• Title/Summary/Keyword: 연마량

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A Study on the effect of TEOS film by Dispel8ion Time and Content of $CeO_2$ Abrasive (DSS에서 $CeO_2$ 연마제의 첨가량과 분산시간이 TEOS 막에 미치는 특성연구)

  • Seo, Yong-Jin;Han, Sang-Jun;Park, Sung-Woo;Lee, Young-Kyun;Lee, Sung-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.487-487
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    • 2009
  • One of the critical consumables in chemical mechanical polishing (CMP) is a specialized solution or slurry, which typically contains both abrasives and chemicals acting together to planarize films. In single abrasive slurry (SAS), the solid phase consists of only one type of abrasive particle. On the other hand, mixed abrasive slurry (MAS) consists of a mixture of at least two types of abrasive particles. In this paper, we have studied the CMP characteristics of mixed abrasive slurry (MAS) retreated by adding of $CeO_2$ abrasives within 1:10 diluted silica slurry (DSS). The slurry designed for optimal performance should produce reasonable removal rates, acceptable polishing selectivity with respect to the underlying layer, low surface defects after polishing, and good slurry stability. The modified abrasives in MAS are evaluated with respect to their particle size distribution, surface morphology, and CMP performances such as removal rate and non-uniformity. As an experimental result, we obtained the comparable slurry characteristics compared with original silica slurry in the viewpoint of high removal rate and low non-uniformity.

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Cavitation damage characteristics in seawater of electroless nickel plated gray cast iron (무전해 니켈 도금된 회주철의 해수 내 캐비테이션-침식 손상 특성)

  • Park, Il-Cho;Kim, Seong-Jong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2016.11a
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    • pp.142-142
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    • 2016
  • 무전해 니켈 도금은 산업기계 부품, 자동차 부품, 항공 및 전자 통신 부품 등에 이르기까지 산업 전반에서 폭넓게 사용되고 있다. 이는 무전해 니켈 도금 층이 우수한 균일성, 내마멸성, 내식성 등을 지녀 관련 연구가 지속적으로 활발하게 진행되어 왔기 때문이다. 특히, 최근에 이르기까지 도금 층이 얇고, 우수한 내마멸성 및 낮은 마찰계수를 활용한 무전해 니켈 도금은 산업현장에서 기계 부품들의 수명을 연장시키고, 그 성능을 개선시키는데 용이하게 적용되고 있다. 본 연구에서는 이와 같이 무전해 니켈 도금 층의 우수한 특성을 활용하여 해수 부식과 캐비테이션-침식 복합 환경 하에 놓여 있는 금속 재료의 손상을 방지하고자 하였다. 이는 선박의 경우 최근 고속화, 대형화 추세에 따라 부품의 내구성 향상과 연비 효율성이 더욱 강조되고 있으며, 그에 따라 해수 속에서 고속 회전으로 더욱 가혹해진 캐비테이션 침식-부식 환경하에 놓인 선박의 프로펠러, 펌프 임펠러 및 케이싱 등의 금속재료 자체를 보호할 수 있는 고성능 재료의 개발이 요구되고 있기 때문이다. 또한 해양환경 하에서 무전해 니켈 도금 층에 대한 캐비테이션 침식 손상에 대한 연구는 미비한 실정이다. 본 연구에서는 회주철 표면에 무전해 니켈 도금을 실시하여 캐비테이션 침식 손상을 방지하고자 하였다. 무전해 니켈 도금을 실시하기 전 도금 층을 균일하게 형성하기 위해 샌드 페이퍼 #1200까지 연마 후 알칼리 탈지 실시하고, 산세(10% HCl)와 수세를 순차적으로 실시하여 전처리하였다. 이후 무전해 니켈 도금은 황산니켈, 차아인산나트륨, 구연산, 아세트산나트륨 그리고 미량의 질산납으로 구성된 도금욕에서 pH 4-6, $80-90^{\circ}C$의 조건으로 실시하였으며, pH는 NaOH를 이용하여 조정하였다. 이렇게 제작된 무전해 니켈 도금 층에 대하여 천연 해수 속에서 ASTM-G32 규정에 의거한 캐비테이션 침식실험을 통해 내구성을 평가하였다. 캐비테이션 실험 후에는 무게 감소량, 표면 손상깊이, 침식 손상 경향 등을 종합적으로 분석 비교하였다. 그 결과, 회주철에 대하여 무전해 니켈 도금을 실시할 경우 현저한 캐비테이션-침식 저항성 향상이 관찰되었다.

