• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.8
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• pp.863-867
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• 2014

In this study, an acoustic emission (AE) sensor was used for measuring the abrasive and molecular-scale phenomena in chemical mechanical polishing (CMP). An AE sensor is a transducer that converts a mechanical wave into an electrical signal, and is capable of acquiring high-level frequencies from materials. Therefore, an AE sensor was installed in the CMP equipment and the signals were measured simultaneously during the polishing process. In this study, an AE monitoring system was developed for investigating the sensitivity of the AE signal to (a) the variations in the material properties of the pad, slurry, and wafer and (b) the change in conditions during the CMP process. This system was adapted to Oxide and Cu CMP processes. AE signal parameters including AE raw frequency, FFT, and amplitude were analyzed for understanding the abrasive and molecular-level phenomena in the CMP process. Finally, we verified that AE sensors with different bandwidths could function in complementary ways during CMP process monitoring.

• Proceedings of the Korean Society of Computer Information Conference
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• 2018.07a
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• pp.51-52
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• 2018

화력발전용 순환유동층 보일러는 환경오염의 주요인인 질소산화물(NOx)과 황산화물(SOx)의 배출량이 적은 친환경 화력발전용 보일러로 화력발전 업계에서 각광받고 있는 추세이다. 그러나 순환유동층 보일러의 연료인 유동매체는 미분탄과 같이 작지만 단단한 고체이므로 유동매체의 타격으로 인해 워터월(waterwall) 튜브의 마모는 물론 누설까지 야기할 수 있다. 순환유동층 보일러 튜브에서 누설된 증기는 보일러 내부에 클링커(Clinker)를 발생시키고 이는 순환유동층 보일러 튜브 표면에 응고되어 열전도율을 감소시킬 뿐만 아니라 보일러 운전정지의 원인이 된다. 따라서 본 논문에서는 음향방출 센서를 이용하여 화력발전용 순환유동층 보일러 튜브의 누설 위치를 추정하는 방법을 제안한다. 제안 방법에서는 매질의 분자단위 이동에 의해 발생되는 탄성파를 감지할 수 있는 음향방출 센서를 이용하고, 보일러 워터월 튜브의 멤브레인 용접부와 비용접부(seamless)의 감쇠율을 고려한 위치별 센서 감도 추정 알고리즘을 통해 워터월 튜브의 위치별 진폭 크기를 히트맵으로 표현할 수 있다.

• Composites Research
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• v.17 no.4
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• pp.61-67
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• 2004

Nondestructive damage sensitivity on single-basalt fiber/epoxy composites was evaluated by micromechanical technique and acoustic emission (AE). Piezoelectric lead-zirconate-titanate (PZT), polyvinylidene fluoride (PVDF) and poly(vinylidene fluoride-trifluoroethylene) (P(VDF-TrFE)) copolymer were used as AE sensor, respectively. In single-fiber composite, the damage sensing with different sensor types were compared to each other. Piezoelectric PVDF polymer sensor was embedded in and attached on the composite, whereas PZT sensor was only attached on the surface of specimen. In case of embedded polymer sensors, responding sensitivity was higher than that of the attached case. It can be due to full constraint inside specimen to transfer elastic wave coming from micro-deformation. For both the attached and the embedded cases, the sensitivity of P(VDF-TrFE) sensor was almost same as that of conventional PVDF sensor.

• Journal of the Korea Convergence Society
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• v.11 no.11
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• pp.249-255
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• 2020

This study developed the health monitoring method of press process using the acoustic emission (AE) sensor and high-pass filter. Also, the AE parameters such as ring-down count and peak amplitude are used. Based on this AE signal, the AE parameters were acquired and was utilized to detect the crack of the specimen. Since the defect detection is difficult due to noise and low magnitude of signal, the signal noise and press operation frequency were checked through the Short Time Fourier Transform(STFT) and damped. High-pass Filtering data was applied to AE parameters to select effective parameters. By using this signal processing techniques, the proposed AE parameters could improve the performance of defect detection in the press process.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.50.2-50.2
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• 2011

자동차용 CNG 연료탱크의 복합재료 중앙부 표면에 150 kHz 공진형 음향방출센서를 부착하고, 물을 매질로 하여 용기의 내압을 단계적으로 상승시켜 가면서 각 단계에서 일정시간 압력을 유지시키고 그 때 발생하는 음향방출신호를 획득하였다. 이 때 획득한 음향방출신호의 amplitude, count, duration 및 risetime 등과 같은 음향방출 변수들의 분포를 살펴본 결과 복합재료 압력용기의 손상메커니즘을 추정하고 손상정도를 평가하는데 유용하였다.

