• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.33.2-33.2
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• 2011

CMP (Chemical-Mechanical Planarization) 공정이란 화학적 반응과 기계적 힘을 동시에 이용하여 표면을 평탄화하는 공정으로, 반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위해 CMP 공정이 도입되었으며 반도체 패턴의 미세화와 다층화에 따라 CMP 공정의 중요성은 더욱 강조되고 있다. CMP 공정은 압력, 속도 등의 공정조건과, 화학적 반응을 유도하는 슬러리, 기계적 힘을 위한 패드 등에 의해 복합적으로 영향을 받는다. CMP 공정에서, 폴리우레탄 패드는 많은 기공들을 포함한 그루브(groove)를 형성하고 있어 웨이퍼와 직접적으로 접촉을 하며 공정 중 유입된 슬러리가 효과적으로 연마를 할 수 있도록 도와주는 역할을 한다. 하지만, 공정이 진행 될수록 그루브는 손상이 되어 제 역할을 하지 못하게 된다. 패드 컨디셔닝이란 컨디셔너가 CMP 공정 중에 지속적으로 패드 표면을 연마하여 패드의 손상된 부분을 제거하고 새로운 표면을 노출시켜 패드의 상태를 일정하게 유지시키는 것을 말한다. 한편, 금속박막의 CMP 공정에 사용되는 슬러리는 금속박막과 산화반응을 하기 위하여 산화제를 포함하는데, 산화제는 금속 컨디셔너 표면을 산화시켜 부식을 야기한다. 컨디셔너의 표면부식은 반도체 수율에 직접적인 영향을 줄 수 있는 scratch 등을 발생시킬 뿐만 아니라, 컨디셔너의 수명도 저하시키게 되므로 이를 방지하기 위한 노력이 매우 중요하다. 본 연구에서는 컨디셔너 표면에 연마 잔여물 흡착을 억제하고, 슬러리와 컨디셔너 표면 간에 일어나는 표면부식을 방지하기 위하여 소수성 자기조립 단분자막(SAM: Self-assembled monolayer)을 증착하여 특성을 평가하였다. SAM은 2가지 전구체(FOTS, Dodecanethiol를 사용하여 Vapor SAM 방법으로 증착하였고, 접촉각 측정을 통하여 단분자막의 증착 여부를 평가하였다. 또한 표면부식 특성은 Potentiodynamic polarization와 Electrochemical Impedance Spectroscopy (EIS) 등의 전기화학 분석법을 사용하여 평가되었다. SAM 표면은 정접촉각 측정기(Phoenix 300, SEO)를 사용하여 $90^{\circ}$ 이상의 소수성 접촉각으로써 증착여부를 확인하였다. 또한, 표면에너지 감소로 인하여 슬러리 내의 연마입자 및 연마잔여물 흡착이 감소하는 것을 확인 하였다. Potentiodynamic polarization과 EIS의 결과 분석으로부터 SAM이 증착된 표면의 부식전위와 부식전류밀도가 감소하며, 임피던스 값이 증가하는 것을 확인하였다. 본 연구에서는 컨디셔너 표면에 SAM을 증착 하였고, CMP 공정 중 발생하는 오염물의 흡착을 감소시킴으로써 CMP 연마 효율을 증가하는 동시에 컨디셔너 금속표면의 부식을 방지함으로써 내구성이 증가될 수 있음을 확인 하였다.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.24 no.2
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• pp.168-179
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• 2013

The critical point analysis(CA) and impedance matching analysis(IA) are performed and compared for a 4-coil magnetic resonance wireless power transfer system. Because the operating frequency splits at short distance while the efficiency drops drastically at long distance in this system, the optimization technique is needed for either a specific distance or efficiency at the fixed frequency. CA uses the critical point where shows maximum efficiency in the entire range and IA uses the impedance matching technique to achieve maximum efficiency at the specific distance. Comparison result shows that IA is more efficient than CA. Also, it shows one side matching has a tradeoff relationship comparing to both side matching. By using four spiral resonant coils, the analysis was experimentally verified. The measured data agreed well with the calculated data.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.8 no.3
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• pp.454-459
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• 2007

In this work, micro-scale, high-performance solenoid-type RF chip inductors utilizing amorphous $Al_2O_3$ core material were investigated. The size of the chip inductors was $0.86{\times}0.46{\times}0.45mm^3$ and copper(Cu) wire with $27{\mu}m$ diameter was used as the coil. High frequency characteristics of the inductance(L), quality factor(Q), impedance(Z), and equivalent circuit parameters of the RE chip inductors were measured and analyzed using an RF impedance/material analyzer(HP4291B with HP16193A test fixture). It was observed that the RF chip inductors with the number of turns of 9 to 12 have the inductance of 21 to 34nH and exhibit the self-resonant frequency(SRF) of 5.7 to 3.7GHz. The SRF of inductors decreases with increasing the inductance and inductors have the quality factor of 38 to 49 in the frequency range of 900MHz to 1,7GHz.

