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고주파 스퍼터링법으로 증착한 ZnO 박막의 응력 형성

  • 곽상현;이재빈;김형준
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.193-193
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    • 2000
  • 박막 내의 잔류 응력은 막의 기계적 전기적 물성을 변화시키는 등 박막에 많은 영향을 끼치는 것으로 알려져 있다. 이러한 응력은 박막의 증착 공정중 여러 가지 증착 조건에 의해서 변화하게 되는데, 특히 스퍼터링 시스템의 경우에는 증착 압력과 사용하는 가스, 인가되는 전력 등 기본적인 증착조건들에 상당한 영향을 받는다. 이러한 영향은 금속 박막의 경우 상당히 잘 알려져 있다. 또한 반도체 공정에서 금속화 과정중 금속 전극의 단락등을 막기 위해 많은 연구가 진행되어 왔다. 본 논문에서는 고주파 마그네트론 스퍼터링 시스템을 사용하여 산화 아연(ZnO)을 증착하고 여러 공정 변수들에 따른 응력의 변화를 관찰하였다. 실험에서 ZnO 타겟을 사용하였으며, 작동 가스로는 아르곤과 산소를 사용하였다. 증착한 박막들은 모두 압축 응력을 보였으며, 박막의 응력에 가장 큰 영향을 미치는 요소들은 압력, 산소와 아르곤의 비, 기판과 타겟과의 거리 등이었는데, 인가 전력에는 거의 영향을 받지 않았다. 일반적으로 스퍼터링 시스템에서의 압축응력은 atomic peening에 의해서 형성되는데, 박막을 두드리는 높은 에너지의 아르곤이나 산소의 유량과 에너지의 1/2승에 비례하는 것으로 알려져 있다. 그러나 본 시스템에서는 인가 전력을 높여도 응력이 증가하지 않았고, 타겟과의 거리를 줄이면 오히려 응력이 감소함을 보였다. 이는 박막의 응력이 peening 하는 입자의 에너지뿐만이 아니라 증착되는 물질의 증착 속도와도 밀접한 관련이 있음을 보여준다. 즉, 증착속도가 증가하면 peening하는 입자가 끼치는 응력의 효과가 반감되기 때문으로 수식을 통해 증명할 수 있었다.진탄화 처리시간을 변화시켰을 때 화합물층의 생성은 ${\gamma}$'상으로부터 시작되고 $\varepsilon$상은 즉시 ${\gamma}$'상을 소모하면서 생성되어 일정시간이 지난 후 $\varepsilon$상은 안정화되며 질소가스농도가 증가할수록 화합물 층내의 $\varepsilon$상분율은 역시 증가하였다. 한편 CH4 가스농도는 처리되는 강종에 따라 차이를 보이며 적정 CH4 가스농도를 초과시에는 $\varepsilon$상 생성은 억제되고 시멘타이트상이 생성되었다.e에서 발생된 질소 플라즈마를 구성하는 이온들의 종류와 그 구성비율을 연구하였다.여러 가지 응용으로의 가능성을 가지고 있다. 그 예로 plasma processing, plasma wave에 의한 입자 가속, 그리고 가스 레이저 활성 매질 발생 등이 있다. 특히 plasma processing의 경우 helicon plasma는 높은 밀도, 비교적 낮은 자기장, remote operation 등이 가능하다는 점에서 현재 연구가 활발히 진행되고 있다. 상업용으로도 PMT와 Lucas Signatone Corp.에 서 helicon source가 제작되었다. 또한 높은 해리율을 이용하여 저유전 물질인 SiOF의 증착에서 적용되고 있다. 이 외에도 다수의 연구결과들이 발표되었다. 잘 일치하였다.ecursor 분자들이 큰 에너지를 가지고 기판에 유입되어 치밀한 박막이 형성되었기 때문으로 사료된다.을수 있었다.보았다.다.다양한 기능을 가진 신소재 제조에 있다. 또한 경제적인

