• Title/Summary/Keyword: 음이온 분포

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유도 결합 산소 플라즈마에서 고조화파 분석법을 이용한 음이온 공간 분포 측정

  • Hwang, Hye-Ju;Kim, Yu-Sin;Kim, Yeong-Cheol;Park, Il-Seo;Jeong, Jin-Uk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.562-562
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    • 2013
  • 산소 플라즈마는 음이온을 발생시키는 음전성 플라즈마로서 감광제 세정이나 금속, 폴리실리콘 등의 식각을 위해 할로겐 가스와 혼합하여 반도체나 디스플레이 공정에 광범위하게 사용되고 있다. 산소 플라즈마는 아르곤 플라즈마와 그 특성이 상이하고, 다량의 음이온이 국부적으로 만들어지므로 음이온의 공간분포 진단이 중요하다. 본 연구에서는 평판형 부유형 탐침에 고조화파 분석법을 적용하여 양이온의 밀도를 구하고, 직류 차단 커패시터를 제거하여 접지전위에서 전자 전류 측정을 통하여 위치에 따른 전자의 상대적인 공간 분포를 얻었다. 이러한 방법으로 측정된 양이온과 전자의 공간 분포로부터 음이온의 공간 분포를 구할 수 있었다. 가스 압력, 산소 첨가량, 인가 전력 등 여러 조건에서 측정된 음이온의 분포는 이론적인 경향성과 유사함을 확인할 수 있었다.

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Distribution of Negative Air Ion Concentration in Urban Neighborhood Park by Distance to Road - A Case of Yangjae Citizen's Forest, Seoul - (도로와의 거리에 따른 도시 근린공원의 음이온 농도 분포차이 - 서울시 양재 시민의 숲을 대상으로 -)

  • Lee, Hyunjin;Lee, Dong Kun;Kim, Bomi
    • Journal of Environmental Impact Assessment
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    • v.27 no.2
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    • pp.152-169
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    • 2018
  • The purpose of this study was to analyze the effect of adjacentroads on the concentration of negative air ions in urban neighborhood park. The measured factors were negative air ion concentration, positive airion concentration, airtemperature,relative humidity, wind speed, green formation volume factor (GVZ) and distance from highway and general road. The mean negative air ion concentration was $206ea/cm^3$ and the positive air ion concentration was $416ea/cm^3$ in the influence zone of roads. On the other hand, the mean negative air ion was $339ea/cm^3$ and the positive air ion was $229ea/cm^3$ in the unaffected zone of roads, which are inner areas of the park. The difference of the negative air ion concentration according to the influence of the road was statistically significant. The negative air ion concentration model was presented by integrating the correlation analysis with the influence factors, and the explanatory power of the model was increased by adding the influence factor of the road.

Daily Variation and Distribution of Anions and Cations in the Aerosols of Jeju Island (제주지역의 대기질 중의 음이온 및 양이온의 분포와 변이성)

  • Sin, Bangsik;Lee, Hyung H.;Lee, Keun Kwang
    • Journal of Naturopathy
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    • v.7 no.1
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    • pp.10-19
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    • 2018
  • The purpose of this study was to investigate the distribution and variation of the anion and cation number in the aerosols at 16 sites in the Jeju area. The average value of anion counts was raged from 449.35 ions/cm3 at Jeju city to 3471.25 ions/cm3 in the Chunjiyeon falls. In order, the lowest Jeju-si < hamdeok < 1100 m < farm < gyorae A < saryoni < jeolmul < gyorae B < geomunoreum < halla forest < hallasan garden < seongpanak < dongbaeksan < jeongbang < wonyang, respectively. There was statistically significant difference between the anion counts of the measured values in the order of elevation. The mean value of cation measurements was from 90 ions/cm3 for Cheonjiyeon, to 729.8 ions/cm3 for Halla forest garden, which showed the highest value. In order, the lowest 729.8 ions/cm3 of Cheonjiyeon < 1100 m < dongbaeksan < Jeju-si < saryoni < wonyang < seongpanak < hamdeok < jeongbang < gyorae B < jeolmul < Farm < gyorae A < halla forest < geomun and < halla garden, respectively. The geographically low area and the high area were measured low and difference in the two ions. The differences between the content of the anion, cation and/or altitude were significant each other in the variance analysis. The correlation between the anion and cation content and/or altitude was statistically significant (r=.396, p<.001). In conclusion, the result of showing the temporal distribution and variation of the anion and cation content in the aerosols in Jeju island forests provides important information for healthcare.

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유도 결합 플라즈마에서 웨이퍼 표면의 부유 전위 공간분포 측정

  • Jang, Ae-Seon;Park, Ji-Hwan;Kim, Jin-Yong;Kim, Yu-Sin;Jeong, Jin-Uk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.142.1-142.1
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    • 2015
  • 웨이퍼 표면에서 부유 전위 분포를 측정하기 위해서 웨이퍼형 탐침 배열을 제작하고 측정회로를 만들었다. 아르곤 플라즈마의 경우 낮은 압력에서 부유 전위의 분포는 중심에서 최대값을 갖는 포물선 형태로 나타났다. 하지만 음이온 가스의 압력이 증가함에 따라 부유 전위의 분포가 현저하게 변화했다. 가스 압력이 높아짐에 따라 비국부적이었던 플라즈마의 방전 특성이 국부적으로 변화했기 때문이다. 이외에도 음이온도 부유 전위의 분포를 변화시킬 수 있음을 확인하였다. 이 연구는 반도체 제조 공정에서 웨이퍼 표면에서 전하 축적에 의한 손상을 이해하는데 도움이 될 것으로 기대된다.

