• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.244.2-244.2
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• 2013

Contact Pattern을 Plasma Etching을 통해 Pattering 공정을 진행함에 있어서 Plasma 내에 존재하는 High Energy Ion 들의 Bombardment 에 의해, Contact Bottom 의 Silicon Lattice Atom 들은 Physical 한 Damage를 받아 Electron 의 흐름을 방해하게 되어, Resistance를 증가시키게 된다. 또한 Etchant 로 사용되는 Fluorine 과 Chlorine Atom 들은, Contact Bottom 에 Contamination 으로 작용하게 되어, 후속 Contact 공정을 진행하면서 증착되는 Ti 나 Co Layer 와 Si 이 반응하는 것을 방해하여 Ohmic Contact을 형성하기 위한 Silicide Layer를 형성하지 못하도록 만든다. High Aspect Ratio Contact (HARC) Etching 을 진행하면서 Contact Profile을 Vertical 하게 형성하기 위하여 Bias Power를 증가하여 사용하게 되는데, 이로부터 Contact Bottom에서 발생하는 Etchant 로 인한 Damage 는 더욱 더 증가하게 된다. 이 Damage Layer를 추가적인 Secondary Damage 없이 제거하기 위하여 본 연구에서는 원자층 식각방법(Atomic Layer Etching Technique)을 사용하였다. 실험에 사용된 원자층 식각방법을 이용하여, Damage 가 발생한 Si Layer를 Secondary Damage 없이 효과적으로 Control 하여 제거할 수 있음을 확인하였으며, 30 nm Deep Contact Bottom 에서 Damage 가 제거될 수 있음을 확인하였다. XPS 와 Depth SIMS Data를 이용하여 상기 실험 결과를 확인하였으며, SEM Profile 분석을 통하여, Damage 제거 결과 및 Profile 변화 여부를 확인하였으며, 4 Point Prove 결과를 통하여 결과적으로 Resistance 가 개선되는 결과를 얻을 수 있었다.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.29 no.5
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• pp.217-227
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• 2017

The object of this study is to estimate the net volume transport and the residual flow that changed by space and time at southern part of Yeomha channel, Gyeonggi Bay. The cross-section observation was conducted at the mid-part (Line2) and the southern end (Line1) of Yeomha channel for 13 hours during neap and spring-tides, respectively. The Lagrange flux is calculated as the sum of Eulerian flux and Stokes drift, and the residual flow is calculated by using least square method. It is necessary to unify the spatial area of the observed cross-section and average time during the tidal cycle. In order to unify the cross-sectional area containing such a large vertical tidal variation, it was necessary to convert into sigma coordinate system by horizontally and vertically for every hour. The converted sigma coordinate system is estimated to be 3~5% error when compared with the z-level coordinate system which shows that there is no problem for analyzing the data. As a result, the cross-sectional residual flow shows a southward flow pattern in both spring and neap tides at Line2, and also have characteristic of the spatial residual flow fluctuation: it northwards in the main line direction and southwards at the end of both side of the waterway. It was confirmed that the residual flow characteristics at Line2 were changed by the net pressure due to the sea level difference. The analysis of the net volume transport showed that it tends to southwards at $576m^3s^{-1}$, $67m^3s^{-1}$ in each spring tide and neap tide at Line2. On the other hand, in the control Line1, it has tendency to northwards at $359m^3s^{-1}$ and $248m^3s^{-1}$. Based on the difference between the two observation lines, it is estimated that net volume transport will be out flow about $935m^3s^{-1}$ at spring tide stage and about $315m^3s^{-1}$ at neap tide stage as the intertidal zone between Yeongjong Island and Ganghwa Island. In other words, the difference of pressure gradient and Stokes drift during spring and neap tide is main causes of variation for residual current and net volume transport.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.28 no.6B
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• pp.731-741
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• 2008