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Variation in Leaf Characteristics among Hybrids of Jeoktanshim Hibiscus syriacus L (적단심계 무궁화 품종간 교배차대묘의 엽 특성 변이)

  • Cho Yoon-Jin;Chung Hun-Gwan;Kim Sea-Hyun;Chung Dong-Jun;Park Hyung-Soon
    • Korean Journal of Plant Resources
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    • v.19 no.1
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    • pp.150-160
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    • 2006
  • This study was performed to provide basic information of the development and breeding of new cultivars of Hibiscus syriacus L., which have more beautiful and diverse flowers. Morphological characteristics of the leaves and genetic variation of the leaves of two Jeoktanshim-line cultivars, Bulsae and Pyungsung, were crossed each other. The result of the cross between Bulsae and Pyungsung are as follows: Mean leaf length and width were 6.09cm and 3.36cm, respectively. Mean petiole length was 1.08cm, and mean shoulder width and incision depth were 1.50cm and 0.84cm, respectively. Mean leaf base angle was $98.56^{\circ}$. Leaf index and petiole length were the most important components of leaf characteristics. Two groups were clustered in distance level 5.4. The result of the cross between Pyungsung and Bulsae are as follows: Mean leaf length and width were 5.25cm and 3.10cm, respectively. Mean petiole length was 0.87cm, and mean shoulder width and incision depth were 1.50cm and 0.76cm, respectively. Mean leaf base angle was $107.87^{\circ}$, which was the widest among ten cross combinations. Two groups were clustered with seven leaf characteristics in distance level 4.2. Group I included two small groups, and group II included four small groups.

Optimization of a protocol for the production of transgenic lily plants via particle bombardment (유전자총 실험조건 최적화를 통한 형질전환 백합 식물체 생산)

  • Kim, Jong Bo
    • Journal of Plant Biotechnology
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    • v.44 no.1
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    • pp.82-88
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    • 2017
  • Transgenic lily plants have been obtained after particle bombardment, using PDS-1000/He system and scale explants of lilies, followed by PPT (D-L-phosphinothricin) selection. In this study, scales of the lily plants cv. 'red flame' were bombarded with a plasmid containing the bar gene as a selectable marker, and the AtSIZ gene as a gene of interest, showing salt tolerance and drought tolerance respectively, and both being driven by the CaMV 35S promoter. For optimization of a protocol, factors which optimized and showed a high transformation efficiency under following conditions, were considered: a bombardment pressure of 1100 psi, a target distance of 6 cm and $1.0{\mu}m$ of gold particle, and 24-h pre-culture and post-culture on MS medium containing 0.2 M sorbitol and 0.2 M mannitol as osmoticum agents. After bombardment, all the bombarded scales of lily were transferred to MS medium without selective agents, for a week. Subsequently, these bombarded scales were transferred to a selection MS medium containing 10 mg/l PPT, and incubated for a month for further selection, after which they were cultured for another 4-8 weeks with a 4-week subculture regime on the same selection medium. After transferring into hormone-free MS medium, the PPT-resistant scales with shoots were successfully rooted and regenerated into plantlets. PCR analysis revealed that the surviving putatively transformed plantlets indicated the presence of both the bar gene and the AtSIZ gene. In conclusion, when 100 scales of lily cv. Red flame are bombarded, this study produced approximately 17-18 transgenic plantlets with an optimized bombardment protocol. The protocol described here can contribute to the breeding program of lilies.

Analysis of Vasopressin Receptor Type 2(AVPR2) Gene in a Pedigree with Congenital Nehrogenic Diabetes Insipidus : Identification of a Family with R202C Mutation in AVPR2 Gene (신성요붕증 가계에서 바소프레신 V2 수용체(AVPR2) 유전자 분석 : AVPR2 유전자 R202C 돌연변이의 발견)