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Secondary Ion Man Spectrometry: Theory rind Applications in Geosciences (이차이온질량분석기의 원리와 지질학적 응용)

  • 최변각
    • The Journal of the Petrological Society of Korea
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    • v.10 no.3
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    • pp.222-232
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    • 2001
  • Secondary ion mass spectrometry (SIMS) uses focused high-speed primary ions to produce secondary ions from sample surface that are analyzed through a mass filter. SIMS is often called as ion microprobe, since it offers a micrometer-scale spatial resolution. Although the precision and accuracy of SIMS are not as good as many conventional mass spectrometers, it has several advantages such as small sample-size requirement, high spatial resolution and capability of in-situ analysis. In the field of geochemistry/cosmochemistry, SIMS is widely used for (1) stable isotope geochemistry of H, C, O, S, etc., (2) geochronology of U/Th-bearing minerals, (3) lateral distribution of trace elements in a mineral, and (4) discovery of presolar grains and investigation of their isotopic compositions.

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Effect of F$e_2$P Addition on Microstructures of Sintered 4600 Steel (4600계 소결강의 조직에 미치는 F$e_2$P첨가의 영향)

  • Kim, Dong-Uk;Lee, Wan-Jae
    • Korean Journal of Materials Research
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    • v.2 no.6
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    • pp.428-435
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    • 1992
  • AISI 4600 Iron powder was mixed with 0~1.0% phosphor as F$e_2$P powder and/or 0~0.8% carbon as graphite powder in rotating mixer. Mixed powder was pressed 800MPa in double-punch mould. Compacts were sintered at 115$0^{\circ}C$for 30 min. in vacuum or mixed hydrogen and nitrogen gas. Sintered compacts were ground and polished, and etched by 2% nital etchant. The microstructure was observed by image analyzer and optical microscope. Density and microhardness were tested by ASTM B3l2 and Microvickers hardness tester. The results obtained were as follows : (1) As the amount of F$e_2$P powder increased, sintered microstructure showed more densified effect and the grain size was larger. (2) The shape of pore was rounded and the number of pore was decreased by F$e_2$P addition. But mean pore size was larger with F$e_2$P content. (3) Simultaneous alloying addition of F$e_2$P and graphite brought about larger grain growth than respective addition. (4) Sintering atmosphere did not affect the microstructure. (5) Hardness of sintered compact increased with phosphrous and carbon content.

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Analysis of microstructure for glass-ceramics made of silicate glasses containing EAF dust (제강분진이 첨가된 규산염계 결정화유리의 미세구조 분석)

  • Kim, H.S.;Kang, S.G.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.16 no.5
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    • pp.227-234
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    • 2006
  • Microstructures of free surface and interior of glass-ceramics obtained by heat treating silicate glass specimen containing electric arc furnace dust(EAF dust) were observed. The crystallization temperature, $T_c$ of glassy specimen was measured around $850^{\circ}C$ from the result of different thermal analysis so heat treatment temperature to obtain glass-ceramic specimen was selected as $950^{\circ}C$ for 1 hr. Glass specimens containing 50 wt% dust were amorphous, while glass specimens containing 70 wt% dust showed spinel crystal peaks in XRD results. In case of glass-ceramic specimens, spinel crystalline phase was appeared with willemite, and willemite crystal peak intensity increased with increasing dust contents. The fractured surface of glass specimens containing 50 wt% dust was smooth like mirror surface, but that containing 70 wt% dust showed spinel crystals of 10 ${\mu}m$ size in glass matrix. In case of glass-ceramic specimens, ZnO crystal particles of $2{\sim}5{\mu}m$ size were produced in free surface and glassy phase, spinel and willemite crystal phases existed in interior. There were no crystals in glasses containing 50 wt% dust, while glass containing 70 wt% dust had 14 vol% crystals. Crystallinity of glass-ceramic specimens containing 50 and 70 wt% dust were 19 and 43%, respectively. When microstructures of glass and glass-ceramic specimens were observed through SEM after TCLP experiment, glass specimens showed flaking phenomenon while glass-ceramic specimens showed a slight corrosion evidence without any cracks.

