• Journal of the Korean Vacuum Society
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• v.18 no.2
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• pp.97-101
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• 2009

In the modem semiconductor industry, the progress that consumes the most capital and labor is cleansing process. Cleansing process is to remove impurities that can affect the operation of the device and deteriorate its function. Especially, Photoresist (PR) progress that etches the device always requires cleansing at the end of the progress. Also, HDI-PR (High-Dose Ion-implanted Photoresist) created from PR progress is difficult to remove. Thus, in modem IC cleansing, many steps of cleansing are used, including dry and wet cleansing. In this paper, we suggested to combine existing dry-cleansing and wet-cleansing, each represented by plasma cleansing and stripper solution, as Plasma Liquid-Vapor Activation (PLVA). This PLVA method enhances the effect of existing cleansing solution, and decreases the amount of solution and time required to strip. We stripped HDI-PR by activated solution and measured surface hardness and Young's modulus by Nano-indenter. Nano-indenter is the equipment that determines the hardness and the modulus of elasticity by indenting nano-sized tip with specific shape into the surface and measuring weight and z-axis displacement. We measured the change of surface hardness and Young's modulus before and after the cleansing. As a result, we found out that the surface hardness of the sample sharply decreased after the cleansing by plasma-activated PR stripper solution. It can be considered that if physical surface-cleansing process is inserted after this, more effective elimination of HDI-PR is possible.

• 한국해양학회지
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• v.27 no.4
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• pp.303-310
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• 1992

Studies on the distribution of nitrogenous compounds, and respiratory oxygen consumption rate were carried out in Masan Bay, Korea where large amount of industrial and domestic wastewaters are discharged. In August 1986 the surface layer was significantly influenced by freshwater input. Below the seasonal pycnocline, an oxygen-deficient condition developed in a large area of Masan Bay. Concentrations of DIN, DON and PN were 735.6, 1261.8 and 48.5 umol/l at the head, and 79.1, 73.0 and 39.5 umol/l at the mouth of the inner Masan Bay, respectively. Phytoplankton carbon production was 2,695 mgC/m$^2$/day at the mouth of inner Masan Bay. Dissolved oxygen contents were lower than 1 ml/l from 3 m depth in inner Masan Bay and from 10 m depth in the outer Masan Bay. The high concentration of ammonium and phosphate in the lower layer suggests the active degradation of organic materials in the bottom waters and leaching from sediments. The ERS activity was 232.1 ul O$_2$/l/h in the surface waters of the innermost part of Masan Bay and respiratory oxygen consumption is likely to proceed at a rate of 442 ml O$_2$/m$^2$/day in the bottom waters of this bay. Nitrate removal rate was estimated to be 0.25 umol/l/day via denitrification in the bottom waters of the Masan Waterway. It is estimated from the ETS activity that, at the mouth of inner Masan Bay, 9.3-10.5% of carbon fixed in the upper layer was decomposed below the themocline.

• Journal of the Korean Electrochemical Society
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• v.11 no.2
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• pp.109-114
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• 2008

Though ethanol can theoretically generate 12 electrons during oxidation to carbon dioxide, the complete oxidation of ethanol is hard to achieve due to the strong bond between the two carbons in its molecular structure. Therefore, development of high activity catalyst for ethanol oxidation is necessary for the commercialization of direct ethanol fuel cell. In this study, some binary and ternary electrocatalysts of PtSn/C and PtSnAu/C have been synthesized and characterized. The catalysts were fabricated with modified polyol method with the amounts of 20 wt%, where the Pt : Sn ratios in the PtSn/C were 1 : 0, 4 : 1, 3 : 1, 2 : 1, 1.5 : 1, 1 : 1, 1 : 1.5 and Pt:Sn:Au ratios in the PtSnAu/C were 5 : 5 : 0, 5 : 4 : 1, 5 : 3 : 2, 5 : 2 : 3. From the XRD and TEM analysis results, the catalysts were found to have face centered cubic structure with particle size of around $1.9{\sim}2.4\;nm$. The activity in the ethanol oxidation was examined with cyclic voltammetry and the results indicated that PtSn(1.5 : 1)/C and PtSnAu(5 : 2 : 3)/C had the highest activity in each catalyst system. Further tests with single cell were performed with those catalysts. It was found that PtSn/C(1.5 : 1) exhibited the best performance while the long term stability of PtSnAu/C(5 : 2 : 3) is better than PtSn/C(1.5 : 1).