Previous studies on the numerical simulation at the tidal reach of Han River tend to restrict downstream boundary as Jeon-ryu station due to difficulties in gaining cross section data and tidal elevation values at Yu-do. But, in this study, geometries beyond the confluence of Gok-reung stream and Im-jin River are constructed based on the numerical sea map; tidal elevation at the downstream boundary, Yu-do is estimated by harmonic analysis of In-cheon tide gage station so that hydrodynamic and diffusion behavior have been analyzed. The domain ranging from Shin-gok submerged weir to Yu-do is selected (which is 36.8 km in length). RMA-2 and RAM4 developed by Il Won Seo (2008) are applied to simulate flow and diffusion behavior, respectively. Numerical results of flow characteristic are compared with the measured data at Jeon-ryu station. Simulation is carried out from June 23 to 25 in 2006 on the ground that hydrologic data is satisfactory and tidal difference is huge during that period. The result shows that reverse flow occurs 5 times according to the tidal elevation at Yu-do and the maximum reverse flow is observed up to Jang-hang IC, which is 32.9 km in length. Also analysis is focused on the process of generation and disappearance of reverse flow, the distribution of water surface elevation and velocity along the maximum velocity line, and the transport of nonconservative pollutant. Pollutant injected from Gul-po stream spreads widely across the river; however, the size of BOD cloud entering from Gok-reung stream is relatively small because water depth at the mid and left side becomes deeper and maximum velocity occurs along the right bank so that transverse mixing is completed quickly. Finally, mixing characteristic of horizontal salinity distribution is obtained by estimating the salinity input with analytical solution of 1D advection-dispersion equation.

• Journal of the Korean Society of Marine Environment & Safety
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• v.21 no.4
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• pp.372-380
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• 2015

In order to study the characteristics of physical environment in water column around the artificial upwelling structure, CTD and currents measurements were carried out along line observations. Before installation of artificial upwelling structure was installed, the stratification of water column existed 30m in water depth. After installation of artificial upwelling structure, however, stratification formation depth and strength changed depending on currents directions. It seems that the change of stratification has a close relation with upwelling of lower temperature water. After installing the artificial upwelling structure, the distributions of vertical flows were analyzed. Local upwelling and downwelling flows showed a distinct time and spacial changes. Local upwelling flows caused by artificial upwelling structure appeared 100 times larger than coastal upwelling in the South-East Sea of Korea. Upwelling flows generated by the artificial structure raised the high concentration of nutrients to upper layer from lower layer breaking stratification in the summer. Thus, upwelling structure plays an important role for vertical water circulation improving the food environments by increasing primary production.

• Applied Chemistry for Engineering
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• v.10 no.5
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• pp.652-659
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• 1999

The trend of poisoning of reforming catalyst along with the position of anodic catalyst bed was studied. Keeping the conditions that steam to carbon ratio was 2.5, operating voltage was 0.75 V, current density was $140mA/cm^2$, the unit cell was operated during 24 hrs at a steady state. And then the cell was stopped, the catalysts packed in the position of inlet, middle and outlet were sampled individually and then the amount of carbon, Li and K poisoned were analysed. After 100 hrs operated, the catalysts at the same positions were analysed at the same manner. The result of this experiment was as followings. After 24 hrs operated, the poisoning amounts of Li and K in the catalyst were 0.27 wt% at inlet, 0.23 wt% at middle and the highest value 1.59 wt% at outlet. After 100 hrs, the amount of poisoning is the highest in the catalyst packed at the inlet of unit cell. The performance simulation of unit cell explained these trends of poisoning catalysts. The simulation told that the catalyst in the region of the inlet of unit cell treated the 90% of initial methane flow rate and the highest electrochemical reaction happened in this region. So the catalysts of this region were the most poisoned with carbon, Li and K and also the rate of poisoning is faster than that of the catalyst at other regions. The temperature at the region of outlet of unit cell was $30^{\circ}C$ higher than that of other regions, so more Li, and K vaporized than at other regions and little reforming reaction at this region made the catalysts poisoning rate low.

• Korean Journal of Environment and Ecology
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• v.26 no.6
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• pp.970-979
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• 2012

The purpose of study was to analyze the ecological health of the Namcheon Stream using Index of Biotic Integrity(IBI) Qualitative Habitate Evaluation Index(QHEI) and Water quality condition. Diatom samples were collected from ten sampling sites in the stream at total four times in 2006 and 2007. To assess ecological health of the stream, it was used modify metrics proposed by USEPA(1999). IBI values of the stream averaged 23 which was judged as a "fair". Physical habitate evaluation analysis showed that QHEI values in the stream averaged 57 indicating a "poor" condition. Water quality condition in the stream averaged "II" indicating a "a little good" condition In conclusion, ecological health of the Namcheon Stream was "fair" condition that means habitate minimally disturb in the aquatic environment and relatively good water quality. Especially, St. 6 St. 7, St. 8, and St. 9 showed that QHEI values in the stream averaged 47 indicating a "poor" condition. St. 6 exists mostly to interfere with the flow of the river piers and artificial beams around. They are also serious disturbance at riverbed structure in aquatic ecosystems. St. 10 was good about habitate condition however, it was disturbance of aquatic ecosystems due to nutrient. It is suggest that St. 10 needs to be managed for nutrient inflows.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.17 no.3
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• pp.279-298
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• 2019