• Proceedings of the Korean Society of Computer Information Conference
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• 2018.07a
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• pp.31-32
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• 2018

상수도배관에 누수발생시 주변의 다른 주요 기반시설들에 피해를 줄 수 있어 상수도배관의 누수감지 시스템 개발이 필요하다. 본 논문에서는 상수도배관의 누수감지를 위해 음향방출 센서와 기계학습 알고리즘을 적용한 누수검출 알고리즘을 제안하였으며 모의실험결과 누수 전/후의 상태를 100% 검출하였다.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.13 no.4
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• pp.68-74
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• 1999

Ths paper does acoustic detection of partial discharge using acoustic sensor in polymer. Time sequential rreasurement of acoustic emission characteristic obtained acoustic sensor deal with statistics process. and 5 characteristic quantities were introduced into this paper. Resulting fann analysis of $\psi$-AEA-n pattern (phase-acoustic emission amplitude-pulse number) and AE quantities ,it can know useful statistics quantities that AE average inception amplitude TEX>$(\overline{AEA_{inc}})$ and AE average maximum amplitude TEX>$(\overline{AEA_{max}})$ make diagnosis of the middle stage of deterioration, AE pulse number and AE average maximum phase $(\overline{\theta{max}})$ make diagnosis of the last stage of deterioration. it obtained that these AE quantities are useful for dias,mosis deterioration form experiment results.esults.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.9
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• pp.1131-1136
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• 2011

This study is performed on the acoustic emission parameters involved in a burst test for a CNG-vehicle fuel tank. A resonant AE sensor with a central frequency of 150 kHz was attached on the composite materials in the center of the fuel tank. The analysis of AE parameters such as hit, amplitude, count, duration, risetime, and signal strength during load holding was performed. The total count and total signal strength are effective tools for the damage evaluation of a CNG fuel tank.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 1997.11a
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• pp.32-32
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• 1997

복합재 연소관의 구조적 건전성 평가 방법을 개발하기 위하여 표준 평가용 시편의 수압 시험 중, 연소관으로부터 방출되는 음향방출(acoustic emission: AE) 신호를 측정 장비를 이용하여 신호 처리함으로써 시편이 파괴되기 전, 대략적인 시편의 파열 위치 및 일정 압력 유지상태에서 hit rate 양상에 의한 건전성 평가 방법을 제시하였다. 데이터의 분석 기법 향상을 위하여 음향방출 데이터를 시간 및 센서별로 분류하는 프로그램을 개발하였다. 수압 시험을 낮은 압력 단계부터 높은 압력 단계까지 일정 압력 유지 상태(load-hold)에서 발생한 hit 수와 1분간 유지한 후 발생되는 hit rate(hit/sec)의 값의 크고 작음이 복합재 압력 용기의 결함수의 증감으로 나타났으며, 이로부터 복합재 압력 용기의 파열 압력과의 상관관계 및 건전성을 예측할 수 있었다. 복합재 압력 용기의 파열 위치는 energy rate(energy/sec) 측정값을 분석하여 예측하였으며, 파열 압력의 30∼50%에서 가능하였다.

• Journal of the Korean Society for Nondestructive Testing
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• v.30 no.1
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• pp.1-5
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• 2010

Acoustic emission(AE) has emerged as a powerful nondestructive tool to detect or monitor preexisting defects and leaks in the vessel structures. A Bragg grating based acoustic emission sensor system is developed. Various type of fiber Bragg grating sensor including the variable length of sensing part was fabricated and prototype sensor system was tested by using PZT pulser and pencil lead break sources. Two types of sensor attachment were used. First, the fiber Bragg grating sensor was attached fully to the surface using bonding agent. Second one is that one part of fiber was attached to the surface partly by bonding and the other part of fiber will be act as a cantilever. That is, the resonant frequency of the fiber Bragg grating sensor will depend on the length of sensing part. The final goal of the sensor system is to provide on-line monitoring of cracks or leaks in reactor vessel head penetration of nuclear power plants.