Study for Fabrication of Dielectric Thick Films with Low Dielectric Constant and Low Loss Tangent Grown by Aerosol Deposition Method at Room Temperature (에어로졸 데포지션법에 의한 저유전율, 저손실 유전체 후막의 상온 증착 공정에 대한 연구)
-
- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
- /
- 2008.11a
- /
- pp.210-210
- /
- 2008