Characterization of Weathered Zone bearing Corestones through Scale Model Test (실내모형실험에 의한 핵석 풍화대 지반 특성 산정)

  • Woo, Ik
    • The Journal of Engineering Geology
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    • v.17 no.3
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    • pp.435-443
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    • 2007
  • This study shows the prediction of the engineering properties of weathered zone bearing corestones through the engineering geological surveys and the scale model test in the laboratory. The window survey and the observation on the borehole core were peformed on three natural slopes in corestones area in order to analyse the distribution pattern and the geometrical properties of corestones. Natural corestones were crushed and abrased for the scale model test into less than 5 mm in maximum-2mm in average by the scale reduction ratio based on the size of natural corestones and the specimen size. Scale model tests were carried out on soil and plaster model specimens with different corestone content ratio - 0%, 10%, 20%. The direct shear test on soils shows that shear strength is increased by the increase of corestone content ratio. The increase of cohesion is, however, more important factor to the shear strength of soil for 20% corestone content ratio due to interlocking of crushed corestone particles. The plaster model test shows a tendance of increase of UCS and modulus of elasticity with increase of corestone content. The variation ratio of specimen property by change of corestone content ratio in plaster model test was applied to in situ properties in order to estimate the properties of weathered zone bearing corestones. So it could be predicted that the increase of corestone content to 10% and to 20% produce about 18% and 30% UCS's increase respectively.

CHEMICAL DEGRADATION OF LIGHT CURED COMPOSITE RESINS IN NAOH SOLUTION (NaOH 용액내에서의 광중합형 복합레진의 화학적 분해)

  • Kim, Jung-Ran;Jeong, Byung-Cho;Yang, Kyu-Ho
    • Journal of the korean academy of Pediatric Dentistry
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    • v.29 no.3
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    • pp.469-477
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    • 2002
  • One of the major deficiencies of composite restorative resins is their insufficient resistance to wear. Of the multitude of factors that have been associated with wear, subsurface degradation within the restoration is considered to be one. The aim of this study was to evaluate the resistance to degradation of four commercial composite resins in an alkaline solution. The brands studied were Z100(3M), Clearfil AP-X(Kuraray), Tetric Ceram(Vivadent), Aelit flo(Bisco). Resistance to degradation was evaluated on the basis of the following parameters: (a) mass loss(%) - determined from pre-and post-exposure specimen weights: (b) Si loss(ppm) - obtained from ICP-AE analysis of solution exposed to specimens; and (c) degradation depth(${\mu}m$) - measured microscopically (SEM) from polished circular sections of exposed specimens. The results were as follows: 1. The sequence of the mass loss was in ascending order by AE, EL, TC, Z100. There was statistically significant difference of mass loss between AE, CL group and TC, Z100 group(p<0.05). 2. The sequence of the degree of degradation layer depth was in ascending order by AE, CL, TC, Z100. But there was no statistically significant difference of degree of degradation layer depth between AE and CL(p<0.05). 3. For the Si concentration, Z100 was the highest of all. 4. The correlation coefficient between mass loss and degradation depth was relatively high(r=0.71 p<0.05).

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A Comparative study of roughness of enamel surface to various interdental enamel stripping methods in vitro (치간 법랑질 삭제방법에 따른 치아표면 거칠기에 관한 비교연구)

  • Row, Joon;Chun, Youn-Sic
    • The korean journal of orthodontics
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    • v.29 no.4 s.75
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    • pp.483-490
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    • 1999
  • Interdental enamel stripping is an usual method for correction of abnormal tooth shape and tooth size discrepancy which is one of the etiologic factors of malocclusion. Clinically it Is useful to correct the minor crowding in anterior teeth and posterior occlusion during finishing stage of orthodontic treatment. But this procedure has risks such as irreversible tooth reduction and remaining roughness of enamel surface can accumulate plaque which can evoke periodontal problem. Even if various methods were introduced to minimize the enamel surface roughness, their evaluation was limited in morphologic differences by scanning electronic microscope(SEM). The purpose of this study was to compare the various interdental enamel stripping method by SEM and to quantify the difference of surface roughness by use of Surfcorder SEF-30D(Kosaka Lab. Ltd.) which can measure the roughness of surface. The stripping methods were divided into mechanical and mechanical-chemical method. Air-rotor stripping and separating strip were used for mechanical stripping and $37\%$ phosphoric acid was used for chemical stripping. The enamel surface roughness after mechanical or mechanical-chemical stripping of interproximal surfaces of premolars which were extracted for orthodontic purpose were measured and compared by means of SEM and $Surfcorder^{\circledR}$, the results were as follows. 1. Enamel surface of primary treated by coarse diamond bur and separating strip groups showed highest value of roughness. 2. To compare the primary treated groups between mechanical and mechanical-chemical method, the latter group showed lower value of roughness remarkably. 3. Mechanical stripping groups which were treated both coarse and fine instrument showed lower value of roughness as much as non treated group. 4. The use of Pumice for final polishing did not show significantly smoothening the stripped enamel surface any more.

