• Title/Summary/Keyword: 잔류응력 특성

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빗각 증착으로 제조된 TiN 박막의 스트레스 특성 연구

  • Byeon, In-Seop;Yang, Ji-Hun;Kim, Seong-Hwan;Jeong, Jae-In
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2017.05a
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    • pp.94.2-94.2
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    • 2017
  • TiN 박막은 음극 아크 증착(Cathodic Arc Deposition) 방법을 이용하여 단층과 빗각 증착(Oblique Angle Deposition; OAD)으로 다층 박막 제조하여 잔류응력 변화에 대해서 확인하였다. 타겟은 99.5% Ti이고, 기판은 Si wafer를 사용하였다. 기판과 타겟 간의 거리는 29cm이며, 기판을 진공챔버에 장착하고 ${\sim}2.0{\times}10^{-5}Torr$까지 진공배기를 실시하였다. 진공챔버가 기본 압력까지 배기되면 Ar 가스를 주입한 후 약 800V 의 전압을 인가하여 약 30분간 청정을 실시하였다. TiN 박막은 Ar와 $N_2$ 가스를 주입하여 코팅하였으며 모든 박막의 두께는 약 $1{\mu}m$로 고정 하였다. 공정 변수는 기판 인가 전압 이었다. 음극 아크를 이용하여 제조된 TiN 박막은 공정 조건에 따라 잔류응력 변화가 확인되었다. 바이어스를 인가한 단층 박막이 인가하지 않는 박막 보다 잔류응력이 약 1 GPa 증가하였다. 빗각 증착으로 코팅한 다층 박막의 잔류응력은 약 3.4 GPa로 빗각을 적용하지 않은 단층의 코팅 박막 보다 약 2~3 GPa의 잔류응력 감소가 있었다. 이는 빗각구조가 박막의 잔류응력을 감소시키는데 영향을 미친 것으로 판단된다. 본 연구를 통해 얻어진 결과를 바탕으로 빗각 증착을 활용하여 박막의 잔류응력 제어가 가능할 것으로 보인다.

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Investigation of residual stress in cBN thin films deposited with hydrogen

  • Go, Ji-Seon;Kim, Hong-Seok;Park, Jong-Geuk;Lee, Uk-Seong;Baek, Yeong-Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.43-43
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    • 2011
  • BN(Boron Nitride)은 온도와 압력 조건에 따라 안정한 상이 sp3 결합인 cubic 구조의 BN(cBN)과 sp2 결합인 hexagonal 구조의 BN(hBN or tBN)으로 나뉘는데, 이 중 cBN은 우수한 기계적, 물리적, 화학적 특성으로 인해 박막 분야에서 매우 높은 응용가능성을 지니고 있다. 하지만 cBN 박막의 합성과정에서의 필수적인 요소인 높은 압축잔류응력은 cBN을 응용분야에 적용하는데 있어 한계점으로 계속 남아 있었다. 그동안 이러한 잔류응력을 감소시키기 위해 열처리, 이온 주입, 제 3의 물질 첨가 등 다양한 관점에서 접근한 연구들이 진행되어 왔다. 본 연구에서는 cBN 합성과정에서 잔류응력을 감소시키기 위한 방법으로 수소를 첨가하였고, 그에 따른 잔류응력의 변화를 분석하고, 그 과정에서 잔류응력의 형성에 수소가 어떤 역할을 하는지 규명하고자 하였다. cBN 박막은 hBN을 target으로한 unbalanced magnetron sputtering를 사용하여, 실리콘 wafer 위에 합성하였다. 증착압력은 1.3mTorr로, 수소의 첨가량을 증가시키며 잔류응력과 cBN fraction을 관찰하였다. cBN fraction은 FTIR로 분석하였고, 잔류응력은 실리콘 strip의 in-situ 곡률측정법으로 계산하였다. cBN 박막의 조성과 구조 분석, 수소의 역할 규명을 위해 RBS 및 HRTEM을 이용하였다.

