• Title/Summary/Keyword: 임프린트

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Room Temperature Imprint Lithography for Surface Patterning of Al Foils and Plates (알루미늄 박 및 플레이트 표면 미세 패터닝을 위한 상온 임프린팅 기술)

  • Tae Wan Park;Seungmin Kim;Eun Bin Kang;Woon Ik Park
    • Journal of the Microelectronics and Packaging Society
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    • v.30 no.2
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    • pp.65-70
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    • 2023

  • Nanoimprint lithography (NIL) has attracted much attention due to its process simplicity, excellent patternability, process scalability, high productivity, and low processing cost for pattern formation. However, the pattern size that can be implemented on metal materials through conventional NIL technologies is generally limited to the micro level. Here, we introduce a novel hard imprint lithography method, extreme-pressure imprint lithography (EPIL), for the direct nano-to-microscale pattern formation on the surfaces of metal substrates with various thicknesses. The EPIL process allows reliable nanoscopic patterning on diverse surfaces, such as polymers, metals, and ceramics, without the use of ultraviolet (UV) light, laser, imprint resist, or electrical pulse. Micro/nano molds fabricated by laser micromachining and conventional photolithography are utilized for the nanopatterning of Al substrates through precise plastic deformation by applying high load or pressure at room temperature. We demonstrate micro/nanoscale pattern formation on the Al substrates with various thicknesses from 20 ㎛ to 100 mm. Moreover, we also show how to obtain controllable pattern structures on the surface of metallic materials via the versatile EPIL technique. We expect that this imprint lithography-based new approach will be applied to other emerging nanofabrication methods for various device applications with complex geometries on the surface of metallic materials.

  • https://doi.org/10.6117/kmeps.2023.30.2.065 인용 PDF

Polymer Optical Microring Resonator Using Nanoimprint Technique (나노 임프린트 기술을 이용한 폴리머 링 광공진기)

  • Kim, Do-Hwan;Im, Jung-Gyu;Lee, Sang-Shin;Ahn, Seh-Won;Lee, Ki-Dong
    • Korean Journal of Optics and Photonics
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    • v.16 no.4
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    • pp.384-391
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    • 2005

  • A polymer optical microring resonator, which is laterally coupled to a straight bus waveguide, has been proposed and demonstrated using a nanoimprint technique. The propagation loss of the ring waveguide and the optical power coupling between the ring and bus waveguides was calculated by using a beam propagation method, then the dependence of the device performance on them was investigated using a transfer matrix method. We have especially introduced an imprint stamp incorporating a smoothing buffer layer made of a silicon nitride thin film. This layer played an efficient role in improving the sidewall roughness of the waveguide pattern engraved on the stamp and thus reducing the scattering loss. As a result the overall Q factor of the resonator was greatly increased. Also it reduced the gap between the ring and bus waveguides effectively to enhance the coupling between them, without relying on the direct writing method based on an e-beam writer. As for the achieved device performance at the wavelength of 1550 nm, the quality factor, the extinction ratio, and the free spectral range were ~103800, ~11 dB, and 1.16 m, respectively.

  • https://doi.org/10.3807/KJOP.2005.16.4.384 인용 PDF KSCI

유럽과 중국의 디지털카메라 시장동향

  • 한국광학기기협회
    • The Optical Journal
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    • v.15 no.2 s.84
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    • pp.32-35
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    • 2003

  • 시장조사 및 컨설턴트기관인 임포트 렌즈사(미국)와 GSM(일본)은 지난 2002년 12월 10일 동경 신쥬꾸 게이요 프라자호텔에서 `디지털 이미징 컨퍼런스 2002`를 개최했다. 임포트 렌즈사로부터 유럽과 세계시장의 최종 소비자들에 대한 조사결과의 분석을 토대로한 디지털 포토 프린트 시장이나 디지털 이미징 기계에 대한 시장동향이 보고되었다. 또한 GSM사로부터는 최근 큰 발전에 이어 새로운 대규모 시장으로서 기대되는 중국의 디지털 이미징 시장에 대한 최

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Fabrication of Moth-Eye Pattern on a Lens Using Nano Imprint lithography

  • Bae, Byeong-Ju;Hong, Seong-Hun;Hong, Eun-Ju;Lee, Heon
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2008.11a
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    • pp.128-128
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    • 2008

  • 본 연구에서는 나노 임프린트 리소그래피 래피 공정과 PVA(Poly-Vinyl-Alcohol), PDMS(Poly-Dimethyl-Siloxane) template 등의 flexible template를 사용하여 평면 기판 뿐만 아니라 곡면 렌즈 위에 moth-eye 구조를 성공적으로 형성시켰으며 처리 되지 않은 렌즈에 비해 투과율이 향상되는 것을 확인하였다.

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