• Title/Summary/Keyword: 오제이전자분광기

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Sampling and Analysis of Particles Generated in CSS-Mode of a Hard Disk Drive by Using a Particle Sampler (입자 샘플러를 이용한 하드디스크 CSS 동작 시 발생한 입자 샘플링 및 분석)

  • Lee Jae ho;Lee Dae Young;Kim Sang Yoon;Hwang Jung ho
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.29 no.5 s.236
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    • pp.599-608
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    • 2005
  • Controlling particle contamination is important to increase storage capacity as the flying height of a slider in a hard disk drive decreases. Since precise detection and analysis of particles are primary steps of particle control in a HDD, many researchers have used sampling methods. In this paper, we newly designed a particle sampler and conducted performance evaluation of the sampler. Also, we conducted particle sampling from the HDD using the particle sampler and analysis of sampled particles by SEM and AES. Experimental results show that the particles generated by the slide-disk interaction mainly came from the disk surface.