• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.111-111
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• 1999

반도체 소자의 고집적화 및 고속화에 따라 다층 금속배선에서의 RC 지연이 전체 지연의 주된 요소로 되고 있다. 이런 RC 진연을 줄이기 위해서 현재 다층 금속배선의 층간 절연막으로 사용하고 있는 SiO2 박막(k~3.9)을 보다 낮은 유전상수(low-k)를 가지는 물질로 대체할 것이 요구된다. 층간 절연막으로서 가져야 할 가장 중요한 것은 낮은 유전상수와 높은 열적안정성($\geq$45$0^{\circ}C$)이다. 본 연구에서는 Toluene을 precursor로 사용한 PECVD방법으로 low-k 유사중합체 유기박막을 성장시켰으며 부동한 온도에서 성장된 박막의 특성을 비교하여 증착온도가 박막의 특성에 미치는 영향에 대하여 조사하였다. 유사중합체 유기박막은 platinum(Pt)기판과 silicon 기판위에 같이 증착되었다. Precursor는 4$0^{\circ}C$로 유지된 bubbler에 담겨지고 증발된 precursor molecules는 Argon(Ar:99.999%) carrier 가스에 의해 process reactor 내부로 유입된다. Plasma는 RF(13.56MHz generator로 연결된 susceptor 주위에 발생시켰다. Silicon 기판위에 증착한 시편으로 Fourier transform infrared (FTIR) spectra 및 열적 안정성을 측정하였고, Pt 기판위에 증착한 시편으로 Al/유기박막/Pt 구조의 capacitor를 만들어 열적안정성을 측정하였고, Pt 기판위에 증착한 시편으로는 Al/유기박막/Pt 구조의 capacitor를 만들어 K값 및 절연성을 측정하였다. Capacitance는 1MHz 주파수에서 측정하였다. 열적안정성은 30분동안 Ar 분위기에서 annealing하기 전후의 증착막의 두께의 변화를 측정함으로써 조사하였으며 유기박막의 두께는 surface profilometer로 측정하였다. 증착온도가 45$^{\circ}C$에서 15$0^{\circ}C$, 25$0^{\circ}C$로 높아짐에 따라 k값은 높아졌지만 대신 열적안정성은 좋아졌다. plasma power 30W인 경우 45$^{\circ}C$에서 증착했을 때 유전상수는 2.80으로 낮았지만 40$0^{\circ}C$에서 30분 동안 열처리한 후 두께가 49% 감소하였다. 그러나 25$0^{\circ}C$에서 증착했을 때 유전상수는 3.10으로 좀 높아졌지만 열적으로는 40$0^{\circ}C$까지 안정하였으며 45$0^{\circ}C$에서도 두께의 감소는 8%에 불과했다.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.24 no.4
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• pp.429-438
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• 2011

In this paper, experiment of thermal conductivity among thermal properties for CCS insulation material was carried out under the condition ranged from room temperature to cryogenic temperature. CCS insulation system should be sustained under cryogenic temperature($-163^{\circ}C$), and lots of investigations will be conducted how to block the heat to insulation material. CCS components which consist of various materials are especially the main interests, and how the temperature of the entire CCS along the location is should be investigated through these studies. With the experimental thermal properties, the steady state thermal analysis of the entire cargo system was conducted. When the LNG leaked through the insulation system with external impact, temperature distribution and thermal safety of secondary barrier, especially plywood and hull structure, was observed.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.12
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• pp.1035-1042
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• 2010

The thermal stratification effect has been thought as one of the way to avoid dramatically generating the heat from HCCI combustion. We investigate the effect of thermal stratification on HCCI combustion fueled by DME and n-Butane. The thermal stratification occurs in a combustion chamber of a rapid compression machine with premixture by buoyancy effect that is made of fuel and air. The premixture is then adiabatically compressed, and during the process, the in-cylinder gas pressure is measured and two-dimensional chemiluminescence images are prepared and analyzed. Under the thermal stratification, the LTR starting time and the HTR starting time are advanced than that of homogeneous case. Further, the LTR period and the luminosity duration under homogeneous conditions are shorter than the corresponding quantities under stratified conditions. Additionally, under stratified conditions, the brightest luminosity intensity is delayed longer than that of homogeneous condition.

