Comparative Study of Texture of Al/Ti Thin Films Deposited on Low Dielectric Polymer and SiO$_2$ Substrates
(저 유전상수 폴리머와 SiO$_2$ 기판위에 형성된 Al/Ti박막의 우선방위 비교)
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- Journal of the Microelectronics and Packaging Society
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- v.7 no.2
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- pp.37-42
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- 2000