• Journal of the Korean Magnetics Society
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• v.22 no.6
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• pp.200-203
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• 2012

In this study, we have investigated that the operation frequency dependences of the output properties of the orthogonal fluxgate sensor which was fabricated with a ferrite core. An orthogonal fluxgate sensor should be operated in as high as possible frequency to enhance its sensitivity in the case of small sized sensor, because sensitivity of the sensor is proportional to cross section area, winding number and operation frequency. In this study, we investigated the correspondence of the frequency dependence of output and the reactance (inductance and capacitance) of pickup coil and cable. Experimental results represented that we could obtain maximum output (= sensitivity) at optimal frequency which is near LC resonance frequency of the pickup coil and cable.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.24 no.4
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• pp.466-473
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• 2013

In this paper, a compact planar multi-loop self-resonant coil of high quality factor with a coaxial cross section is proposed for effective wireless charging. The proposed coil has high Q-factor and a resonant frequency of a coil can be easily controlled by adjusting distributed capacitance. For designing the coil, a self-inductance and a distributed capacitance are calculated theoretically. The self-inductance is calculated from the sum of the mutual energies between small circular loops that are made by dividing the cross section of the coil. To verify its properties and calculation results, the self-resonant coils are fabricated by using a coaxial cable with characteristic impedance of $50{\Omega}$. The measured frequencies are very consistent with the calculated ones. In addition, the resonant frequency can be adjusted slightly by the tuning parameter ${\gamma}$. The resonant coils are applied to a tablet PC, the Q-factors of the Tx and Rx resonant coils are 282 and 135, respectively. As a result of measurement when height between the two resonant coils is 4.4 cm, the power transfer efficiency is more than 80 % within a radius of 5 cm.

• Journal of the Korean Magnetics Society
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• v.16 no.6
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• pp.300-304
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• 2006

The varied heating temperatures were used for magnetic core materials, which nano sized ${\alpha}-Fe$ crystalline was created in nanocrystalline Fe-Si-B-Nb-Cu materials, with hish permeability and low power loss. The highest permeability and lowest power loss were obtained to the specimen heat-treated at $510^{\circ}C$. The signal transmission characteristics of inductive coupler, which was manufactured by using the magnetic core materials prepared in this study, at low frequency range, was influenced strongly by magnetic property of magnetic core materials as this result is corresponding to the permeability as a function of heat treatment temperature, as well, it was improved by impedance matching at high frequency range. Over $500{\mu}m$ of air gap in coupler is required to maintain the magnetic properties without magnetic saturation on the subterranean line transferred hish current of 300 A. The inductive coupler for PLC, which has an attenuation characteristics of less than 5dB, was manufactured using nano-crystalline magnetic core materials through the above mentioned research results.

• Journal of Advanced Marine Engineering and Technology
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• v.33 no.8
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• pp.1239-1245
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• 2009

Currently, so many approaching methods are being developed to optimize the antenna size. In this paper, We fabricated Inverted-F type antenna attaching lumped components to solve the limitation of antenna size. Through experiments, a basic Inverted-F type antenna was fabricated and satisfied the adequate radiation pattern. After this, we researched the effect of antenna varied by matching circuit consist of chip type resistor, inductor, and capacitor. Using that elements, the antenna was matched at aim frequency. The proposed antenna's size is $7\;{\times}\;24\;mm$ that is very small size against the resonance frequence. Measuring the developed antenna, Its return loss was -18dB. Thus, this antenna can be used for Z-wave systems.

• Journal of Sensor Science and Technology
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• v.15 no.2
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• pp.77-83
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• 2006

A monitoring apparatus for pulse shapes of human heartbeats has been developed using an amorphous MI(Magnetic Impedance) sensor. The pulse shapes are successfully obtained from voltage signals due to the variations of magnetic impedance in the amorphous MI sensor, which is attached to a patient's wrist. This voltage signal was fed into a signal processing module to extract the pulse shapes of heartbeats. The signal processing module, which is proposed to detect a weak variations of impedance in MI sensor under a noisy measurement environment, consists of a high frequency current source, an amplifier stage and a synchronous detection circuit. To evaluate the characteristics of a newly developed apparatus, various experiments were performed. The experimental results show that the developed apparatus could be used as a diagnosis tool for traditional Korean medicine with further systematic clinical studies.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.61 no.3
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• pp.373-379
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• 2012

This paper presents a fault location algorithm based on the adaptively estimated value of the local sequence source impedance for faults on a parallel transmission line. This algorithm uses only the local voltage and current signals of a faulted circuit. The remote current signals and the zero-sequence current of the healthy adjacent circuit are calculated by using the current distribution factors together with the local terminal currents of the faulted circuit. The current distribution factors consist of local equivalent source impedance and the others such as fault distance, line impedance and remote equivalent source impedance. It means that the values of the current distribution factors can change according to the operation condition of a power system. Consequently, the accuracy of the fault location algorithm is affected by the two values of equivalent source impedances, one is local source impedance and the other is remote source impedance. Nevertheless, only the local equivalent impedance can be estimated in this paper. A series of test results using EMTP simulation data show the effectiveness of the proposed algorithm. The proposed algorithm is valid for a double-circuit transmission line system where the equivalent source impedance changes continuously.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1521-1523
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• 2002

본 논문에서는 1.58 ${\times}$ 0.82 ${\times}$ 0.94 $mm^3$크기의 H 형태의 솔레노이드형 RF 칩 인덕터를 코일의 직경과 권선수를 변화시키면서 제작하였고, 그들의 고주파 성능을 비교 분석하였다. 저손실 $Al_2O_3$재료를 코아로 $30{\mu}m{\sim}40{\mu}m$의 여러 직경을 가진 Cu를 코일로 사용하였다. 인덕터의 인덕턴스(L), 품질계수(Q), 저항(R), 임피던스(Z) 그리고 커패시턴스(C) 등의 주파수 특성은 HP4291B로 측정하였다. 실험결과 동일권선수에 대해 코일직경이 자을수록 L, Q, R, 그리고 Z등이 증가하였고, 그 증가폭은 권선수가 클수록 커지는 경향이 있음을 알 수 있었다. 그러나 코일직경이 작을수록 기생 커패시턴스 효과가 빨리 나타나 자기 공진주파수 효과가 감소하는 경향을 보이고 있음을 확인하였다. 코일직경이 $3{\mu}m$이고 권선수가 6인 경우에 대표적인 값들은 다음과 같다. L=31.4nH(at 250MHz), Q=49.6(at 700MHz), R=0.362${\Omega}$(at 1MHz)