  • Park June-Dong;Kim Ho-Sung;Kim Hee-Joo;Lee Yoon-Kyung;Kwak Young-Ho;Ha Il-Soo;Cheong Hae-Il;Choi Yong;Park Hye-Won
    • Childhood Kidney Diseases
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    • v.3 no.2
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    • pp.209-216
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    • 1999
  • Purpose : Nephrogenic diabetes insipidus (NDI) is a rare X-linked disorder associated with renal tubule resistance to arginine vasopressin (AVP). The hypothesis that the defect underlying NDI might be a dysfunctional renal AVPR2 has recently been proven by the identification of mutations in the AVPR2 gene in NDT patients. To investigate the association of mutations in th AVPR2 gene with NDI, we analyzed the AVPR2 gene located on the X chromosome. Methods : We have analyzed the AVPR2 gene in a kindred with X-linked NDI. The proband and proband's mother were analyzed by polymerase chain reaction-single strand conformational polymorphism(PCR-SSCP) and DNA sequencing of the AVPR2 gene. We also have used restriction enzyme analysis of genomic PCR product to evaluate the AVPR2 gene. Results : C to T transition at codon 202, predictive of an exchange of tryptophan 202 by cysteine(R202C) in the third extracellular domain was identified. This mutation causes a loss of Hae III site within the gene. Conclusion : We found a R202C missense mutation in the AVPR2 gene causing X-linked NDI, and now direct mutational analysis is available for carrier screening and early diagnosis.

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Response for Lead Block Thickness of Parallel Plate Detector using Dielectric Film (유전체필름을 이용한 평행판검출기의 납 차폐물 두께변화에 대한 반응)

  • Kim Yong-Eun;Cho Moon-June;Kim Jun-Sang;Oh Young-Kee;Kim Jhin-Kee;Shin Kyo-Chul;Kim Jeung-Kee;Jeong Dong-Hyeok;Kim Ki-Hwan
    • Progress in Medical Physics
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    • v.17 no.1
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    • pp.1-5
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    • 2006
  • A parallel plate detector containing PTFE films in FEP film for relative dosimetry was designed to measure the response of detectors to S and 10 MV X-rays from a medical linear accelerator through different thicknesses of lead. The dielectric materials were 100 m thick. The set-up conditions for measurements with this detector were as follows: SSD=100 cm the test detector was at a depth of 5 cm and the reference chamber was at a depth of 10 cm from the phantom surface for 6 and 10 MV X-rays. Lead blocks were designed to cover the irradiated field. They were added to the tray to increase thickness sequentially. We found that the detector response decreased exponentially with the thickness of lead added. The linear attenuation coefficients of the test detector and reference chamber were 0.1414 and 0.541, respectively, for 6 MV X-rays and 0.1358 and 0.5279 for 10 MV X-rays. The test detector response was greater than that of the reference chamber. The response function was calculated from the measured values of the test detector and reference chamber using optimization. These optimized constants for the detector response function were independent of theenergy. As a result of optimizing the response function between detectors, the use of a relative dosimeter was validated, because the response of the test detector was 1% for 6 MV X-rays and 4% for 10 MV X-rays.

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REMOVABLE DENTURE FOR CHILD WITH LOSS OF VERTICAL DIMENSION USING T-SCAN : A CASE REPORT (T-Scan을 이용한 감소된 수직고경을 가진 소아의 가철성 의치 제작)

  • Chung, Yang-Seok;Lee, Chang-Seop;Lee, Sang-Ho;Lee, Nam-Young
    • Journal of the korean academy of Pediatric Dentistry
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    • v.33 no.1
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    • pp.103-108
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    • 2006
  • Loss of permanent molar by multiple dental caries traumatic influence or hereditable disease can cause loss of the vertical dimension in children. However traditionally reconstructive treatment to restore vertical dimension in children has been provided by using simple methods such as celluloid crown form and stainless steel crown. The presented case report describes an alternative treatment modality of vertical dimension by using removalbe appliance This appliance is made with average of facial height and maximal clenching force by using T-scan.