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Aqueous Chemistry of Molybdenum (몰리브덴의 용액화학)

  • Lee, Man Seung;Choi, Seung Hoon
    • Resources Recycling
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    • v.27 no.4
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    • pp.44-49
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    • 2018
  • $MoO{_4}^{2-}$ is the stable chemical species of Mo(VI) in alkaline solution. In the pH range of 2 to 6, condensation polymerization between $MoO{_4}^{2-}$ and hydrogen ion results in the formation of various polyanions of Mo(VI). Polycations of Mo(VI) begin to form when solution pH is less than 2. As the concentration of inorganic acid increases, polycations of Mo(VI) can react with the anion of the inorganic acid, resulting in the formation of heteranions of Mo(VI). The distribution of Mo(VI) species at pH < 6 depends on the concentration of Mo(V) and inorganic acid. In order to analyze the solvent extraction and ion exchange data on Mo(VI) from concentrated inorganic acid solution, it is necessary to elucidate the nature of Mo(VI) complexes.

Evaluation of Commercial Anion Exchange Membrane for the application to Water Electrolysis (수전해 시스템에 적용하기 위한 상용 음이온교환막의 특성평가)

  • Jun Ho, Park;Kwang Seop, Im;Sang Yong, Nam
    • Membrane Journal
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    • v.32 no.6
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    • pp.496-513
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    • 2022
  • In this study, we sought to verify the applicability of anion exchange membrane water electrolysis system using FAA-3-50, Neosepta-ASE, Sustainion grade T, and Fujifilm type 10, which are commercial anion exchange membranes. The morphology of the commercial membranes and the elements on the surface were analyzed using SEM/EDX to confirm the distribution of functional groups included in the commercial membranes. In addition, mechanical strength and decomposition temperature were measured using UTM and TGA to check whether the driving conditions of the water electrolyte were satisfied. The ion exchange capacity and ion conductivity were measured to understand the performance of anion exchange membranes, and the alkaline resistance of each commercial membrane was checked and durability test was performed because they were driven in an alkaline environment. Finally, a membrane-electrode assembly was manufactured and a water electrolysis single cell test was performed to confirm cell performance at 60℃, 70℃, and 80℃. The long-term cell test was measured 20 cycles at other temperatures to compare water electrolysis performance.

Variation and Distribution of Anions and Cations in the Aerosols of Gyorae Forests in Jeju Island (제주도 교래휴양림 지역의 대기질의 음이온 및 양이온의 분포와 변이성)

  • Sin, Bangsik;Im, Dongho;Lee, Keun Kwang
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.19 no.7
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    • pp.384-395
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    • 2018
  • This study was conducted to investigate the distribution and variation of the anion and cation number of aerosols in the A and B regions of Gyorae forests. Ions were measured using an ion number meter between 28 June and 13 July 2017. The total average number of anions and cations were $735ions/cm^3$ and $459.27ions/cm^3$, respectively, which were measured at five sites in A area at average temperature of $27.81^{\circ}C$, wind speed of 0.28 m/sec, and altitude of 455.7 m. The average number of anions and cations were $780ions/cm^3$ and $379.55ions/cm^3$, respectively, which were measured at all four sites in the B region at average temperature of $27.6^{\circ}C$, humidity of 80%, wind speed of 0.1 m/sec and altitude of 477 m. The number of anions and cations in the A and B regions was $757.5ions/cm^3$ and $419.41ions/cm^3$, respectively. The number of ions was highly variable for each measurement over time. The number of anions remained $275.73ions/cm^3$ higher than that of cations. The variance of the measured values of anions and cations between and within sites A and B was significant (p<.001) and there was a significant positive correlation between regional mean values of anions and cations. In conclusion, the temporal distribution and variation of the ion content in the Gyorae forests provide basic information regarding aerosol compositions and changes.

Separation of Mixtures for Anionic and Nonionic Surfactants by Thin Layer Chromatography (음이온성 및 비이온성 계면활성제 혼합물의 Thin Layer Chromatography에 의한 분리)

  • Kim, Tae-Seong;Lee, Jae-Duk;Yun, Yeo-Gyung
    • Applied Chemistry for Engineering
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    • v.1 no.2
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    • pp.249-255
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    • 1990
  • The conditions for separation and identification of anionic and nonionic surfactants by thin layer chromatography were investigated. Polyoxy alkylene-type nonionic surfactants were identified by the distribution of alkyl chain and alkylene oxide. Various polyoxyethylenated nonyl phenols were easily distinguished by densitometer. Some anionic surfactants were identified by $R_f$ and color, and the mixtures of anionic and nonionic surfactants were separated. Polyoxyethylenated fatty acid was separated into three parts of diester, monoester and polyethylene glycol, respectively, and the mixed ratio was determined by densitomer. All the experiments were carried out in 13-20 minutes, and the length of run was 80mm.

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