• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 추계학술대회 논문요약집
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• pp.288-288
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• 2003

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.409-412
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• 2002

This paper presents a measurement method to compromise surface error in surface machining processes. In order to compromise the surface error in machining process, on-machine measurement is essential. There are two kinds of on-machine measurement methods available to measure the surface errors in flat workpieces: i.e., surface scanning method and sensor scanning method. However, motion errors are inevitably engaged in both methods. This paper proposes a new idea to measure the surface error for error compensation. The measurement system consists of a laser, a CCD camera and processing system, a carrier system with a stylus, and some optical units. The experimental results show that the proposed method is useful to compensate the surface errors of machined workpieces.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.203-206
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• 2001

This paper presents a straightness measurement system for flat and long workpieces. The measurement system consists of a laser optical unit, a CCD camera and processing system, and a carrier system with a stylus. The carrier system accompanies the stylus, which displaces a retroreflector along the surface profile. The optical unit is used to optically amplify the displacement of retroreflector. The CCD camera and processing system finally identifies the vertical displacement of the stylus unit. The developed system is applied to two surfaces: ground surface and LM guide surface. The experimental results show that the developed system can measure the straightness of flat surfaces within sub-micron error.

• 한국정밀공학회지
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• 제19권3호
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• pp.107-113
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• 2002

This paper presents a straightness measurement system for flat and long workpieces. The measurement system consists of a laser, a CCD camera and processing system, a carrier system with a stylus, and some optical units. The carrier system accompanies the stylus, which displaces and retroreflector along the surface profile. The optical unit is used to optically amplify displacement of the stylus unit. The developed system is applied to a ground surface and a LM guide unit. The experimental results show that the developed system can measure the straightness of flat surface and moving systems.

• 한국정밀공학회지
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• 제17권9호
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• pp.75-80
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• 2000

Although laser interferometer is widely accepted as a tool for measurement of motion accuracy the set-up procedure is time-consuming because of the strict requirement on alignment between laser head and optic units. This paper presents a 4-axis auto-aligning system which is useful for easy set-up of laser interferometer so as to evaluate precision of a 2-axis feeding system. This paper proposes two ideas for alignment in laser interferometer set-up: one is use of mirror and retroreflectors. and the other is taking advantage of the pre-defined movement and peculiar characteristic of retroreflecotrs. The pros and cons of the two methods are discussed. Illustrative experimental results are presented in which the developed system is applied to a XY table.

• 한국정밀공학회지
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• 제20권3호
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• pp.187-193
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• 2003

This paper presents an on-machine measurement method of flatness error fur surface machining processes. There are two kinds of on-machine measurement methods available to measure flatness errors in workpieces: i.e., surface scanning method and sensor scanning method. However, motion errors are often engaged in both methods. This paper proposes an idea to realize a measurement system of flatness errors and its rigorous application for estimation of motion errors of the positioning system. The measurement system is made by modifying the straightness measurement system, which consists of a laser, a CCD camera and processing system, a sensor head, and some optical units. The sensor head is composed of a retroreflector, a ball and ball socket, a linear motion guide unit and adjustable arms. The experimental .results show that the proposed method is useful to identify flatness errors of machined workpieces as well as motion errors of positioning systems.