• The Optical Journal
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• v.7 no.5 s.39
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• pp.44-52
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• 1995

• Journal of the Microelectronics and Packaging Society
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• v.3 no.2
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• pp.17-26
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• 1996

• Proceedings of the Korean Nuclear Society Conference
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• 2002.10a
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• pp.72.1-72
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• 2002

• Proceedings of the Korean Vacuum Society Conference
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• 2001.07a
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• pp.129-129
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• 2001

• Proceedings of the Korean Ceranic Society Conference
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• 2003.10a
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• pp.23-23
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• 2003

• Proceedings of the Korean Magnestics Society Conference
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• 1998.10a
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• pp.72-73
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• 1998

• 한국전기화학회:학술대회논문집
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• 1999.04a
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• pp.53-53
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• 1999

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.1366-1367
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• 2008

구형 집속 빔 핵융합 장치에서 발생되는 중성자 생성률은 이온전류의 크기에 크게 의존한다. 본 논문에서는 이온전류의 크기를 증가시키기 위해 구조 설계에 주로 이용되는 다구찌 실험계획법을 이용하여 최적의 설계 조건을 계산하였다. 최적화를 위해 그리드 음극 형상의 결정인자 및 압력을 설계 변수로 선택하였고, 설계변수가 이온전류의 크기에 미치는 영향력을 분석하여 최적의 조건을 도출하였으며, 예측된 최적 조건 변수값을 적용하여 효과를 검증하였다. 최적 모델로부터 더 큰 이온전류를 얻을 수 있었으며, 이는 더 깊은 포텐셜 우물에서 측정되었다.

• Transactions of the Korean Society of Mechanical Engineers
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• v.14 no.3
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• pp.747-754
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• 1990

Since Ion sputter machining can perform removing processing in atom or molecule units in vacuum state, it has the merit that high precision processing is possible. In this study, therefore, the effect of incidence ion beam is certified to processing amount and surface roughness when longtimed processing is applied. As a result, processing amount is made almost constant with time and the best processing condition is achieved when the incidencial angle of ion is 55.deg.. In addition, processing time for the good surface roughness is different respectively to the quality of material and longtimed processing has some defect for achieving good surface roughness.

• Korean Journal of Optics and Photonics
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• v.4 no.3
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• pp.260-265
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• 1993

An in-situ stress measurement interferometer is constructed and used to measure the intrinsic stress in Ti$O_2$ thin films during their growth by ion-assisted deposition. It is found that the stress increases with the momentum transferred by the ion beam to the growing film and is fairly well agreed with Windischmann's model. The variation of the stress with thickness is qualitatively explained in terms of the balance between the compressive stress produced by the ion beam and the surface diffusion determined by the surface temperature.