the alunite was highly correlated with the Hull quotient reflectance(0.99) and the kaolinite had the highest correlation with the Gaussian peak(0.92). Illite-kaolinite mixtures are essential for Gaussian deconvolution because of the overlap of absorption region. Illite and kaolinite mixtures indicate the high correlation of 0.93 and 0.98, respectively. The error ranges in the alunite-kaolinite(8%) and illite-kaolinite mixtures(5%) derived from SWIR were smaller than the ones(29% and 26%) obtained from X-ray diffraction(Rietveld) analysis. These results show that SWIR spectroscopic analysis is more reliable than XRD Rietveld analysis in terms of quantification of allowed minerals.

• Analytical Science and Technology
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• v.5 no.3
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• pp.285-294
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• 1992

Structures of dimers of the acetonitrile and DMF diluted by carbon-tetrachloride and xenon matrices at 80K were studied with infrared absorption spectroscopy. Sample and matrix materials were codeposited onto a KBr cold trapping window. Infrared absorption spectra of pure samples and diluted samples were compared to explain the structures of dimers. The acetonitrile dimer showed the antiparallel shape and the DMF dimer showed the linear shape. After annealing, the infrared spectrum of the diluted sample showed the same shape with that of the pure sample.

• Korean Journal of Food Science and Technology
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• v.13 no.3
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• pp.209-218
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• 1981

Free fatty acid and total saponin, which were extracted from the spent media and colony of the strain Phizopus delemar Rh-1, were qualitatively examined by GLC and spectroscopic methods and compared with these of intact ginseng media. The 18, 18, and 14 free fatty acids were respectively identified from the control, spent media and colony. Among them, $iC_{12:0},\;C_{16:2},\;C_{17:0},\;C_{18:3}\; and\;C_{20:0}$ acids were not detectable from the colony. In add ition, $C_{16:2}\;and\;C_{20:0}$ peaks were rot found in the spent media and control, respectively. The isible absorption spectra of free fatty acids and total saponins in the control, spent media and colony were invariable. In contrast, however, the infrared and ultraviolet absorption spectra showed significant spectral variations, particularly in the it finger-print region, demonstrating that the ginseng components were considerably utilized by the strain Rhizopus delemar Rh-1.