• Title/Summary/Keyword: 일축자장중 열처리

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Effect of Annealing on the Magnetic Anisotropy of Amorphous $Co_{89}Nb{8.5}Zr{2.5}$Thin Films ($Co_{89}Nb{8.5}Zr{2.5}$ 비정질 박막의 이방성에 미치는 열처리 효과)

  • 김현식;민복기;송재성;오영우
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.6
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    • pp.486-492
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    • 1998
  • The amorphous Co-based magnetic films have a large saturation flux density, a low coercive force, and a zero magnetostriction constant. Therefore, they have been studied for application to magnetic recoding heads and micro magnetic devices. However, it was found that the magnetic anisotropy was changed for each film fabrication processes. In this study, we investigated how to control the anisotropy of sputtered amorphous $Co_{89}Nb{8.5}Zr{2.5}$ films. After deposition, the rotational field annealing ant the uniaxial field annealing were performed under the magnetic field of 1.5 kOe. the annealing was done at the temperature range from 400 to $600^{\circ}C$ for one hour. As-deposited amorphous $Co_{89}Nb{8.5}Zr{2.5}$ thin film had saturation magnetization ($4\piM_5$) of 0.8 T, coercive force($_IH_C$) of 1.5 Oe, and anisotropy field($H_k$) of 11 Oe. The amorphous $Co_{89}Nb{8.5}Zr{2.5}$ thin films annealed by rotational field annealing at $500^{\circ}C$ for one hour was found to be isotropy, and $4\piM_5$ of 0.9 T was obtained from these films, Also, the magnetic anisotropy of as-deposited films could be controlled by uniaxial field annealing at $400^{\circ}C$ for one hour. Anisotropy field($H_k$) of 17 Oe and $4\piM_5$ of 1.0 T were obtained by this method.

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Magnetic Properties of FeZrBAg Soft Magnetic Thin Films with High Permeability and High Magnetization (고투자율, 고포화자화 FeZrBAg 연자성 박막의 자기적 특성)

  • 민복기;김현식;송재성
    • Journal of the Korean Magnetics Society
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    • v.9 no.6
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    • pp.285-290
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    • 1999
  • The magnetic properties of sputtered amorphous $Fe_{86.7}Zr_{3.3}B_4Ag_6$ thin films, which contains an additional insoluble element Ag, have been investigated as a function of uniaxal field annealing temperature. The amorphous $Fe_{86.7}Zr_{3.3}B_4Ag_6$ thin films produced by relatively low temperature annealing at 40$0^{\circ}C$ for 1 hour was found to have very high permeability of 7800 at 50 MHz, 0.2 mOe, high magnetization of 1.7 T, low coercivity of 1.0 Oe and very low core loss of 1.4 W/cc at 1 MHz, 0.1 T, respectively. It is notable that the permeability and core loss values for various kinds of the soft magnetic thin films reported up to now. The reason for the appearance for the good soft magnetic properties is presumably due to the homogeneous formation of very fine bcc $\alpha$-Fe clusters with the size in the amorphous $Fe_{86.7}Zr_{3.3}B_4Ag_6$ thin films matrix, which can be deduced from the XRD results.

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