• Geophysics and Geophysical Exploration
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• v.15 no.2
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• pp.92-101
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• 2012

Three-dimensional finite-difference simulation in a small-scale half-sphere basin with planar free-surface is performed for an arbitrary shear-dislocation point source. A new scheme to deal with free-surface boundary condition is presented. Then basin parameters are examined to understand main characteristics on ground-motion response in the basin. To analyze the frequency content of ground motion in the basin, spectral amplitudes are compared with each other for four sites inside and outside the basin. Also particle motions for those sites are examined to find which kind of wave plays a dominant role in ground-motion response. The results show that seismic energy is concentrated on a marginal area of the basin far from the source. This focusing effect is mainly due to constructive interference of the direct Swave with basin-edge induced surface waves. Also, ground-motion amplification over the deepest part of the basin is relatively lower than that above shallow basin edge. In the small-scale basin with relatively simple bedrock interface, therefore, the ground-motion amplification may be more related to the source azimuth or direction of the incident waves into the basin rather than depth of it.

• Culinary science and hospitality research
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• v.20 no.2
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• pp.100-119
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• 2014

In this study, rice was used with naturally fermented extract to compare and analyze the physico-chemical characteristics and investigated how to make pan bread made with domestic wheat flour added with naturally fermented rice extract. Also, it examined quality characteristics of pan breads prepared with 0, 10, 30, 50, 70% naturally fermented rice starters. As the fermentation time of rice starters increased, pH of bread doughs decreased. On farinograph, water absorption, development time and stability of rice starters samples were lower than the control. RVA(Rapid Visco Analyzer) analysis showed that wheat flour retrogradation was retarded by increasing rice starters content. The weights of pan breads containing rice starters were higher than that of control. The moisture content of pan breads containing rice starters decreased as storage time increased. In analyzing of visible mold colony during 7 days of storage at $28^{\circ}C$, pan breads containing rice starters was retarded mold growth. In the texture analyzer measurement, hardness of breads containing rice starters significantly increased as storage time increased, which was higher than that of control. The result of sensory properties was no significant difference between the group containing 50% naturally fermented rice starters and control group, such as appearance, flavor, taste and overall quality.

• Korean Chemical Engineering Research
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• v.51 no.2
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• pp.208-213
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• 2013

Zirconium hydroxide was synthesized by varying the aging time of the zirconyl chloride octahydrate at $100^{\circ}C$ in aqueous solution and the resulting hydroxides were calcined at $700^{\circ}C$ for 6 h to obtain the crystalline $ZrO_2$. The materials used in this study were characterized by differential thermal analysis (DTA), X-ray diffraction (XRD), $N_2$-sorption, transmission electron microscopy (TEM), $NH_3$ temperature-programmed desorption ($NH_3$-TPD), $CO_2$-TPD and iso-propanol TPD analyses to correlate with catalytic activity for the dehydration of iso-propanol. The pure tetragonal $ZrO_2$ phase was obtained after 24 h aging of zirconium hydroxide and successive calcination at $700^{\circ}C$. The increase of aging time showed the production of smaller particle size $ZrO_2$ resulting that the higher specific surface area and total pore volume. $NH_3$-TPD results revealed that the relative acidity of the catalysts increased along with the increase of aging time. On the other hand, the results of $CO_2$-TPD showed the reverse trend of $NH_3$-TPD results. The best catalytic activity for the dehydration of iso-propanol to propylene was shown over $ZrO_2$ catalyst aged for 168 h which had the highest $S_{BET}$ ($178\;m^2\;g^{-1}$). The catalytic activity could be correlated with high surface area, relative acidity and easy desorption of iso-propanol.