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Study on Thermal Residual Stresses and Transmission Characteristics in N-pole Type Frequency Selective Surface Embedded Composite Structures (N-pole 종류의 FSS가 결합된 복합재료 구조의 잔류응력과 전파투과특성)

  • Park, Kyoung Mi;Hwang, In Han;Chun, Heoung Jae;Hong, Ic Pyo;Park, Yong Bae;Kim, Yoon Jae
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.26 no.2
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    • pp.123-130
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    • 2013
  • In this paper, the delamination and failures in frequency selected surface(FSS) caused by residual stresses in the FSS embedded hybrid composites due to the difference between the coefficients of thermal expansion of components and the transmission characteristic changes due to deformation of FSS patterns by residual stresses were studied. FSS may have different electromagnetic characteristics depending on the type of element, design variables, and arrangement. Design variables of dipole FSS were determined using PSO(Particle Swarm Optimization) to obtain the transmission characteristic for the target resonant frequency. Subsequently, the design variables of other types of N-pole(tripole, cross dipole, and Jerusalem cross) were determined based on the dimensions of the dipole for the comparisons of residual stresses of FSS embedded composite structures and transmission characteristics. In addition, effects of FSS pattern, and stacking sequence of composite laminates were considered.

Thermal residual stress behavior in fiber metal laminates (섬유금속적층판의 경화 시 발생하는 열 잔류응력에 관한 연구)

  • Kim, Se-Young;Choi, Won-Jong;Park, Sang-Yoon;Moon, Cho-Rok
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.33 no.6
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    • pp.39-44
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    • 2005
  • Due to mismatch of thermal expansion coefficients between aluminum sheet and glass/epoxy sheet, thermal residual stresses generally appear in the FML. These stresses will affect the yield and fatigue strength of the FML. The numerically determined residual stresses in the Fiber-Metal-Laminates(FML) have been compared to the residual stresses measured from the curvature and tensile test methods. These two experimental methods have been developed for assessing the influence of residual stress in FML. Post-stretching process has been applied to remove the thermal residual stress and reverse the stress distribution. After post-stretching process, the residual stress has been measured from experiments. The results obtained show that analytical and experimental data are well agreed. The thermal residual stress can be removed by post-stretching process and it will increase the yield strength of FML.

Experimental Study on the Characteristics of Residual Stress in Welds of Duplex Stainless Steel (듀플렉스 스테인리스강 용접부의 잔류응력 특징에 관한 실험적 연구)

  • Jeon, Juntai
    • Journal of the Society of Disaster Information
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    • v.13 no.2
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    • pp.147-154
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    • 2017
  • Duplex stainless steel finds increasing use as an alternative to austenitic stainless steel, particularly where chloride or sulphide stress corrosion cracking is of primary concern, due to the excellent combination of strength and corrosion resistance. During welding, duplex stainless steel does not create the same magnitude or distribution of weld-induced residual stresses as those in welded austenitic stainless steel due to the different physical and mechanical properties between them. In this work, an experimental study on the residual stresses in butt-welded duplex stainless steel is performed utilizing the layering technique to investigate the characteristics of residual stresses in the weldment.

Effects on Machining on Surface Residual Stress of SA 508 and Austenitic Stainless Steel (SA508 탄소강 및 오스테나이트 스테인리스강의 표면잔류응력에 미치는 기계가공효과)

  • Lee, Kyoung-Soo;Lee, Seong-Ho;Park, Chi-Yong;Yang, Jun-Seok;Lee, Jeong-Geun;Park, Jai-Hak
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.35 no.5
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    • pp.543-547
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    • 2011
  • Primary water stress corrosion cracking has occurred in dissimilar weld areas in nuclear power plants. Residual stress is a driving force in the crack. Residual stress may be generated by weld or surface machining. Residual stress due to surface machining depends on the machining method, e.g., milling, grinding, or EDM. The stress is usually distributed on or near the surface of the material. We present the measured residual stress for machining on SA 508 and austenitic stainless steels such as TP304 and F316. The residual stress can be tensile or compressive depending on the machining method. The depth and the magnitude of the residual stress depend on the material and the machining method.

