• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.40-40
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• 2011

반도체 소자의 미세화와 더불어 세정공정의 중요성이 차지하는 비중이 점점 커지고, 이에 따라 세정 기술 개발에 대한 요구가 증대되고 있다. 기존 세정 기술은 화학약품 위주의 습식 세정 방식으로 패턴 손상 및 대구경화에 따른 어려움이 있다. 따라서 건식세정 방식이 활발하게 도입되고 있으며 대표적인 것이 에어로졸 세정이다. 에어로졸 세정은 기체상의 작동기체를 이용하여 에어로졸을 형성하고 표면 오염물질과 직접 물리적 충돌을 함으로써 세정한다. 하지만 이 또한 생성되는 에어로졸 내 발생 입자로 인해 패턴 손상이 발생하며 이러한 문제점을 극복하기 위하여 대두되는 것이 가스클러스터 세정이다. 가스 클러스터란 작동기체의 분자가 수십에서 수백 개 뭉쳐 있는 형태를 뜻하며 이렇게 형성된 클러스터는 수 nm 크기를 형성하게 된다. 그리고 짧은 시간의 응축에 의해 수십 nm 크기까지 성장하게 된다. 에어로졸 세정과 다르게 클러스터가 성장할 환경과 시간을 형성하지 않음으로써 작은 클러스터를 형성하게 되며 이로 인해 패턴 손상 없이 오염입자를 제거하게 된다. 이러한 가스 클러스터 세정을 최적화하기 위해서는 설계 단계부터 노즐 내부 유동의 수치해석에 기반한 입자 크기 분포를 계산하여 반영하는 것이 필요하다. 따라서 본 연구에서는 상용 수치해석 프로그램을 이용하여 세정 환경을 조성하는 조건에서의 노즐 내부 유동을 해석하고, 이를 통해 얻어진 수치를 이용하여 aerosol general dynamic equation (GDE)를 계산하여 발생하는 클러스터의 크기 분포를 예측하였다. GDE 계산 시 입자의 크기 분포를 나타내기 위해서는 여러 가지 방법이 존재하나 본 연구에서는 각 입자 크기 노드별 개수 농도를 계산하였다. 노즐 출구에서의 가스 클러스터 크기를 예측하기 위하여 먼저, 노즐 내부 유속 및 온도 분포 변화를 해석하였다. 이를 통하여 온도가 급격하게 낮아져 생성된 클러스터의 효과적 가속 및 에너지 전달이 가능함을 확인할수 있었다. 이에 기반하여 GDE를 이용한 입자 크기를 예측한 결과 수 나노 크기의 초기 클러스터가 형성되어 온도가 낮아짐에 따라 성장하는 것을 확인할 수 있었으며, 최빈값의 분포가 실험적 측정값과 일치하는 경향을 가지는 것을 볼 수 있었다. 이는 향후 확장된 영역에서의 유동 해석과 증발 등 세부 요소를 고려한 계산을 통해 가스 클러스터 세정 공정의 최적화된 설계에 도움이 될 것이다.

• Proceedings of KOSOMES biannual meeting
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• 2006.05a
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• pp.79-83
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• 2006

Displayed result that handle particle contaminant and hydrospace organism included in number of ballast that is happened in ship using automatic bade washing filter. Reason that remove first contaminant that is included in number of ballast is that heighten processing effect of after processing process. of the filter. Another advantage is to drop off the solids with controlling revolution of drum screen in pretreatment filtration process. The fact that it is easy to attach and detach a several type of screen for getting the expected water quality is another advantage. Filter rotation speed at 1.0rpm is filter resistance 3.0bar and 3.0rpm is filter resistance 2.8bar. Filter out impurities from ballast water over 6.0rpm is filter resistance 26bar and 10rpm is filter resistance 2.5bar. Filtration system removal aquatic organism over $80{\mu}m$ in ballast water. This study shows that the filtration treatment system has a potential for the treatment of ballast water.

• Journal of Radiation Protection and Research
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• v.23 no.2
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• pp.109-114
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• 1998

Radiological safety for the conventional operation of Demonstration-Scale Incineration Plant (DSIP) was assessed on the basis of the results of trial burns using the simulated and real radioactive wastes. Radiation dose assessments for routine releases on an annual basis as well a several severe accidental releases on a short-term basis (2h) revealed that there would be no significant environmental impact when low-level waste Is incinerated in DSIP. For semivolatile radioactive cesium species, expected emission concentrations slightly exceeded 10% of maximum permissible concentration. Removal characteristics of the bag filter for condensed-phase cesium species was investigated by the trial burns of simulated waste with inactive cesium tracer. In the off-gas before passing through bag filter, distributions of condensed cesium species in the transition size ranging between the diffusional and inertial region are less than 5%. The overall collection efficiency of the bag filter for cesium species was higher than 99.9%, showing enough decontamination capability as a primary filter for the low-temperature dry off-gas system in radwaste incineration plant.

