• 한국정밀공학회지
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• 제19권1호
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• pp.65-70
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• 2002

An analysis method for calculating motion accuarcy of double sides hydrostatic table is proposed in this paper. In this method, profiles of each rails are assumed as periodic function, therefore it is represented as the sum of spacial frequencies. Bearing clearance at any position rail is depended on the variation of linear, angular motion error of table and the form errors of both sides of a rail. Finite element method is applied to calculate pressure distributions in bearing clearance. In order to simplify the analyzing process, double sides table model is converted into equivalent single side table model. Results calculated by the proposed modeling method agree well with the results directly caculated by double sides modeling method, and also agree well with experimental results. From the theoretical and experimental analysis, it is verified that the proposed analysis method is very effective to analyze the motion accuracy of double sides hydrostatic table.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.188-192
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• 2000

An analysjs model for calculation the motion accuarcy of double sides hydrostatic table is proposed in thn paper. For the analysis of motion accuracy, profiles of each rails are assumed as periodic function, and represented using Fourier coefficients. Variahon of bearing clearance is represented as the vanation of linear, angular displacement of table and profiles of rails. Motion accuracy is calculated in the basis of finite element analysis on the pressure dutributmn of table. In order to improve calculating time in the analysis of motion accuracy, The proposed modeling method converts double sides table to single side table equivalently Results by the proposed method 1s compared with directly caculated results mdyhcally, and also compared wlth experimental results. From the theoretical and experimental analysis, it is confirmed that the proposed modeling mothod is very effective to analyze the motion accuracy of dauble sides hydrostatic table.