A Study on the Characteristics of the Residual Stress Distribution of Steel Structural Members (용접(鎔接) 강구조(鋼構造) 부재(部材)의 잔류응력(殘留應力) 특성(特性)에 관한 연구(研究))

  • Chang, Dong Il;Kim, Doo Hwan
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.7 no.1
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    • pp.93-101
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    • 1987
  • Residual stresses have remained around welding areas of a steel structure member after welding operation. The major causes to occur these residual stresses are the local heat due to a welding, the heat stresses due to a irregular and rapid cooling condition, the material and rigidity of a steel structure. Ultimatly, these residual stresses have been known to decrease a brittle fracture strength, a fatigue strength, a buckling strength, dynamic properties, and the corrosion resistance of the material. This paper deals with the residual stresses on a steel structure member through experimental studies. SWS 58 plates were welded by the method of X-groove type. These plates were layed on the heat treatment at four different temperatures; $350^{\circ}C$, $500^{\circ}C$, $650^{\circ}C$ and $800^{\circ}C$. The resulting residual Stresses were measured by hole drilling method, and the followings were obtained. The residual stresses on the vicinity of a welding point were relieved most effectively at the temperature of $650^{\circ}C$, and these stresses relieved completly when the ratio of a hole diamerter to a hole depth became unity. Hardness test shows that the higher value of hardness at the heat affected zone dropped to belower as the temperature went up from $350^{\circ}C$ to $800^{\circ}C$. The Welding input heats have not influenced the magnitude of residual stresses at the input heat range between above and below one forth than standard.

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Fracture Mechanics Analysis of a Crack in the Weld using the J-integral (J-적분을 이용한 용접접합부 균열의 파괴 역학적 해석)

  • Chang, Kyong Ho;Lee, Chin Hyung
    • Journal of Korean Society of Steel Construction
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    • v.17 no.2 s.75
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    • pp.243-251
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    • 2005
  • The fracture mechanics analysis of a crack in a weld must consider residual stress generated during welding. The standard definition of the J-integral requires a path dependent value in the presence of a residual stress field. Therefore, it is necessary to develop a path independent J-integral definition for a crack in a residual stress field. This paper addresses the modification of the Rice-J-integral to produce a path- independent J-integral when residual stresses and external forces are present. The residual stress problem is treated as an initial strain problem and the J-integral proposed for this type of problems is used. A program which can evaluate the J-integral for a crack in a weld is developed using the proposed J-integral definition. The situation when only residual stress is present is examined as is the case when mechanical stresses are applied in conjunction with a residual stress.

Study on Effect of Mechanical Machining and Heat Treatment on Surface Residual Stress of TP316L Stainless Steel (TP 316L 스테인리스강의 기계가공 및 열처리에 의한 표면잔류응력 특성 측정 연구)

  • Lee, Kyoung-Soo;Lee, Jeong-Keun;Song, Ki-O;Park, Jai-Hak
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.35 no.5
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    • pp.453-458
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    • 2011
  • We study the effect of mechanical machining and heat treatment on the surface residual stress of TP 316L stainless steel. Electrical discharge machining (EDM), milling and grinding were applied to TP 316L plate specimens. The residual stress and hardness were measured and the effect of heat treatment on the surface residual stress was examined. The residual stress was measured by the X-ray diffraction method, which showed that the surface residual stress was related only to the stress magnitude and was independent of the compressive or tensile component. The surface residual stress was greatly decreased by the heat treatment, but it was not removed completely.

Fracture Mechanics Analysis of a Interface Crack in the Weld of Dissimilar Steels using the J-integral (J-적분을 이용한 이종강재 용접접합부 계면균열의 파괴역학적 해석)

  • Lee Chin-Hyung;Chang Kyong-Ho
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.17 no.4
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    • pp.423-431
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    • 2004
  • For the fracture mechanics analysis of cracks in welds of dissimilar steels, residual stress analysis and fracture analysis must be performed simultaneously. The standard definition of the J -integral leads to a path dependent value in the presence of a residual stress field. And unlike cracks in homogeneous materials, a bimaterial interface crack always induces both opening and shearing modes of stress in the vicinity of the crack tip. Therefore, it is necessary to develope a path independent J-integral definition for a crack in a residual stress field generated by welding of dissimilar steels. This paper addresses the modification of the Rice-J-integral to produce a path independent J -integral when residual stresses due to welding of dissimilar steels and external forces are present. The residual stress problem is treated as an initial strain problem and the J-integral proposed for this class of problems is used. And a program which can evaluate the J -integral for a crack in a weld of dissimialr steels is developed using proposed J integral definition.