• Journal of Korean Society of Environmental Engineers
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• v.28 no.11
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• pp.1154-1161
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• 2006

Air drying equipment was built as a device for reduction of dewatered cake from wastewater and waterworks sludge and to reproduce it by reusable matter. Dewatered cake was supplied into the air drying equipment which operated by air velocity of 80 m/sec, air rate 30 $m^3/min$ and air temperature of $40^{\circ}C$, and dried to produce the dried powder. The air drying equipment was composed of the air ejector which made high-speed fluid field, and cyclone which made circling fluid field. Dewatered cake was crushed at the high-speed zone as first step, and formed into dried powder of sphere shape by the collision between particles at the circling fluid zone.. Wastewater sludge with water content of 82.5 wt% was supplied 1.0 kg/min into air drying equipment and produced the dried powder which had the water content of 62.3 wt% and mass median diameter of 2.4 mm after process. At that time, it was analyzed that water removal rate was 0.1 $H_2O{\Delta}kg/min{\cdot}DS$ kg and air consumption was 170 $m^3/DS$ kg. Under same experimental conditions, when waterworks sludge was dried, water content of dried powder decrease to 47.5 wt% and mass median diameter decrease 2.1 mm and water removal rate increase 0.13 $H_2O{\Delta}kg/min{\cdot}DS$ kg. Air consumption increase 180 $m^3/DS$ kg with comparison to the results of wastewater sludge. Therefore, this technology was evaluated that drying the dewatered cake of waterworks sludge was more efficient than wastewater sludge, and also economical sludge handling technology due to drying the cake by only air.

• Journal of Korean Society of Environmental Engineers
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• v.29 no.1
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• pp.113-125
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• 2007

To know the differences in ionic compositions in rain and snow as well as snow influence on the chemical characteristics of winter precipitation, precipitation samples were collected by the wet-only automatic precipitation sample, in winter(November-February) in the Iksan located in the northwest of Chonbuk from 1995 to 2000. The samples were analyzed for concentrations of water-soluble ion species, in addition to pH and electrical conductivity. The mean pH of winter precipitation was 4.72. According to the type of winter precipitation, the mean pH of rain was 4.67 and lower than 5.05 in snow. The frequencies of pH below 5.0 in rain were about 73%, while those in snow were about 30%. Snow contained 3 times higher concentrations of sea salt ion components originated from seawater than did rain in winter, mainly $Cl^-,\;Na^+$, and $Mg^{2+}$. Neglecting sea salt ion components, $nss-SO_4^{2-}$ and $NO_3^-$ were important anions and $NH_4^+$ and $nss-Ca^{2+}$ were important cations in both of rain and snow. Concentrations of $nss-SO_4^{2-}$ was 1.3 times higher in rain than in snow, while those of $nss-Ca^{2+}$ and $NO_3^-$ were 1.5 and 1.3 times higher in snow, respectively. The mean equivalent concentration ratio of $nss-SO_4^{2-}/NO_3^-$ in winter precipitation were 2.4, which implied that the relative contribution of sulfuric and nitric acids to the precipitation acidity was 71% and 29%, respectively. The ratio in rain was 2.7 and higher than 1.5 in snow. These results suggest that the difference of $NO_3^-$ in rain and snow could be due to the more effective scavenging of $HNO_3$ vapor than particulate sulfate or nitrate by snow. The lower ratio in snow than rain is consistent with the measurement results of foreign other investigators and with scavenging theory of atmospheric aerosols. Although substantial $nss-SO_4^{2-}$ and $NO_3^-$ were observed in both of rain and snow, the corresponding presence of $NH_4^+,\;nss-Ca^{2+},\;nss-K^+$ suggested the significant neutralization of rain and snow. Differences in chemical composition of non-sea salt ions and neutralizing rapacity of $NH_4^+,\;nss-Ca^{2+}$, and $nss-K^+$ between rain and snow could explain the acidity difference of rain and snow. Snow affected that winter precipitation could be less acidic due to its higher neutralizing rapacity.