• Transactions of the Society of Information Storage Systems
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• v.4 no.1
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• pp.6-12
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• 2008

The paper deals with the numerical analysis and design optimization of polysilicon micro thermal flexure actuator. The deflection of a thermal actuator is implicitly related to the actuation time so that such deflection is to be maximized under the consideration of structural performances such as maximum stress and natural frequencies. At first, the structural formulation of a thermal actuator is reviewed, and its CAE based simulation is performed to verify the numerical model. A parametric study is then conducted to identify the mainly effective design variables. Finally, the design of a micro thermal actuator is explored in the context of deterministic optimization and reliability based design optimization in the present study.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.4
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• pp.51-56
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• 2007

Precision positioning system with magnetostrictive actuator(MA) has widely used in manufacturing devices to control the positioning accuracy to meet the high load and stroke requirements. It has many advantage in comparison with piezoelectric actuator; high force, high strain, high efficient etc. But, the performance of Terfenol-D, the commercially available magnetostrictive material, is highly dependent on the prestress, magnetic field intensity and temperature. This paper present an experimental investigation of the temperature effect on displacement characteristics of magnetostrictive actuator. In this paper, compressed cold air is proposed to improve of positioning accuracy of magnetostrictive actuator. The compressed cold air cooling system has good cooling effect Experimental results confirming the effectiveness of the proposed cooling system as high precision positioning system are also has presented in this paper.