• Title/Summary/Keyword: 원환형 초음파 모터

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Modeling of Ring-type Ultrasonic Motor Using Atila (Atila를 이용한 원환형 초음파 모터의 설계)

  • 이동균;조봉희;김현재;한득영;윤석진
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.11a
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    • pp.184-187
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    • 2000
  • In this paper, a ring-type ultrasonic motor divided into 12 sectors was modeled by Atila program using finite element method(FEM). The stator consists of a piezoelectric ceramic poled alternately in opposite directions and elastic material. And the stator dimension was $\Phi$40 (outer diameter), $\Phi$ 30(inner diameter), 0.5mm(ceramic thickness) and 3mm(elastic material thickness). As a simulation result, 6$\lambda$ displacement occurred at approximately 52kHz, and this resonance frequency is similar to calculated result 57kHz. The position of maximum displacement was at the edge of stator.

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Design of Micro-meter Position Driver for X-Y Stage Using Linear Ultrasonic Motor (리니어 초음파 모터를 이용한 X-Y stage의 마이크로 미터급 위치 구동회로 설계)

  • Kim, Jeong-Do;Hong, Chul-Ho;Kim, Dong-Jin;Ham, Yu-Kyung
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.6 no.2
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    • pp.165-171
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    • 2005
  • The ultrasonic piezo motor is a new type motor that has an excellent performance and many useful features that electromagnetic motors do not have. But, it suffers from severe system non-linearities and parameter variations especially during speed control. Therefore, it is difficult to accomplish satisfactory control performance by using the conventional PID controller. In this paper, to achieve the precise control for linear type ultrasonic motor was analyzed as a function of response time and change with a driving time. Also, we propose controller that combines STEP controller and PD controller that have error of ${\mu}m$ about liner type ultrasonic motor.

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