• Particle and aerosol research
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• v.12 no.3
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• pp.95-102
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• 2016

Controlling exposures to occupational hazards is important for protecting workers. Certified facepiece respirators are recommended when engineering controls do not adequately prevent exposures to airborne nanomaterials. The objective of this study is to carry out the experimental performance test to investigate the fractional efficiencies of the filter media for two grades of facepiece respirators. Experimental performance evaluations were carried out for the test NaCl particles and silver nanoparticles. For media of respirator filter, the penetration of NaCl particles was less than 5% and the most penetrating particle size occurred at about 40 nm. For silver nanoparticles, the most penetrating particle size was about 20nm with higher efficiency than those of NaCl particles. Charge characteristics of airborne nanoparticles is important because the media of respirator filter is made by the electret filter media.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.10
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• pp.1498-1507
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• 2003

A SMPS(scanning mobility particle sizer) system measures the number size distribution of particles using electrical mobility detection technique. An aerosol charge neutralizer, which is a component of the SMPS, is a bipolar charger using a radioactive source to apply an equilibrium charge distribution to aerosols of unknown charge distribution. However, the performance of aerosol charge neutralizers is not well known, especially for highly charged particles. In this study, the effect of the particle charging characteristics of two aerosol charge neutralizers on the measurement using a SMPS system was experimentally investigated for highly charged polydisperse particles. One has radioactive source of $^{85}$ Kr (beta source, 2 mCi) and the other has $^{210}$ Po (alpha source, 0.5 mCi). The air flow rate passing through each aerosol charge neutralizer was changed from 0.3 to 3.0 L/min. The results show that the non-equilibrium character in particle charge distribution appears as the air flow rate increases although the particle number concentration is relatively low in the range of 1.5∼2x10$^{6}$ particles/㎤. The low neutralizing efficiency of the $^{85}$ Kr aerosol charge neutralizer for highly charged particles can cause to bring an artifact in the measurement using a SMPS system. However, the performance of the $^{210}$ Po aerosol charge neutralizer is insensitive to the air flow rate.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.10
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• pp.1489-1497
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• 2003

Aerosol charge neutralizers with various radioactive sources have been used to apply an equilibrium charge distribution to aerosols of unknown charge distribution. However, the performance of aerosol charge neutralizers is not well known, especially for highly charged particles. Measurements of highly charged particles are needed in air cleaning devices, e.g. electrostatic precipitator, bag filter with a pre-charger, and electrical cyclone. In this study, the particle charging characteristics of two different aerosol charge neutralizers were experimentally investigated for singly charged monodisperse particles and highly charged polydisperse particles. One has radioactive source of $^{85}$ Kr (beta source, 2 mCi) and the other has $^{210}$ Po (alpha source, 0,5 mCi). The air flow rate passing through each aerosol charge neutralizer was changed from 0.2 to 2.5 L/min. The results show that the charge distribution of singly charged monodisperse particles passing through the $^{85}$ Kr aerosol charge neutralizer is well agreed with the Boltzmann equilibrium charge distribution at an air flow rate of 0.3 L/min, However, it deviates from the equilibrium charge distribution when the air flow rates are 0.6, 1,0, and 1,5 L/min, On the other hands, the effect of air flow rate is insignificant for the $^{210}$ Po aerosol charge neutralizer. The non-equilibrium character in charge distribution of highly charged polydisperse particles passing through the $^{85}$ Kr aerosol charge neutralizer greatly depends on the air flow rate, however it is insensitive to the air flow rate for the $^{210}$ Po aerosol charge neutralizer.

• Air Cleaning Technology
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• v.17 no.4 s.67
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• pp.39-57
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• 2004

첨단산업으로 불리는 반도체, LCD, PDP, 유기EL(OLED) 등의 생산 공정은 고도의 청정상태를 요구하며, 때문에 이들의 생산공정 중 대부분이 클린룸 내에서 이루어진다. 클린룸 내에서의 주요공정은 크게 박막형성(Layering), 노광(Photo Lithography), 식각(Etching) 등 3가지 공정으로 나눌 수 있으며, 반도체 제조공정의 경우 특별히 도핑(Doping) 공정이 추가된다. 오염물질을 함유하는 클린룸 배기는 일반적으로 산, 알칼리, Toxic(PFCs, Flammable), VOC 등으로 분류하며, 각각의 배기는 각 배기특성에 맞는 오염제어 장치를 통해, 정화된 후, 대기로 방출된다. 산, 알칼리 배기는 일반적으로 최종 단계에서 중앙집중식 습식스크러버에 의해 흡수, 중화 처리되며, VOC의 경우 농축기(Concentrator) & 축열식 열 산화장치(RTO) 설비에 의해 연소 처리된다. 하지만 CVD공정으로부터의 배기가 주를 이루는 Toxic배기의 경우, 다량의 PFCs(과불소화합물) 가스를 함유하고 있는 이유로, 대부분 클린룸 내부에 P.O.U(Point of use) 처리장치가 설치되며, P.O.U에 의해 1차 처리된 후 최종적으로 중앙집중식 습식스크러버를 거쳐 대기로 방출된다. 알칼리배기의 주성분으로는 암모니아($NH_3$), HMDS (Hexa Methyl DiSilazane), TMAH (Tetra Methyl Ammonium Hydroxide), LGL, CD 등이며 흡수액에 황산(Sulfuric Acid)용액을 공급, 중화처리하고 있다. 탄소성분을 먹이로 하는 미생물의 번식에 의한 막힘 문제를 제외하고는 큰 문제가 없다. 하지만 Toxic배기 및 산배기의 경우 처리효율이, 가스흡수 이론에 의한 계산결과와 비교할 때, 매우 저조하게 나타나는 효율부족 현상을 겪고 있으며, 이는 잔여 PFCs 가스성분 및 반응에어로졸, 응축에어로졸 등의 영향으로 추정하고 있다. 최근 Toxic 배기의 경우, P.O.U 설비를 Burn & Wet type으로 변경하여, 배기 중 PFCs 및 반응에 에어로졸($SiO_2$)의 농도를 원천적으로 감소시키는 노력이 진행 중이다. 산배기의 경우, 산결로 현상에 의한, 응축에어로졸이 문제가 되고 있으나 내식열교환기(Anti-Corrosive Heat Exchanger), 하전액적스크러버 시스템(Charged Droplets Scrubber System), Wet ESP(Wet Electrostatic Procipitator) 등의 도입을 통해 문제해결을 위한 노력을 경주하고 있다.