• The Journal of the Acoustical Society of Korea
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• v.41 no.3
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• pp.278-286
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• 2022

In this study, a 33-mode Free-Flooded Ring (FFR) transducer was designed to apply piezoelectric single crystal PIN-PMN-PT, which has high piezoelectric constants and electromechanical coupling coefficient. To ensure low-frequency high transmitting sensitivity characteristics with a small size of FFR transducer, the commercial FFR transducer based on piezoelectric ceramics was compared. To develop the FFR transducer with broadband characteristics, a piezoelectric segmented ring structure inserted with inactive elements was applied. The oil-filled structure was applied to minimize the change of acoustic characteristics of the ring transducer. It was verified that the transmitting voltage response, underwater impedance, and beam pattern matched the finite element numerical simulation results well through an acoustic test. The difference in the transmitting voltage response between the measured and the simulated results is about 1.3 dB in cavity mode and about 0.3 dB in radial mode. The fabricated FFR transducer had a higher transmitting voltage response compared to the commercial transducer, but the diameter was reduced by about 17 %. From this study, it was confirmed that the feasibility of a single crystal-applied FFR transducer with compact size and high-power characteristics. The effectiveness of the performance prediction by simulation was also confirmed.

• The Journal of the Acoustical Society of Korea
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• v.38 no.2
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• pp.184-192
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• 2019

Compared to 31-mode rings, 33-mode rings are highly utilized as wide bandwidth underwater acoustic transducers because the electro-mechanical coupling and piezoelectric constant d are high. On the other hand, the 31-mode ring is an axial symmetry structure, so it is possible to model it as a simple two-dimensional asymmetrical model for numerical analysis, but the 33-mode ring requires a three-dimensional numerical analysis. That is, a lot of computing resources and computation time are required. In this study, the effective material properties of an equivalent 31-mode ring were derived to simulate the electro-mechano-acoustical responses of the 33-mode ring transducer. Using the effective material properties derived from this study, a numerical analysis of rings in vacuum, air backed rings in water, and FFR (Free Flooded Ring) transducers were performed to compare the responses of 33-mode rings.

• The Journal of the Acoustical Society of Korea
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• v.34 no.5
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• pp.351-359
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• 2015

Typical underwater acoustic transducers detect only the magnitude of an acoustic pressure and they have the limitation of not being able to recognize the direction of the sound signal. Hence, the authors of this paper proposed a new vector sensor structure based on Tonpilz transducers that could detect both the magnitude and the direction of a sound pressure. In the proposed structure, the piezoceramic ring was divided into four segments, and proper combination of the output voltages of the segments in response to the external sound pressure could provide the information on the orientation of the sound source. In this paper, a Tonpilz transducer has been fabricated to have the proposed structure and its characteristics has been measured to confirm the validity of the proposed structure.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.89-89
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• 2000

AlN 박막은 Al과 N원자의 부분적 이온결합 특성을 가진 공유결합을 한 육방정계의 wurtzite 경정구조의 화합물 반도체로서, III-V족 반도체 중 가장 큰 에너지 갭(6.2 eV), 결정 구조적 이방성, 화학 양론적 결합구조, 높은 탄성종과 전달속도(약 10$\times$106 m/s)와 높은 열전도도, 고온 안정성, 가시광성.적외선 영역에서의 좋은 투과성과 높은 굴절률, 상온 대기압에서의 유일하게 안정적인 특성을 가지고 있어, 절연재료, 내열재료, 저주파 영역 센서의 압전 트랜스듀서, 광전소자, 탄성파 소자 및 내환경 소자, MIS소자 등으로 주목받고 있다. 본 연구에서는 BAW 공진기의 활용을 목적으로 반응성 마그네트론 스퍼터링 방법으로 AIN 압전박막을 제작하여, 증착 조건-질소 농도, 고주파 출력, 전체 스퍼터링 압력, 기판 온도-에 대한 박막의 특성을 조사하였다. AlN 박막의 c축 우선 방위 결정성 및 낮은 투과성, 적당한 굴절률의 특성이 BAW 공진기의 활용을 위한 요건이므로, 각각의 증착 조건하에 제작된 박막은 XRD의 $\theta$/2$\theta$ 스캔 회절상에 의한 결정성의 분석과 우선 성장 결정면의 rocking curve 및 XRD로 측정한 FWHM과 표준 편차로 결정성의 배열성과 소자 응용가능성을 조사하였다. 박막의 표면.단면 미세 구조 및 평활도는 SEM으로 관찰하였으며, Al-N 결합 상태는 XPS와 FT-IR로 분석 조사하였다. 제작된 AlN 박막의 결정성 분석 결과, c축 우선 방위 성장을 위한 스퍼터링 압력에 대한 임계 질소 농도와 임계 스퍼터링 압력이 관찰되었다. 전체 스퍼터링 압력이 6~8 mTorr의 범위에서 나타난 최소 임계질소 농도는 10%, 최대 임계 질소 농도는 60%이며, 4 m Torr 이하 10 m Torr 이상의 전체 스퍼터링 압력에서 박막의 우선 방위성장이 제재된다. 이는 AlN 박막이 형성에 관여하는 질소 이온 양의 충분한 형성에 필요로 하는 질소 가스의 유입량에 따른 것으로 판단된다. AlN 박막의 c축 결정면인 (002) 결정면의 성장을 유도하며 다른 방향으로의 성장을 제어하여 소자 활용에 유용한 박막을 제작하기 위한 고주파 출력은 300W 정도가 적당하며, 기판을 가열하지 않았을 때 낮은 투과도를 나타낸다. 본 연구에 의한 BAW 공진기 활용을 위한 AlN 압전박막의 제작을 위한 최적 증착 조건은 기판의 가열 없이 6~8 mTorr의 전체 스퍼터링 압력에 20~25%의 질소종도, 300W의 고주파 출력이다. 최적 조건에서의 AlN 박막은 약 0.19$^{\circ}$의 FWHM과 약 0.08$^{\circ}$의 표준편차를 가지며, 균일하고 조밀한 표면 미세구조와 주상정 구조의 측면구조, 파장에 대한 약 2.0의 굴절률, 낮은 투과도와 화학 양론적 구조를 가지는 우수한 박막이 형성되었다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.2
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• pp.227-233
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• 2014

This study investigates the vibration characteristics of a wire-bonding piezoelectric transducer and ultrasonic horn for high-speed and precise welding. A ring-type piezoelectric stack actuator is excited at 136 kHz to vibrate a conical-type horn and capillary system. The nodal lines and amplification ratio of the ultrasonic horn are obtained using a theoretical analysis and FEM simulation. The vibration modes and frequencies close to the driving frequency are identified to evaluate the bonding performance of the current wire-bonder system. The FEM and experimental results show that the current wire-bonder system uses the bending mode of 136 kHz as the principal motion for bonding and that the transverse vibration of the capillary causes the bonding failure. Because the major longitudinal mode exists at 119 kHz, it is recommended that the design of the current wire-bonding system be modified to use the major longitudinal mode at the excitation frequency and to minimize the transverse vibration of capillary in order to improve the bonding performance.