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Cell study on the Magnesium ion implanted surface with PSII (PSII를 이용한 마그네슘 이온 주입 임플란트에 대한 MC3T3-E1 골모양 세포 반응 연구)

  • Shin, Hyeong-Joo;Kim, Dae-Gon;Park, Chan-Jin;Cho, Lee-Ra;Lee, Hee-Su;Cha, Min-Sang
    • Journal of Dental Rehabilitation and Applied Science
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    • v.25 no.4
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    • pp.361-374
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    • 2009
  • For successful osteogenesis around the implants, interaction between implant surface and surrounding tissue is important. Biomechanical bonding and biochemical bonding are considered to influence the response of adherent cells. But the focus has shifted surface chemistry. The purpose of this study is to evaluate the MC3T3-E1 osteoblast like cell responses of magnesium (Mg) ion implanted titanium surface produced using a plasma source ion implantation method. Commercially pure titanium disc was used as substrates. The discs were prepared to produce four different surface, A: Machine turned surface, B: Mg implanted surface, C: sandblasted surface, D: sandblasted and Mg implanted surface. MC3T3 El osteoblastic like cells were cultured on the disc specimens. Cell adhesion, proliferation, differentiation, and synthesis of extracellular matrix were evaluated. The cell adhesion morphology was evaluated by SEM. RT PCR assay was used for assessment of cell adhesion, proliferation and differentiation. ALP activity was measured for cell differentiation. The results of this study were as follows: 1. SEM showed that cell on Mg ion groups was more proliferative than that of non Mg ion groups. On the machine turned surface, cell showed some degree of contact guidance in aligning with the machining grooves. 2. In RT PCR analysis, osteonectin and c-fos mRNA were more expressed on sandblasted and Mg ion implanted group. 3. ALP activity was not significantly different among all groups. Within the limitations of this study, the following conclusions were drawn: It might indicate Mg ion implanted titanium surface induce better bone response than non Mg ion groups.

A Case of Giant Cell Interstitial Pneumonia (거대세포 간절성 폐렴(Giant Cell Interstitial Pneumonia) 1예)

  • Kang, Kyeong-Woo;Park, Sang-Joon;Suh, Gee-Young;Han, Joung-Ho;Chung, Man-Pyo;Kim, Ho-Joong;Kwon, O-Jung;Rhee, Chong-H.;Choi, Jae-Wook
    • Tuberculosis and Respiratory Diseases
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    • v.48 no.2
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    • pp.260-267
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    • 2000
  • Giant cell interstitial pneumonia. a synonym for hard metal pneumoconiosis, is a unique form of pulmonary fibrosis resulting from an exposure to hard metal dust. A case of biopsy-proved giant cell interstitial pneumonia in the absence of appropriate history of exposure to hard metal dust is reported. The patient presented with clinical features of chronic interstitial lung disease or idiopathic pulmonary fibrosis. He worked in a chemical laboratory at a fertilizer plant, where he had been exposed to various chemicals such as benzene and toluene. He denied having any other hobby in his house or job at work, which may have exposed him hard metal dust. High-resolution CT scan revealed multi-lobar distribution of ground glass opacity with peripheral and basal lung predominance. The retrieved fluid of bronchoalveolar lavage contained asbestos fiber and showed neutrotphil predominance. Surgical lung biopsy was performed for a definite diagnosis. Lung specimen showed alveolar infiltration of numerous multinucleated giant cells with mild interstitial fibrosis. Upon detailed examination of the lung tissue, one asbestos body was found. An analysis for mineral contents in lung tissue was performed. Compared with the control specimen, the amount of cobalt and several hard metal components in the lung tissue of this patient was ten times higher. We speculated that the inconsistency between occupational history and the findings of pathologic and mineralogical analyses could be explained by the difference in individual immunologic reactivity to hard metal dust despite the relatively small amount of unrecognized environmental exposure(ED: It's hard to understand what this phrase is trying to say).

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