• Journal of the Microelectronics and Packaging Society
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• v.9 no.2
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• pp.49-54
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• 2002

Cobalt silcides thin films were prepared on Poly-Si/$SiO_2$/Si substrates by Co metal depostion using E-beam evaporation method and rapid thermal annealing for the application of inkjet printing heater. The crystal phases and composition distributions of the films were investigated as functions of the rapid thermal annealing (RTA) temperatures (600~$900^{\circ}C$) and times (20~40 sec). The high temparature thermal stability was also investigated by the analysis of sheet resistance and crystalline properties. The stable $CoSi_2$ phases were obtained by the RTA annealing at $800^{\circ}C$ for 20 seconds showing $0.8 \Omega /\Box$ of sheet resitance. However, the sheet resistances were sharply increased at below $700^{\circ}C$ due to changes of crystalline phases. The temperature resistance coefficient of heating elements was found to be about $0.0014/^{\circ}C$, and the obtained cobalt silicided films can be applied to the printer heating elements.

• Journal of the Microelectronics and Packaging Society
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• v.13 no.1 s.38
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• pp.31-35
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• 2006

This paper is studied on a protective control system for electrical fire used electrical characteristics of SCR and multilayer-type PTC thermistor. The PTC thermistor has characteristic or positive resistivity temperature coefficient according to the temperature variation, which is construction of a regular square and cube demarcation with $BaTiO_{3_}$Ceramics of positive temperature coefficient. Also PTC shows the phenomenon which is rapidly increased in the resistivity if the temperature is increased over Curie temperature point. This paper is proposed on a protective control system used multilayer-type PTC which is protected from electrical fire due to electric short circuit faults or overload faults. Some experimental results of the proposed apparatus is confirmed to the validity of the analytical results.

• Proceedings of the Korea Information Processing Society Conference
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• 2022.11a
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• pp.188-190
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• 2022

본 연구에서는 정전류(Constant Current) 방식에 전압강하법을 이용하여 접촉저항 측정 시스템을 구현하고 측정값을 블루투스 통신을 통해 안드로이드 운영체제에서 확인할 수 있도록 앱을 개발한다. 측정가능한 범위로 0 Ω에서 10.24 Ω 사이의 접촉 저항을 MCP3424 18 bit 분해능 ADC를 사용하여 측정할 수 있도록 설계하였다. 기존에는 반고정 저항과 별도의 전류계를 이용하여 정전류를 설정하였으나, 본 연구에서는 측정의 정밀도 및 편리성 개선을 위해 0.1% 고정밀 고정저항을 병렬로 4개 연결하여 구현하였으며, 또한 1:1 Unity Gain Buffer를 구성하고 Ultra High Precision Z-Foil 방식으로 오차 0.01%, 온도 계수 0.05 ppm/℃ 저항을 사용하여 실제로 측정한 샘플 저항 값의 결과를 확인하였다.

• Journal of Bio-Environment Control
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• v.6 no.3
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• pp.205-215
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• 1997

An accurate transpiration model for greenhouse tomato crop, which is liable to transpiration depression and yield loss because of low solar radiation and high humidity, could be an efficient tool for the optimum control of greenhouse climate and for the optimization of Irrigation scheduling. The purpose of this study was to develop transpiration model of greenhouse tomato and to carry out the experimental verification. The formulas to calculate the canopy transpiration and temperature simultaneously were derived from the energy balance of canopy. Transpiration and microclimate variables such as net radiation, solar radiation, humidity, canopy and air temperature, etc. were simultaneously measured to estimate parameters of model equations and to verify the suggested model. Leaf boundary layer resistance was calculated as a function of Nusselt number and stomatal diffusive resistance was parameterized by solar radiation and leaf-air vapor pressure deficit. The equation for stomatal diffusive resistance could explain more than 80％ of its variation and the calculated stomatal diffusive resistance showed good agreements with the measured values in situations independent of which the constants of the equation were estimated. The canopy net radiation calculated by Stanghellini's model with slight modification agreed well with the measured values. The present transpiration model, into which afore-mentioned component equations were assembled, was found to predict the canopy temperature, instantaneous and daily transpiration with considerable accuracy in greenhouse climates.

• Journal of the Korean Institute of Telematics and Electronics
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• v.4 no.1
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• pp.3-12
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• 1967

This study has been endeavored to deposit resistance films of tin oxide on the cylindrical Pyrex glass rods. In this report, at first an outline of the film formation is described and later some electrical properities of the resistance films manufactured through new method is discussed in detail. Because the new method which is called, "Chemical Vapour Reaction Process", is not only easy to get stable resistance films, but also doesn't need vacuum systtem, it seems to be a promising fundamental process to go into flow system mass production. Electrical properties of resistance films made by the new mathod are similar to or surpassing those by provious method (for example splay method). The top data thus obtained shows that surface resistivity is 25ohm/sq. with 12 ppm in temperature coefficient of resistor. resistor.

