• Title/Summary/Keyword: 자동화 엑스레이 검사

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duoPIXTM X-ray Imaging Sensor Composing of Multiple Thin Film Transistors in a Pixel for Digital X-ray Detector (픽셀내 다수의 박막트랜지스터로 구성된 듀오픽스TM 엑스선 영상센서 제작)

  • Seung Ik, Jun;Bong Goo, Lee
    • Journal of the Korean Society of Radiology
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    • v.16 no.7
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    • pp.969-974
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    • 2022
  • In order to maximize dynamic range and to minimize image lag in digital X-ray imaging, diminishing residual parasitic capacitance in photodiode in pixels is critically necessary. These requirements are more specifically requested in dynamic X-ray imaging with high frame rate and low image lag for industrial 2D/3D automated X-ray inspection and medical CT imaging. This study proposes duoPIXTM X-ray imaging sensor for the first time that is composed of reset thin film transistor, readout thin film transistor and photodiode in a pixel. To verify duoPIXTM X-ray imaging sensor, designing duoPIXTM pixel and imaging sensor was executed first then X-ray imaging sensor with 105 ㎛ pixel pitch, 347 mm × 430 mm imaging area and 3300 × 4096 pixels (13.5M pixels) was fabricated and evaluated by using module tester and image viewer specifically for duoPIXTM imaging sensor.

Evaluation of Dynamic X-ray Imaging Sensor and Detector Composing of Multiple In-Ga-Zn-O Thin Film Transistors in a Pixel (픽셀내 다수의 산화물 박막트랜지스터로 구성된 동영상 엑스레이 영상센서와 디텍터에 대한 평가)

  • Seung Ik Jun;Bong Goo Lee
    • Journal of the Korean Society of Radiology
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    • v.17 no.3
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    • pp.359-365
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    • 2023
  • In order to satisfy the requirements of dynamic X-ray imaging with high frame rate and low image lag, minimizing parasitic capacitance in photodiode and overlapped electrodes in pixels is critically required. This study presents duoPIXTM dynamic X-ray imaging sensor composing of readout thin film transistor, reset thin film transistor and photodiode in a pixel. Furthermore, dynamic X-ray detector using duoPIXTM imaging sensor was manufactured and evaluated its X-ray imaging performances such as frame rate, sensitivity, noise, MTF and image lag. duoPIXTM dynamic X-ray detector has 150 × 150 mm2 imaging area, 73 um pixel pitch, 2048 × 2048 matrix resolution(4.2M pixels) and maximum 50 frames per second. By means of comparison with conventional dynamic X-ray detector, duoPIXTM dynamic X-ray detector showed overall better performances than conventional dynamic X-ray detector as shown in the previous study.