• Journal of the Microelectronics and Packaging Society
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• v.22 no.4
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• pp.57-63
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• 2015

In order to prepare a low-cost conductive filler material possessing improved anti-oxidation property, Ag-coated Cu flakes were fabricated and the effects of an applying method of ammonium-based pretreatment solution on the Cu flakes were analyzed. The pretreatment solution was used to remove the surface oxide layer on Cu flake. During a single-stage pretreatment process, hole-shaped defects were formed on the flake surface during the pretreatment after 2 min, and the number and size increased in proportion to the pretreatment time. In the case that Ag plating solution was injected in the pretreatment solution after the pretreatment for 2 min, the defects were also formed during Ag plating. In contrast, the defects tremendous decreased in the case that the pretreatment solution was removed after the first pretreatment for 2 min and the Ag plating proceeded after the second pretratment using a low concentration pretreatment solution. As the final result, the 15 wt% Ag-coated Cu flake sample which was fabricated using the single-stage pretreatment oxidized at $166^{\circ}C$, but the sample fabricated by the double-stage pretreatment oxidized at $224^{\circ}C$, indicating definitely improved anti-oxidation property.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.18 no.5
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• pp.200-204
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• 2008

Mechano Chemical Process (MCP) skips the calcinations steps at an intermediate temperature that is always required in the conventional solid-state reaction because forming phase from raw powder is activated by mechanical energy. In this study, we prepared (Pb, La)$TiO_3$ nanopowder with perovskite structure by only high energy MCP. Especially, the PLT nanopowder was synthesized without any thermal treatment using oxides, not salts as raw powder. This process is also very simple due to dry milling method, unnecessary to dry of powder. The oxide powder was milled up to 12 hr at intervals of an hour using MCP and the pure PLT phase of perovskite structure was formed after milling time of 3 hr. And the average particle size was 20 nm with narrow distribution after milling time of 3 hr from raw powder of several $\mu m$ with inhomogeneous distribution.

• Journal of the Korean earth science society
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• v.23 no.7
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• pp.575-586
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• 2002

Authigenic minerals found in sandstones and mudrocks of the Lower Hayang Group (Cretaceous) in the central part of the Kyungsang Basin are carbonate minerals (calcite, dolomite), clay minerals (illite, chlorite, C/S, I/S and kaolinite), albite, quartz and hematite. Characteristic diagenetic mineral assemblages are as follows: albite-chlorite (including C/S)-hematite in the Chilgog Formation, albite-illite-calcite in the Silla Conglomerate, illite-chlorite-hematite in the Haman Formation and albite-chlorite-dolomite in the Panyawol Formation, respectively. Among clay minerals reflecting the physical and chemical change of the diagenetic process, illite, the dominant clay mineral, occurs in every formation in the study area. Chlorite occurs mainly in green or gray sandstones and mudrocks, or in sandstones and mudrocks of the Chilogok Formation which contains a high content of volcanic materials. Based on the mineral assemblage, diagenetic minerals are strongly related with source rocks. Judging from the illite crystallinity, diagenesis of sandstones and mudrocks in the study area reached the late diagenetic stage or low grade metamorphisim. The diagenetic process was much influenced by intrusion of the Bulguksa granite, content of organic materials, grain size, and depositional environment rather than burial depth.

• The Journal of Engineering Geology
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• v.12 no.1
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• pp.95-109
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• 2002

A significant question is what role does newly-formed expansive mineral growth play in the premature deterioration of concrete. These minerals formed in cement paste as a result of chemical reactions involving cement paste and coarse/fine aggregate. Petrographic observations and SEM/EDAX analysis were conducted in order to determine chemical and mineralogical changes in the aggregate and cement paste of samples taken from lowa concrete highways that showed premature deterioration. Formation and expansive mechanisms involved in deterioration were Investigated. Brucite, Mg(OH)$_2$, is potentially expansive mineral that farms in cement paste of concretes containing reactive dolomite aggregate as a result of partial dedolomitization of the aggregate. No cracking was observed to be spatially associated with brucite, but most brucite was microscopic in size and widely disseminated in the cement paste of less durable concretes. Expansion stresses associated with its growth at innumerable microlocations may be retrieved by cracking at weaker locations in the concrete. Ettringite, 3CaO.Al$_2$O$_3$.3CaSO$_4$.32$H_2O$, completely fills many small voids and occurs as rims lining the margin of larger voids. Microscopic ettringite is common disseminated throughout the paste in many samples. Severe cracking of cement paste causing premature deterioration is often closely associated with ettringite locations, and strongly suggests that ettringite contributed to deterioration. Pyrite, FeS2, is commonly present in coarse/fine aggregates, and its oxidation products is observed in many concrete samples. Pyrite oxidation provides sulfate ions for ettringite formation.