• Electrical & Electronic Materials
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• v.8 no.1
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• pp.13-20
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• 1995

To develope a high precision TiAIN thin film resistor, TiAIN films were deposited on A1$_{2}$03 substrates by reactive planar magnetron cosputtering from Ti and Al targets in an Ar-N$_{2}$ atmosphere. The characteristics of the TiAIN thin film were controlled by changing of the R.F. power on Ti and Al targets, and the N$_{2}$ partial pressure. The high precision TiAIN thin film resistor with TCR(Temperature Coefficient of Resistance) of less than 10ppm/.deg. C was obtained under the R.F. power condition of 160(w)/240(w) to Ti and Al targets at the N$_{2}$ partial pressure of 7*10$^{-5}$ Torr. The composition of these films were investigated by XRD, SEM and EDS.

• Journal of Energy Engineering
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• v.10 no.2
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• pp.120-131
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• 2001

최근 세라믹 필터에 대한 연구는 열악한 환경 및 산성가스에 대한 저항성으로 인해 고온 가스 여과에서 가장 전망 있는 기술로 부각되는 시점에 있다. 본 연구의 목적은 탄화규소(SiC) 세라믹 캔들 필터를 사용하여 IGCC와 PFBC의 새로운 전력생산 공정에서 배출되는 먼지를 제거하기 위한 필터성능을 조사하기 위함이다. 필터의 성능 평가는 고온.고압.고온.상압 조건에서 이루어졌으며 필터의 압력강하, 먼지 제거효율, 저항 계수, 그리고 열적.기계적 저항성 등을 파악하였다. 길이 30cm, 60cm 필터에 2종류의 먼지(코크스와 물유리 공정)를 이용하여 나타난 먼지 제거효율은 99.9% 이상을 보였으며 필터의 평균 기공 크기가 감소함에 따라 압력강하가 증가함을 확인하였다. 또한 탄화규소 세라믹 필터의 성능은 내부압력이 증가할수록 압력강하가 감소하고 유량이 증가할수록 압력강하가 증가함과 특히 유체에 대한 압력강하 변화는 온도의 영향보다는 상대적으로 내부압력에 더 많은 영향을 받음을 확인하였다.

• Proceedings of the KAIS Fall Conference
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• 2010.05a
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• pp.153-155
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• 2010

실리콘 태양전지의 pn 접합 계면특성을 조사하기 위해서 p형 실리콘 기판 위에 전기로를 이용한 $POCl_3$ 공정을 통하여 n형의 불순물을 주입하여 pn접합을 만들었다. n형 불순물의 확산되어 들어가는 공정시간이 길고 공정온도가 높을수록 면저항은 줄어들었다. n형 불순물의 주입이 많아질수록 pn 접합 계면에서의 전자친화도가 줄어들면서 면저항은 감소되었다고 할 수 있다. n형 반도체의 페르미레벨이 높아지면서 공핍층도 생기지만 n형 불순물이 많아지면서 공핍층의 폭은 점점 좁아지고 쇼키 장벽의 높이도 낮아지면서 자유전자와 홀 쌍의 이동이 쉽게 이루어지게 되었다. n형의 불순물 확산공정시간이 긴 태양전지 셀에서 F.F. 계수가 높게 나타났으며, 효율도 높게 나타났다.

• Proceedings of the KIPE Conference
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• 2016.07a
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• pp.89-90
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• 2016

인버터에 사용되는 전력용 반도체 소자의 정션 온도는 모듈의 보호 및 수명 예측에 중요한 영향을 미친다. 온도를 추정하기 위해 제조사에서 제공되는 데이터 시트로부터 피라미터를 찾아 입력하게 되는데, 온도, 전류 및 $R_g$ 저항 등의 요인에 의해 이 파라미터가 변경된다. 본 논문은 온도 추정 과정에서 사용되는 파라미터에 온도에 따라 변동되는 성분을 선형화하여 추가하여 현재 온도에 맞는 파라미터를 계산해 낼 수 있는 방법에 관한 것으로 데이터 시트로부터 미리 계산된 계수 값을 이용하여 수식적으로 온도 의존성을 반영할 수 있다.이를 이용하여 부하 전류, 스위칭 주파수, DC Link 전압 등의 변동에 따라 정션 온도를 실시간으로 추정하였으며, iGBT 의 상단에 온도 센서를 부착하여 추정결과를 검증하였다. 본 방법을 통해 파라미터의 온도 의존성을 수식적으로 반영할 수 있으므로 파라미터를 저장하는 인버터의 데이터 저장 공간을 최소화 할 수 있다.

• Journal of Sensor Science and Technology
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• v.7 no.5
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• pp.356-363
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• 1998

Using the results analyzed by FEM(Finite Element Method). the microheaters with the stress-balanced $Si_3N_4$(150 nm)/$SiO_2$(300 nm)/$Si_3N_4$(150 nm) diaphragms were fabricated by silicon micromachining techniques. Pt was used as microheater materials. Pt temperature sensor was fabricated to measure the temperature of microheaters. Resistance of temperature sensor and power dissipation of microheater were measured and calculated at the various temperatures. The thermal distribution of heater was examined by a IR thermoviewer. Measured and simulated results are compared and analyzed. The temperature coefficient of resistance of heater was about $0.00379/^{\circ}C$. Pt heater showed the power dissipation of about 51 mW at $300^{\circ}C$ and a uniform thermal distribution on the surface.