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Mutation Frequency of Tradescantia (BNL Clone 4430) Stamen Hairs Exposed to Low Dose of Gamma Ray in the KAERI ${\gamma}$-Field (저선량율의 감마선 조사에 의한 자주 달개비의 체세포 돌연변이 출현에 관한 연구)

  • Shin Han Kwon;Young Il Lee;Kyu Hoi Chung;Jeung Haing Oh
    • Nuclear Engineering and Technology
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    • v.13 no.3
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    • pp.161-167
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    • 1981
  • For determination of mutation frequency induced by chronic irradiation of low dose gamma rays, Tradescarrfia clone 4430 was exposed to Co-60 ${\gamma}$ rays with different exposure rates from 3.6mR/day to 182R/day in or out of the Gamma Field at Kumkok Experiment Farm of KAERI. Somatic mutations based on pink mutant events of the stamen hair cells were clearly observed by the treatment. The pink mutant events were increased proportionally with increasing exposure rates of gamma ray except for relatively high dose rates of 105 R/day and 182 R/day, indicating saturation effect of mutation. The somatic pink mutations could be fairly detectable even in the low dose rate of 3.6mR/day. Therefore, this stamen hair system of Tradescantia clone 4430 seemed to be an reasonable test system for detecting mutability of low level irradiation. These results imply that artificial mutation induction in the fruit and ornamental trees could be expected in the ${\gamma}$-field.

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Species Identification and Genetic Structure of Octopus minor from Korea and China on the Basis of Partial Sequences of Mitochondrial Cytochrome Oxidase I (미토콘드리아 Cytochrome Oxidase I 유전자 마커에 의한 한국.중국 낙지의 종판별 및 집단분석)

  • Kang, Jung-Ha;Yu, Ki-Hwan;Kim, Sang-Kyu;Park, Jung-Yeon;Kim, Bong-Seok;An, Chel-Min
    • The Korean Journal of Malacology
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    • v.26 no.4
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    • pp.285-290
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    • 2010
  • The nucleotide sequences of the mitochondrial cytochrome oxidase subunit 1 (CO1) gene of octopus groups collected from Muan, Taean, Yesu, Jeju in Korea and Youngsung, Daeryen in China were analyzed for the identification of species and populations. Six haplotypes were identified from the analyzed 60 individuals. All of the individuals (N = 10) from Jeju showed the A haplotype which was not observed from other groups, and could be classified as a distinct group. The analyzed groups could form two separate clade in MEGA4 analysis. The individuals from Muan, Taean, Yesu in Korea and Daeryen in China form a clase and the others from Jeju in Korea and Youngsung in China formed the other clade. The analysis of relationship among the groups showed the same results. Individuals belong to the group A (Muan, Taean, Yesu and Daeryen) showed closer relationship than individuals belong to the group B (Jeju and Youngsung). Although the CO1 universal primers used in this study was useful as a marker for species identification among Octopus, analysis of population was limited because of few variations in the partial sequences of CO1 analyzed in this study. However, it was possible to show the limited gene flow among the groups which is resulted from the spatial separation and differences in their habitats.