• The Korean Journal of Petroleum Geology
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• v.10 no.1_2 s.11
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• pp.1-9
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• 2004

A total of 17 exploratory wells were drilled from the Block VI-1 and recently commercial gas field was discovered in the Ulleung Basin. Thermal maturity of organic matter in the sediments from the drilling wells were evaluated for the characterization of the petroleum system of the basin. Level of thermal maturation of organic matter is different depending on the area to area. The top of oil window is located at about 800 m in the Dolgorae 5 area, and it is relatively deeper in both western and northern areas. It seems that thermal maturity of organic matter reached present stage before tectonism in the deformed zone 2, whereas thermal maturation continued after tectonism in other zones.

• Tunnel and Underground Space
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• v.24 no.3
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• pp.201-211
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• 2014

In the present study, the thermal performance of multiple rock caverns for large-scale thermal energy storage (TES) was numerically investigated for different separation distances between the caverns through heat transfer analysis using a computational fluid dynamics code, FLUENT. The thermal performance of multiple caverns was assessed in terms of the thermal stratification within the caverns and the heat loss to the surroundings, and the heating characteristics of the rock around the caverns were investigated. The results of numerical simulation showed that there was little difference in thermal performance between multiple TES caverns with different separation distances when the surrounding rock was less heated and it reached thermal steady-state, which represent the thermal states of the surrounding rock at the early and long-term operational stages of the TES caverns, respectively. However, as the separation distance decreased, the rock between the caverns reached thermal steady-state more quickly, and thus the heat loss from the caverns tended to converge rapidly to the value of heat loss occurred under thermal steady-state conditions in the surrounding rock. This result implies that the operating cost of heating the surrounding rock (i.e., rock heating) can be reduced with a reduction in the separation distance between multiple caverns, and suggests that the separation distance should be determined by considering the operating cost of rock heating as well as the construction cost of the caverns.

• Journal of the KSME
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• v.32 no.8
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• pp.666-672
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• 1992

유리의 제조공정에 있어서 열적 문제들을 고찰하여 보았다. 비단 유리뿐 아니라, 여러 가지 다른 재료의 공정 (예컨대 철강, 세라믹 등)에 있어서도 다양한 열적 문제가 관찰되며, 이러한 점에서 열공학자들의 관심의 확대가 절실하다고 하겠다. 이 글이 우리 열공학자들의 시야를 넓히는 데 일조를 하였기를 바라마지 않는다.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.6.2-6.2
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• 2005

• The Proceedings of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.11 no.5
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• pp.37-43
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• 1997

본 연구는 거실조명환경을 시계열적으로 분석하기 위하여 1985년, 1991년, 1996년의 조사결과를 고찰한 것이다. 그 결과, 평균조도가 증가되기는 하였으나 아직도 충분한 밝기를 확보하지 못하고 있음이 밝혀졌다. 그리고 조명환경이 향상되었음에도 불구하고 거주자의 의식 및 평가는 그리 높지 않았다.

• 방재와보험
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• s.109
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• pp.34-41
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• 2005

우리나라에서 발생한 화재 중 전기재해는 균일한 사고분포를 나타내고 있다. 따라서 도체로 가장 많이 사용되고 있는 동전선에 열적 스트레스를 인가했을 때 특성변화를 이용하여 그 변화를 분석하고, 사고현장에서의 나전선의 특성을 알아보고 사고원인을 알아봄으로써 전기재해 예빵에 보다 주의를 기울이는 데 도움이 되고자 한다.

• Fire Science and Engineering
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• v.24 no.6
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• pp.7-12
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• 2010

This paper is aimed the measurement and estimation the thermal interrelation based on leakage current. The leakage models are analyzed by parameters in open and closed (Panel) states and with wood dust and rainwater, charcoal powder in leakage current occurred point. The thermal characteristic of open state that leakage current is inputted in 90 mA is higher in charcoal powder ($105^{\circ}C$) than in wood dust and rainwater ($88.8^{\circ}C$). Charcoal powder that is inputted in 110 mA shows high thermal characteristic ($238.6^{\circ}C$) and the thermal ($238.6^{\circ}C$) is caused by material strain of electrical wire insulation and Panel. The closed state in 90 mA is higher in charcoal powder ($250.6^{\circ}C$) than in wood dust and rainwater ($90.8^{\circ}C$). The open and closed state appear thermal characteristics of two times in charcoal powder than in wood dust and rainwater. The thermal data that are open and close states are used electrical fire investigation and thermal characteristic for Leakage current.