• Journal of KSNVE
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• v.9 no.4
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• pp.835-840
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• 1999

Cause of excessive vibration signals with twice the rotational speed of a 2-pole generator rotor in balancing for fossil power plants was investigated. The 2-pole generator rotor is treated as a typically asymmetric rotor in vibration analysis, and produces asynchronous vibration with twice the rotational speed for its own inertia and stiffness asymmetry. This paper introduces practical balancing procedure and experimental vibration data of the asymmetric 2-pole rotor in balancing, and presents the results of investigation into sources of the excessive vibration signals.

• Journal of Sensor Science and Technology
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• v.1 no.2
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• pp.183-194
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• 1992

Some silicon micromechanical structures useful in sensors and actuators have been fabricated by electropolishing or porous silicon formation technique by anodic reaction in HF solution. The microstructures were lightly doped single crystal silicon and the formation was isotropic independent of crystal directions. Porous silicon layer(PSL) was formed selectively in $n^{+}$ region of $n^{+}/n$ silicon structure by anodic reaction in concentrated HF(20-48%) solution. Characteristics of the formed PSL were investigated along with change of the reaction voltage, HF concentration and the reaction time. PSL was formed only in $n^{+}$ region. The porosity of the PSL was decreased with the increase of HF concentration and independent of reaction voltage. For the case of $n/n^{+}/n$ structures, the etched surface of silicon was fairly smooth and a cusp was not found. The thickness of the microstructures was the same as that of the epitaxial n-Si layer and good uniformity. We have fabricated acceleration sensors by anodic reaction in HF solution(5 wt%) and planar technology. The process was compatible with conventional It fabrication technique. Various micromechanical structures, such as rotors of motor, gears and linear actuator, were also fabricated by the technique and examined by SEM photographs.