가사활동에 따른 피로도 감소를 위한 입좌식 부엌가구의 개발에 관한 연구

  • 김철홍;최재순;성영애;김태광
    • Proceedings of the ESK Conference
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    • 1997.10a
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    • pp.142-151
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    • 1997
  • 본 연구는 주부들의 주활동공간인 부엌가구와 공간의 설계에 있어사용하기 편리하며 가사활동에 따 른 피로를 경감시키고 요통과 같은 주부직업병을 예방할 수 있는 부엌가구와 공간의 개발에 그 목적을 두었다. 연구는 먼저 수도권의 32평형 규모의 아파트150가구를 대상으로 설문조사를 실시하였으며, 만 24시간동안의 실제 가사활동을 Video로 촬영하여 동작분석을 실시하였다. 그 결과 주부들은 수납의 용 이성과 공간의 크기, 작업대의 높이 등을 가장 많은 개선사항으로 지적하였으며, 절반이상의 주부들이 앉은 자세에서 작업이 이루어졌으면 좋겠다고 응답하였다. 또한 동작분석 결과 작업의 70%이상이 개수 대를 중심으로 조리대와 가열대 주변의 한정된 공간에서정적으로 선 자세에서이루어지는 것으로 파악 되었다. 이러한 선 자세에서의 작업에 따른 피로도를 감소시키기 위하여 입좌식 의자를 도입하였으며, 개수대를 씽크대의 'ㄱ'자 코너에 위치하여 주방활동시의 이동거리를 단축하고자 하였다. 피로도의 경감 을 측정하기 위하여 입좌식 의자를 도입한 개선된 씽크대와 기존의 입식씽크대에서 가사활동시 요구되는 주부들의 에너지 대사량을 비교하기 위하여 심장박동수와 산소호흡량을 측정하였다. 실험결과에 따르면 주방에 입좌식의자를 도입한 경우가 가사활동에 요구되는 에너지 소모량이 심장박동수와 산소호흡량의 기준에서 각각 평균적으로 30%와 57.5% 이상이 감소하는 것으로 파악되어 이러한 부엌가구의 도입으로 주부들의 가사활동에따른 피로도가 절반 가까이 감소될 수 있음을 니타내었다. 또한 부엌가구의 재배치 에따른 가사활동시 이동거리가 평균적으로5.5%이상이 감소하는 것으로 나타났다. 본 연구결과를 주방설 계에 적용할 경우 가사활동의 효율성과 편리성이 향샹됨은 물론 가사활동에따른 피로도를 경감 시키고 요통 등의 주부직업병을 예방할 수 있을 것으로 기대된다.1일 1회씩 4회 투여한 군에서도 암수에 상관없이 전 농도 군에서 염색체이상을 나타내지 않아 유전독성을 나타내지 않음을 관찰하였다. 특히 vitamin C와 E의 병용투여는 상승적으로 적용하여 간세포손상을 더욱 억제시킴을 알 수 있었다.mance and on TFP(Total Factor Productivity) growth which is a pure measure of firm performance. To utilize the advantage of panel data, FEM(Fixed Effect Model) and REM(Random Effect Model) were used. The empirical result shows that the entropy index as a measurement of inter-business relatedness is not significant but technological relatedness index is significant. OLS estimates on pooled data were considerably different from FEM or REM estimates on panel data. By introducing interaction effect among the three variables for business portfolio properties, we obtained three findings. First, only VI (Vertical integration) has a significant positive correlation with ROS. Second, when using TFP growth as an dependent variable, both TR(Technological Relatedness) and f[ are signif

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Application of Dielectric Sensor for Soil Moisture Measurement (토양 수분 측정을 위한 유전율식 쎈서 연구)

  • Oh, Yong-Taeg;Oh, Dong-Shig;Song, Kwan-Cheol;Shin, Jae-Sung;Im, Jung-Nam
    • Korean Journal of Soil Science and Fertilizer
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    • v.31 no.2
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    • pp.85-94
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    • 1998
  • Due to relatively high permittivity of water in soils, we placed the soil condenser into soils to measure the soil moisture content. The soil condenser was made with two insulated iron sticks. The capacitance of the soil condenser was determined by the pulse period from RC type oscillation circuit and the highest voltage output accepting 10MHz pulse. After zero point adjustment, the measured relative capacitance percentage (RCS) to the standard condenser obtained by the oscillation circuit almost linearly correlated with the end depth of the sensor submerged in water. The RC type oscillation was disturbed by many sensor installed in a close distance in one place, presumably resulting in that the sensor sticks played as a interfering antennas generating or accepting electron waves from them. The temperature dependance of the output from the sensors could be corrected through experimentally determined revision function. Although lineal correlation was found between soil moisture and RCS, users should derive their own correlation function for every sensor to measure soil moisture, because the outputs were influenced by the installation depth and layout in the soil. The voltage type sensor responded inversely with soil moisture content and so was not suitable to the accurate measurement of soil moisture, but allows high economic benefit in various application such as simplified measurement of soil moisture and irrigation line control because of its low component count. The voltage type moisture sensor could be reinforced by relay controlling circuit to open and to close the solenoid valves respectively at optimal limits of the least and the most soil moisture according to user's adjustment.

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