This study comprehensively addresses recent progress at KAERI in waste treatment technology to cope with waste produced by pyroprocessing, which is used to effectively manage spent fuel. The goal of pyroprocessing waste treatment is to reduce final waste volume, fabricate durable waste forms suitable for disposal, and ensure safe packaging and storage. KAERI employs grouping of fission products recovered from process streams and immobilizes them in separate waste forms, resulting in product recycling and waste volume minimization. Novel aspects of KAERI approach include high temperature treatment of spent oxide fuel for the fabrication of feed materials for the oxide reduction process, and fission product concentration or separation from LiCl or LiCl-KCl salt streams for salt recycling and higher fission-product loading in the final waste form. Based on laboratory-scale tests, an engineering-scale process test is in progress to obtain information on the performance of scale-up processes at KAERI.

• The Journal of Engineering Geology
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• v.33 no.3
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• pp.413-426
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• 2023

This study presents the geochemical characteristics of cave water to evaluate its origin and flow path. From June 2022 to may 2023, river water was collected at two sites (WE1 and WE2) in the Donggang River around Baengnyongdonggul Cave, and cave water was collected at four sites (WE3 to WE6) inside Baengnyongdonggul Cave. Water samples were analyzed for major dissolved components. Both river and cave waters were classified as Ca-HCO₃ type. All cave water samples were supersaturated in carbonate minerals, suggesting that carbonate minerals would precipitate within the cave. Due to differences in the source of cave water and the degree of water-rock interaction, the geochemical characteristics of water from sites where the flow of cave water is observed (WE3 and WE6) and rimstone pools (WE4 and WE5) could be clearly distinguished. The cave water at WE6 flows in from the Donggang River, then passes through WE3 and flows back out into the Donggang River. The cave water at WE4 and WE5 is supplied from precipitation, but the flow path of cave water at WE4 and WE5 is different.

• Membrane Journal
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• v.29 no.6
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• pp.329-338
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• 2019

The constant-pressure and constant-flux membrane filtration experiments of alumina colloidal solution are performed to investigate defouling effect of the natural convection instability flow (NCIF) induced in membrane module. The permeate flux at constant-pressure and the transmembrane pressure (TMP) at constant-flux experiments are measured by changes the inclined angle (0, 90 and 180°) of membrane module to the gravity, and flux results are analyzed by using the blocking filtration model. NCIF are more induced as the inclined angles increased from 0° to 180°, and the maximum induced NCIF at 180° angle enhances flux to 2.8 times and reduces TMP to 85% after two-hour operation. As a result of analyzing flux data by applying the blocking filtration model, it is more reasonable to analyze them by using the intermediate blocking model within 15-minute operation time and then thereafter times by using the cake filtration model. The induced NCIF at 180° angle reduces the intermediate blocking fouling at 52% in the early operation time of 15-minute and thereafter the cake layer fouling at 93%. The main membrane fouling control mechanism of NCIF induced in membrane module is evaluated as suppressing the formation of the cake layer of particulate colloidal materials on membrane surface.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.17 no.4
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• pp.294-306
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• 2005

Most immersed tunnels investigated have been investigated based on the engineer's experience with design and construction. From engineering point of view, it is very important to understand the wave interaction with the seabed and immersed tunnel, since the stability of an immersed tunnel depends largely on the behavior of the seabed foundation. In this study, for the first stage research to find out the mechanism of the wave interaction with the seabed and immersed tunnel, the benchmarking method called as direct numerical simulation (DNS) was employed to analyze comprehensively the wave-induced pore water pressures, vorticity and flows in seabed or inside rubble stone around the immersed tunnel. The immersed tunnel is modeled based on Busan-Geoje fixed link project in Korea, which is now on the stage of planning. Moreover, the nonlinear water wave interaction with an immersed tunnel/its seabed foundation was thoroughly examined with regard to the stabilities of the immersed tunnel subjected to various water wave conditions, median grain size and so forth.